• 한국정밀공학회지
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• 제21권10호
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• pp.26-33
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• 2004

Ultra precision grinding technology has been developed from the refinement of the abrasive, the development of high stiffness equipment and grinding skill. The conventional wafering process which consists of lapping, etching, 1 st, 2nd and 3rd polishing has been changed to the new process which consists of precision surface grinding, final polishing and post cleaning. Especially, the ultra precision grinding of wafer improves the flatness of wafer and the efficiency of production. Furthermore, it has been not only used in bare wafer grinding, but also applied to wafer back grinding and SOI wafer grinding. This paper focuses on the flatness of the ground wafer. Generally, the ground wafer has concave pronto because of the difference of wheel path density, grinding temperature and elastic deformation of the equipment. Wafer tilting is applied to avoid non-uniform material removal. Through the geometric analysis of wafer grinding process, the profile of the ground wafer is predicted by the development of profile simulator.

• 한국해양공학회지
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• 제23권5호
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• pp.39-44
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• 2009

The hydrostatic slipper bearing is generally used in high pressure axial piston pumps to support the load generated from two surfaces which are sliding relatively at low speed. The object of the bearing is to remove the possibility of direct contact by maintenance of an adequate oil film thickness between two metal surfaces. Because the bearing performance is influenced by the bearing deformation, it is highly dependent on the injection pressure, the bearing surface profile and so on. In this study, the deformation characteristics of a hydrostatic slipper bearing is investigated according to the injection pressure by the finite element analysis. In the analysis, the special boundary condition to take the fluid-structure interaction (FSI) into account is used on the interactive surface. The results, such as bearing deformation, stress and lifting force, obtained from the fully coupled analysis are compared with those from the single step sequential method.

• 소성∙가공
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• 제5권2호
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• pp.122-129
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• 1996

The main objective of the study is to offer some basic information in relation to optimal shape and dimensions of the rotating band through the development of three-dimensional finite element method for metal forming analysis of the rotating band whose primary function is to impart spin to the projectile. The three-dimensional metal forming analysis of the rotating band has perfor-med by using recurrent boundary conditions. Such design factors as the outside diameter the total length and the profile of the rotating band must be considered carefully in order to design an optimal rotating band. Above design factors can be determined from such available analysis results as the deformed shape and the deformation load. of the rotating band and the normal pressure of the rotating band on a projectile shell. The remeshings are needed to carry out plastic deformation analysis with severe deformation through which the complete process analysis gets possible. The results can be utilized effectively in determining the optimal shape and size of the rotating band.

• 대한토목학회논문집
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• 제3권3호
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• pp.9-18
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• 1983

본(本) 연구(硏究)는 Sackin, M.J. 와 Merriam, D.F. (1969) 등(等)이 암석(岩石) 및 광물(鑛物)의 구성상태변화(構成狀態變化)를 파악(把握)하기 위해 사용(使用)한 Transition Matrices의 해석방법(解析方法)을 이용(利用)하여 해운대사빈(海雲臺砂濱)의 천이특성(遷移特性)을 파악(把握)할 목적(目的)으로 현장실측자료(現場實測資料)를 토대로 확정(確定)된 천이(遷移)모델의 천이특성(遷移特性)인 특정사빈(特定砂濱)의 출현빈도(出現頻度) 및 그 기여율(寄與率)을 구(求)하였다. 또 실제(實際)의 사빈변화(砂濱變化)가 계절적(季節的)인 순환특성(循環特性)을 보이면서 파랑(波浪)에 응답(應答)하는 시문(時問)과 공간(空間)의 복합적(複合的)인 요소(要素)들을 분리(分離)하여 선형함수(線型函數)의 조합(組合)으로 분석(分析)하고자 Winant, Inmann 그리고 Nordstorm(1975) 등(等)에 의해 제시(提示)된 Empirical Eigenfunction을 해운대사빈(海雲臺砂濱)의 변형해석(變形解析)에 적용(適用)하여 변형원인(變形原因)에 관한 인자(因子)의 규명(糾明)을 시도(試圖)하였으며 분석결과(分析結果) 요지(要旨)는 다음과 같다. (1) 해운대사빈(海雲臺砂濱)의 천이특성파악(遷移特性把握)이 Transition Matrices 전개해석방법(展開解析方法)으로 가능(可能)하였다. (2) 적용(適用)된 경험적(經驗的) 고유함수(固有函數)의 전개결과(展開結果)에 의하여 해운대사빈(海雲臺砂濱) 전체(全體)의 시간(時間) 및 공간적(空間的) 변형(變形)에 대한 설명(說明)이 가능(可能)하였다.

