• 제목/요약/키워드: Profile Deformation

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Profile Simulation in Mono-crystalline Silicon Wafer Grinding (실리콘 웨이퍼 연삭의 형상 시뮬레이션)

  • Kim Sang Chul;Lee Sang Jik;Jeong Hae Do;Choi Heon Zong;Lee Seok Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.10
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    • pp.26-33
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    • 2004
  • Ultra precision grinding technology has been developed from the refinement of the abrasive, the development of high stiffness equipment and grinding skill. The conventional wafering process which consists of lapping, etching, 1 st, 2nd and 3rd polishing has been changed to the new process which consists of precision surface grinding, final polishing and post cleaning. Especially, the ultra precision grinding of wafer improves the flatness of wafer and the efficiency of production. Furthermore, it has been not only used in bare wafer grinding, but also applied to wafer back grinding and SOI wafer grinding. This paper focuses on the flatness of the ground wafer. Generally, the ground wafer has concave pronto because of the difference of wheel path density, grinding temperature and elastic deformation of the equipment. Wafer tilting is applied to avoid non-uniform material removal. Through the geometric analysis of wafer grinding process, the profile of the ground wafer is predicted by the development of profile simulator.

A Study on the Deformation Characteristics of a Slipper Bearing for High Pressure Piston Pump (고압 피스톤 펌프용 슬리퍼 베어링의 변형 특성에 관한 연구)

  • Koh, Sung-Wi;Kim, Byung-Tak
    • Journal of Ocean Engineering and Technology
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    • v.23 no.5
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    • pp.39-44
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    • 2009
  • The hydrostatic slipper bearing is generally used in high pressure axial piston pumps to support the load generated from two surfaces which are sliding relatively at low speed. The object of the bearing is to remove the possibility of direct contact by maintenance of an adequate oil film thickness between two metal surfaces. Because the bearing performance is influenced by the bearing deformation, it is highly dependent on the injection pressure, the bearing surface profile and so on. In this study, the deformation characteristics of a hydrostatic slipper bearing is investigated according to the injection pressure by the finite element analysis. In the analysis, the special boundary condition to take the fluid-structure interaction (FSI) into account is used on the interactive surface. The results, such as bearing deformation, stress and lifting force, obtained from the fully coupled analysis are compared with those from the single step sequential method.

Plastic Deformation Analysis of Rotating Band by Three-Dimensional Finite Element Method Using Recurrent Boundary Condition (반복경계조건을 도입한 3차원 유한요소법에 의한 회전탄대의 소성변형 공정해석)

  • 양동열;이영규;박용복;조용찬;한만준
    • Transactions of Materials Processing
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    • v.5 no.2
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    • pp.122-129
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    • 1996
  • The main objective of the study is to offer some basic information in relation to optimal shape and dimensions of the rotating band through the development of three-dimensional finite element method for metal forming analysis of the rotating band whose primary function is to impart spin to the projectile. The three-dimensional metal forming analysis of the rotating band has perfor-med by using recurrent boundary conditions. Such design factors as the outside diameter the total length and the profile of the rotating band must be considered carefully in order to design an optimal rotating band. Above design factors can be determined from such available analysis results as the deformed shape and the deformation load. of the rotating band and the normal pressure of the rotating band on a projectile shell. The remeshings are needed to carry out plastic deformation analysis with severe deformation through which the complete process analysis gets possible. The results can be utilized effectively in determining the optimal shape and size of the rotating band.

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A Qualitative Analysis on the Deformation of HAEUNDE Beach Profiles (해운대사빈(海雲臺砂濱)의 단면천이특성(斷面遷移特性)에 관한 해석적(解析的) 연구(硏究))

  • Yang, Yun Mo;Ham, Gye Un
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.3 no.3
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    • pp.9-18
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    • 1983
  • In many geological investigation, a data sequence may be created which consisted of a succession of mutually exclusive state. However, now our interest lie in the nature of transition from one state to another, rather than in the position of states in the sequence. In this paper, authors studied for the deformation of HAEUNDAE beach by transition matrices and empirical eigenfunction method. In this paper, 5-yr. set of profile data from HAEUNDAE beach measured at several monthly or yearly intervals are analyzed by using the transition matrices and empirical eigen-function. Results of this study indicate that the transition matrices and empirical eigenfunctions are useful in the analysis of beach profile data and provide objective insight in the nature of profile configuration.

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Study on the Performance of a Centrifugal Compressor Using Fluid-Structure Interaction Method (유체-구조 연성해석을 이용한 원심압축기 운전익단간극과 성능 예측)

  • Lee, Horim;Kim, Changhee;Yang, Jangsik;Son, Changmin;Hwang, Yoonjei;Jeong, Jinhee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.6
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    • pp.357-363
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    • 2016
  • In this study, we perform a series of aero-thermo-mechanical analyses to predict the running-tip clearance and the effects of impeller deformation on the performance using a centrifugal compressor. During operation, the impeller deformation due to a combination of the centrifugal force, aerodynamic pressure and the thermal load results in a non-uniform tip clearance profile. For the prediction, we employ the one-way fluid-structure interaction (FSI) method using CFX 14.5 and ANSYS. The predicted running tip clearance shows a non-uniform profile over the entire flow passage. In particular, a significant reduction of the tip clearance height occurred at the leading and trailing edges of the impeller. Because of the reduction of the tip clearance, the tip leakage flow decreased by 19.4%. In addition, the polytrophic efficiency under operating conditions increased by 0.72%. These findings confirm that the prediction of the running tip clearance and its impact on compressor performance is an important area that requires further investigation.

