• 대한기계학회논문집A
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• 제30권12호
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• pp.1649-1657
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• 2006

Fizeau interferometer is well known optical instrument for measuring the lens profile accurately. The object of this study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for astronomical purpose. Measuring of large optical lens, the object could not be moved as small one but the measuring instrument must be moved for the alignment, because of the geometric conditions and the accuracy of the stage. Therefore, a five axis stage is designed to align the Interferometer instead of the measuring object. This instrument will be used for an on machine measuring system in polishing machine for large optical lens.

• Journal of Mechanical Science and Technology
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• 제19권8호
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• pp.1576-1581
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• 2005

Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3\~5\;{\mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.

• 대한기계학회논문집A
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• 제29권5호
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• pp.726-733
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• 2005

A spherical surface referenced Shack-Hartmann method is studied for inspecting machining accuracy of large concave mirror This method is so strong to the vibration environment for using as an on-machine inspection system during polishing process of large optics comparing with the interferometry. The measuring uncertainty of the system is shown as less than p-v 150 m. On-machine measured surface profile data with this method is used for feed back control of the polishing time or depth to improve the surface profile accuracy of large concave mirror. Also, the spherical surface referenced Shack-Hartmann method is useful for measuring aspheric such as parabolic or hyperbolic surface profile, comparing that the interferomehy needs a special null lens, which is to be a reference and difficult to fabricate.

• 한국기계가공학회지
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• 제5권3호
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• pp.80-85
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• 2006

In an effort to reduce the evaluation time of the precision of manufactured disk cams, an effective measuring method with an exclusively built profile-measuring machine and subsequent data analysis procedure is proposed. The design and measuring data are interpolated by cubic spline curves to compute the precision error which is defined by the maximum and minimum distances between two curves. The minimum zone criterion of ISO is employed to evaluate the form error, and genetic algorithm is used to search the orientation and location of design data for the measured data which minimizes the form error. The proposed system was applied to marine engine cams, and it shows that the form error is reduced to 30% down compared with the method which minimizes the form error with the assumption that the centers of measured data design cam curve are identical.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.614-618
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• 2002

In hot strip mills, Portable Roll Scanner (the portable roll surface temperature and profile measuring device) can be used to calibrate on-line Process models for strip crown and flatness by measuring the thermal expansion and wear profile of the rolls. And the surface temperature measurement can be used to optimize the roll cooling system. Portable Roll Scanner consists of the measuring device, which has two contact inductive distance transducers for roll profile measurement and one infrared Pyrometer for surface temperature measurement, and computer-based controller that is equipped with the measuring device. By the wireless data communication, the data is transferred to the memory of notebook for further analysis. After roll extraction from mills, Portable Roll Scanner measure the roll profile and surface temperature simultaneously along the work roll face and display the results in the TFT color monitor of notebook. Portable Roll Scanner is useful at mill-side and roll grinding shop.

• 한국기계가공학회지
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• 제2권3호
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.255-258
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• 1995

Surface profile is an important paramerer to evaluate accuracy of machined worpiece. It is necessary to acquire this data by in-process measurement. Recent researchers have introduced Machine Vision technique to achieve it. But it is difficult to apply it to industry field yet. In this study, in-process measuring system of surface profile is developed using CCD camera. The effect of illuminance according to incident angle is investigated and surface profile from surface tester and illuminance graph are compared experimentally.

• 한국정밀공학회지
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• 제25권8호
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• pp.21-28
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• 2008

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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• pp.138-141
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• 1995

This paper describes a 3-dimensional measuring method for cylindrical huge ingot pressed with forging machine. Target ingot we consider here is rotated around a fixed axis during measurement. Using an image processing technique every profile of cross-section is obtained, and 3D image is reconstructed. One method to calibrate the system setting is also presented. Experimental results reveal that the method are applicable and the algorithm is feasible.

• 대한기계학회논문집
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• 제17권2호
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• pp.407-415
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• 1993

This report presents an automatic measurement method of 3-dimensional profiles of free-formed surfaces, by using a touch a touch-trigger contact probe along with a conventional coordinate measuring machine. The method proceeds in three steps; The surface profile under consideration is traced by the probe in an automatic manner, and then its measured data is compensated by considering the actual probe radius. Finally the compensated data is rearranged in the form suitable for the further processings of CAD/CAM applications. Some experimental results are discussed to verify the validity of the method suggested in this study.