• 대한기계학회논문집B
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• 제40권6호
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• pp.357-363
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• 2016

본 연구에서는 날개 두께 분포가 다른 두 임펠러를 이용하여 유체-구조 연성해석을 통해 운전익단간극을 예측하고 임펠러의 변형이 성능에 미치는 영향에 대해 연구하였다. 임펠러는 작동조건에서 작용하는 원심력, 압력, 열 하중의 영향으로 변형이 발생하게 된다. 이로 인해 초기 설계된 익단간극이 비균일하게 변화하는 것을 확인하였다. 특히 임펠러 날개의 선단과 후단에서 가장 큰 익단간극 감소가 발생하였으며, 이로인해 간극누설유동이 19.4% 감소하였다. 또한 운전조건에서 익단간극 감소로 간극누설 유량이 감소하면서 효율은 0.72% 증가하는 것을 확인하였다. 원심압축기 작동조건에서의 정확한 운전익단간극의 예측과 익단간극의 변화가 성능에 미치는 영향에 대해서 확인하였다.

• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.53-58
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• 2022

Shape changes of hard mask play a key role in the aspect ratio dependent etch (ARDE). For etch process using high density and energy ions, deformation of hard mask shape becomes more severe, and high aspect ratio (HAR) etch profile is distorted. In this study, polygonal geometric model for shape-deformation of amorphous carbon layered hard mask is suggested to control etch profile during the process. Mask shape is modeled with polygonal geometry consisting of trapezoids and rectangles, and it provides dynamic information about angles of facets and etched width and height of remained mask shape, providing important features for real-time HAR etch profiling.

• 한국지진공학회논문집
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• 제18권4호
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• pp.161-170
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• 2014

Newmark-type deformation analysis has rarely been done in Korea due to the popularity of simple pseudo-static limit equilibrium analysis and detailed time-history FE/FD dynamic analysis. However, the Korean seismic dam design code updated in 2011 prescribes Newmark-type deformation analysis as a major dynamic analysis method for the seismic evaluation of fill dams. In addition, a design PGA for dynamic analysis is significantly increased in the code. This paper aims to study the seismic evaluation of four existing large fill dams through advanced FEM/Newmark-type deformation analyses for the artificial earthquake time histories with the design PGA of 0.22g. Dynamic soil properties obtained from in-situ geo-physical surveys are applied as input parameters. For the FEM/Newmark analyses, sensitivity analyses are performed to study the effects of input PGA and $G_{max}$ of shell zone on the Newmark deformation. As a result, in terms of deformation, four fill dams are proved to be reasonably safe under the PGA of 0.22g with yield coefficients of 0.136 to 0.187, which are highly resistant for extreme events. Sensitivity analysis as a function of PGA shows that $PGA_{30cm}$ (a limiting PGA to cause the 30 cm of Newmark permanent displacement on the critical slip surface) is a good indicator for seismic safety check. CFRD shows a higher seismic resistance than ECRD. Another sensitivity analysis shows that $G_{max}$ per depth does not significantly affect the site response characteristics, however lower $G_{max}$ profile causes larger Newmark deformation. Through this study, it is proved that the amplification of ground motion within the sliding mass and the location of critical slip surface are the dominant factors governing permanent displacements.

• 소성∙가공
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• 제7권3호
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• pp.282-290
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• 1998

In bulk metal forming processes prediction of tool life is very important for saving production cost and achieving good material properties. Generally the service life of tools in metal forming process is limited to a large extent by wear, fracture and plastic deformation of tools. In case of hot and warm forging processes tool life depends on wear over 70%. In this study finite element analyses are con-ducted to warm and hot forging by adopting suggested wear model. By comparison of simulation and eal profile of die suggested wear model. By comparison of simulation and real profile of die suggested model is verified.

• 한국레이저가공학회지
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• 제16권1호
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• pp.15-19
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• 2013

For numerical simulation of the deformation and residual stress development in metals during laser peening, the constitutive equations describing material behavior at various strain rates and plastic properties at high strain rate impact conditions are prerequisite. However, these parameters are often unknown for various engineering materials. In this study, the parameters of Johnson-Cook constitutive equation of duplex stainless steel were determined by comparing the residual stress profile predicted by numerical simulation using trial values and the measured residual stress profile with x-ray diffraction.

• 대한기계학회논문집
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• 제18권12호
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• pp.3246-3252
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• 1994

The vibration of meshing gear system is originated form teeth deformation, teeth contact ratio, profile error, etc. The gear vibration is classified as whine vibration during meshing and as rattle vibration during idling. In this study, the whine vibration is investigated under the assumption of piecewise linearity of elastic stiffness due to the variation of meshing. Numerical, theoretical and experimental investigations show the existence of the superharmonic components of the second and the third order. consistently It can be concluded that the superharmonic components in whine vibration of meshing gear is originated from the stiffness variation. It also shows that the higher order harmonics are reduced on the increase of motor speed.