Development of Polygonal Model for Shape-Deformation Analysis of Amorphous Carbon Hard Mask in High-Density Etching Plasma (고밀도 식각 플라즈마에서 비정질 탄소 하드 마스크의 형상 변형 해석을 위한 다각형 모델 개발)

  • Song, Jaemin;Bae, Namjae;Park, Jihoon;Ryu, Sangwon;Kwon, Ji-Won;Park, Taejun;Lee, Ingyu;Kim, Dae-Chul;Kim, Jong-Sik;Kim, Gon-Ho
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.53-58
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    • 2022
  • Shape changes of hard mask play a key role in the aspect ratio dependent etch (ARDE). For etch process using high density and energy ions, deformation of hard mask shape becomes more severe, and high aspect ratio (HAR) etch profile is distorted. In this study, polygonal geometric model for shape-deformation of amorphous carbon layered hard mask is suggested to control etch profile during the process. Mask shape is modeled with polygonal geometry consisting of trapezoids and rectangles, and it provides dynamic information about angles of facets and etched width and height of remained mask shape, providing important features for real-time HAR etch profiling.

A Study on the Seismic Resistance of Fill-dams by Newmark-type Deformation Analysis (Newmark 기반 변형해석에 의한 필댐의 내진저항성 연구)

  • Park, Dong Soon
    • Journal of the Earthquake Engineering Society of Korea
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    • v.18 no.4
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    • pp.161-170
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    • 2014
  • Newmark-type deformation analysis has rarely been done in Korea due to the popularity of simple pseudo-static limit equilibrium analysis and detailed time-history FE/FD dynamic analysis. However, the Korean seismic dam design code updated in 2011 prescribes Newmark-type deformation analysis as a major dynamic analysis method for the seismic evaluation of fill dams. In addition, a design PGA for dynamic analysis is significantly increased in the code. This paper aims to study the seismic evaluation of four existing large fill dams through advanced FEM/Newmark-type deformation analyses for the artificial earthquake time histories with the design PGA of 0.22g. Dynamic soil properties obtained from in-situ geo-physical surveys are applied as input parameters. For the FEM/Newmark analyses, sensitivity analyses are performed to study the effects of input PGA and $G_{max}$ of shell zone on the Newmark deformation. As a result, in terms of deformation, four fill dams are proved to be reasonably safe under the PGA of 0.22g with yield coefficients of 0.136 to 0.187, which are highly resistant for extreme events. Sensitivity analysis as a function of PGA shows that $PGA_{30cm}$ (a limiting PGA to cause the 30 cm of Newmark permanent displacement on the critical slip surface) is a good indicator for seismic safety check. CFRD shows a higher seismic resistance than ECRD. Another sensitivity analysis shows that $G_{max}$ per depth does not significantly affect the site response characteristics, however lower $G_{max}$ profile causes larger Newmark deformation. Through this study, it is proved that the amplification of ground motion within the sliding mass and the location of critical slip surface are the dominant factors governing permanent displacements.

A Study on Die Wear Model considering Thermal Softening(II) -Application of Suggested Wear Model (열연화를 고려한 금형마멸모델에 관한 연구(II) -마멸모델의 적용)

  • Kang, Jong-Hun;Park, In-Woo;Jae, Jin-Soo;Kang, Seong-Soo
    • Transactions of Materials Processing
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    • v.7 no.3
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    • pp.282-290
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    • 1998
  • In bulk metal forming processes prediction of tool life is very important for saving production cost and achieving good material properties. Generally the service life of tools in metal forming process is limited to a large extent by wear, fracture and plastic deformation of tools. In case of hot and warm forging processes tool life depends on wear over 70%. In this study finite element analyses are con-ducted to warm and hot forging by adopting suggested wear model. By comparison of simulation and eal profile of die suggested wear model. By comparison of simulation and real profile of die suggested model is verified.

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Prediction of the Constitutive Properties of Metal from Laser Peening Simulation (레이저 피닝 시뮬레이션을 통한 금속재료의 물성치 예측)

  • Yeo, In Kyu;Lim, Hyun Taek;Lim, Jong Bin;Jeong, Sung Ho
    • Laser Solutions
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    • v.16 no.1
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    • pp.15-19
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    • 2013
  • For numerical simulation of the deformation and residual stress development in metals during laser peening, the constitutive equations describing material behavior at various strain rates and plastic properties at high strain rate impact conditions are prerequisite. However, these parameters are often unknown for various engineering materials. In this study, the parameters of Johnson-Cook constitutive equation of duplex stainless steel were determined by comparing the residual stress profile predicted by numerical simulation using trial values and the measured residual stress profile with x-ray diffraction.

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Whine Vibration in Gear Drive (기어구동에 의한 화인진동해석)

  • 최연선;신용호;김기범
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.18 no.12
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    • pp.3246-3252
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    • 1994
  • The vibration of meshing gear system is originated form teeth deformation, teeth contact ratio, profile error, etc. The gear vibration is classified as whine vibration during meshing and as rattle vibration during idling. In this study, the whine vibration is investigated under the assumption of piecewise linearity of elastic stiffness due to the variation of meshing. Numerical, theoretical and experimental investigations show the existence of the superharmonic components of the second and the third order. consistently It can be concluded that the superharmonic components in whine vibration of meshing gear is originated from the stiffness variation. It also shows that the higher order harmonics are reduced on the increase of motor speed.