• Title/Summary/Keyword: Profilometry

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Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera

  • Srivastava, Vishal;Inam, Mohammad;Kumar, Ranjeet;Mehta, Dalip Singh
    • Journal of the Optical Society of Korea
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    • v.20 no.6
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    • pp.784-793
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    • 2016
  • We present a single shot low coherence white light Hilbert phase microscopy (WL-HPM) for quantitative phase imaging of Si optoelectronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells. White light interferograms were recorded by a color CCD camera and the interferogram is decomposed into the three colors red, green and blue. Spatial carrier frequency of the WL interferogram was increased sufficiently by means of introducing a tilt in the interferometer. Hilbert transform fringe analysis was used to reconstruct the phase map for red, green and blue colors from the single interferogram. 3D step height map of Si-ICs and Si solar cells was reconstructed at multiple wavelengths from a single interferogram. Experimental results were compared with Atomic Force Microscopy and they were found to be close to each other. The present technique is non-contact, full-field and fast for the determination of surface roughness variation and morphological features of the objects at multiple wavelengths.

A curvature profilometry using white-light (백색광을 이용한 곡률 측정법 개발)

  • Kim, Byoung-Chang
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.7 no.3
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    • pp.81-86
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    • 2008
  • I present a 3-D profiler specially devised for the profile measurement of specular surfaces that requires precision shape accuracy up to a few nanometer. A profile is reconstructed from the curvature of a test part of the surface at several locations along a line. The local curvature data are acquired with White-light Scanning Interferometry. Test measurement proves that the proposed profiler is well suited for the specular surface inspection like precision mirror.

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3-D shapes measurement technique using pattern projection (간섭무늬 투영 방식을 이용한 3차원 형상측정법)

  • 박준식;나성웅;이연태;강영준
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.26-27
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    • 2002
  • 광학식 3차원 형상측정 기술은 산업현장과 의료분야에서 광범위하게 사용되어지고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 본 연구에서는 비접촉식 3차원 형상측정 방법인 위상측정법(Phase Measuring Profilometry; PMP)을 실험적으로 구현하였으며 위상추출 알고리즘으로는 위상이동방법(Phase shifting method)과 푸리에 변환법(Fourier Transform)을 사용하여 그 결과를 비교 및 고찰하였다. (중략)

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A study on the grid fringe generator for measurement of 3-D object (영사식 3차원 형상 측정을 위한 격자무늬 생성장치에 관한 연구)

  • 박윤창
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1999.10a
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    • pp.170-175
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    • 1999
  • Noncontact measuring methodology of 3-dimensional profile using CCD camera are very attractive because of it's high measuring speed and its's high sensitivity. Especially, when projecting a grid pattern over the object the captured image have 3 dimensional information of the object. Projection moire extract 3-D information with another grid pattern in front of CCD camera. However phase measuring profilometry(PMP) obtain similar results without additional grid pattern. In this paper, new method for grid pattern generation system by polygonal mirror and Laser Diode. This system is applied the projection moire and the PMP.

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Frequency filtering on Fourier Transform Profilometry for the Measurement of 3-D shapes (푸리에 변환법을 이용한 3차원 형상측정에서의 필터 효과)

  • 박준식;나성웅;박승규;백성훈
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.94-95
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    • 2003
  • 광학식 3차원 형상측정 기술은 산업현장과 의료분야 등에서 광범위하게 사용되어지고 있으며, 이에 대한 연구도 활발히 진행되고 있다. 본 연구에서는 푸리에 변환법에 의한 위상정보 추출 기술을 개발하고, 주파수 영역에서의 창함수 필터에 따른 위상추출 특성을 분석하였다. 광조사 장치로는 LCD 프로젝터를 이용한 투영방식(그림 1)과 레이저 간섭계 투영방식(그림 2)을 사용하였다. (중략)

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Development of Laser Reference System for the Large Optics Testing (큰 광학면 측정을 위한 레이저 기준계의 개발)

  • ;David Walker
    • Proceedings of the Optical Society of Korea Conference
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    • 2001.02a
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    • pp.94-95
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    • 2001
  • 본 논문에서는 큰 광학면을 Profilometry로 측정하는데 있어서 꼭 필요한 기준계로 공기 중을 전파해가는 레이저 광선을 이용하는 방법을 논의하였다 Profilometer는 stylus tip이 직접 표면에 접촉하여 높이를 읽어가는 방식으로 이때 기준계는 정확한 높이를 구하는데 아주 중요한 역할을 한다 즉, 높이의 측정은 기준계를 기준 하여 이루어지기 때문에 기준계에서의 오차는 곧바로 높이의 오차로 이어지게 된다. (중략)

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Frequency filtering effect on Fourier Transform 3-D Profilometry (푸리에 변환법을 이용한 3차원 위상측정에서의 필터 효과)

  • 박준식;나성웅;박승규;백성훈;이용주
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.07a
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    • pp.296-297
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    • 2003
  • 본 연구에서는 푸리에 변환법에 의한 위상정보 추출 기술을 개발하고, 주파수 영역에서의 창함수 필터에 따른 위상추출 특성을 분석하였다. 푸리에 변환법은 위상이동법과는 달리 정현파 패턴이 투영된 하나의 영상만을 이용하여 3차원 형상정보를 추출할 수 있는 장점이 있다. 획득된 영상은 오일러 공식으로부터 다음과 같이 표현할 수 있다. (중략)

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Development of Prototype Stylus Prototype for Large Optics Testing

  • Yang, Ho-Soon;Walker, David
    • Journal of the Optical Society of Korea
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    • v.5 no.2
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    • pp.60-66
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    • 2001
  • The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.

Development of Eddy Current Test Probe for Profilometry Inspection of Tube (원형튜브 단면형상검사용 와전류탐촉자 개발)

  • Lee, H.J.;Nam, M.W.;Lee, C.H.
    • Journal of the Korean Society for Nondestructive Testing
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    • v.17 no.4
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    • pp.262-269
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    • 1997
  • An eddy current probe ($8{\times}1$ multiple-element, surface scan) was successfully designed and fabricated at the KEPRI using the impedance equivalent circuit theory. The probe is intended for the detection of circumferential deformations (cross-section view) of the heat exchanger tubing that can occur due to corrosion, erosion, and denting. Optimum design parameters providing the highest sensitivity and signal-to-noise ratio, such as the coil dimensions, electrical characteristics, and test frequencies, were determined based on initial laboratory experiments conducted on the test specimen (SS304 tubing: OD : 9.68mm, wall-thickness : 0.47mm) containing artificial flaws (e.g., dents and corroded surface on tube OD) using the available Zetec-made probe. Using this parameters, a new probe was made and tested on an unknown specimen. The result indicated that the new probe is capable of detecting the circumferential deformation with the error of ${\pm}0.2%$ (0.022mm) of the tube O.D.

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The Efficacy of Ampule Containing Herbal Extract for Improving Skin Wrinkles in Women (한약재 추출물 함유 앰플의 주름개선 효능에 관한 기초 임상연구)

  • Do, Eun-Ju;Lee, Jin-Sang;Park, Hyun-Jin;Ha, Il-Do;Kim, Young-Chul;Kim, Mi-Ryeo
    • Herbal Formula Science
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    • v.17 no.2
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    • pp.111-121
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    • 2009
  • Objectives : This study was performed to evaluate the efficacy of ampule containing herbal extract(Ulmus davidiana, Ginkgo biloba, Perilla ocymoides, Morus alba, Glycyrrhiza uralensis (licorice), and Angelica gigas) on skin wrinkles in adult women with facial wrinkles. Methods : A total of 12 women, 30 to 46 years of age, with wrinkles in the corner of eyes, applied ampule containing herbal extract twice daily for up to 12 weeks. Silicon replicas of right crow's feet area and antecubital fossa were taken before use of test product and at 4, 8 and 12 weeks. The replicas were analyzed by optical profilometry with Skin Visiometer SV600. The wrinkle and roughness parameters, R1, R2, R3, R4 and R5 were calculated and statistically analyzed. In addition, a subjective evaluation of product efficacy was conducted by patient's assessment. Results : The mean values of all the skin roughness parameters were decreased at 4-week, and decreased significantly at 8 and 12-week except R4 at 12-week after test product use. The subjective evaluation of wrinkle by patient's assessment was also improved. However, one patient noted stiffness of face after use of test product. Conclusions : These study suggested that the application of ampule containing herbal extract twice daily for 12 weeks may effectively improve the facial wrinkles without severe side effect.

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