• Title/Summary/Keyword: Process Chamber State

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A Theoretical and Experimental Study on the Plastic Flow in Porthole Extrusion (포트홀 압출의 소성유동에 대한 이론 및 실험적 연구)

  • 한철호;임헌조
    • Transactions of Materials Processing
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    • v.10 no.6
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    • pp.485-492
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    • 2001
  • The paper is concerned with plastic flow in the port and welding chamber of rectangular hollow section extrusion through the porthole die. The extrusion process is analyzed by numerical simulation and experiments in the unsteady state. The effects of types of inlet with and without taper on the flow and extrusion load are mainly discussed and compared by FEA and experiments. Experiments are carried out by using the plasticine as a model material at room temperature. To visualize the plastic flow in the extrusion process, some split dies and punches are designed and manufactured by EDM. The theoretical predictions by FEM are reasonable agreements with experimental results on the deformed configurations and welding lines.

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Start-to-end modeling and transmission efficiency optimization for a cyclotron-based proton therapy beamline

  • Yu Chen;Bin Qin;Xu Liu;Wei Wang;Yicheng Liao
    • Nuclear Engineering and Technology
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    • v.56 no.10
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    • pp.4365-4374
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    • 2024
  • Utilizing first-order beam dynamics models is adequate for studying the beam properties during the conceptual design of a cyclotron-based proton therapy beamline. After finishing lattice design, particle-matter interaction simulations for passive elements (e.g., degrader, collimators, energy slit) are required. The cascade simulation is used for lattice updates in each iteration, which is complicated. In addition, when the models involve particle tracking and particle-matter interaction, their optimization process is time-consuming. Therefore, this study proposes a start-to-end modeling method using Monte Carlo Beam Delivery Simulation (BDSIM) software that considers more realistic factors, such as particle-matter interaction and the realistic vacuum chamber, to precisely evaluate working parameters, along with an efficient optimization method that utilizes multi-objective Bayesian optimization (MOBO) to improve transmission efficiency. Taking the Huazhong University of Science and Technology proton therapy facility (HUST-PTF) as an example, beam loss along the beamline is located, quantified, and subsequently reduced by tuning the quadrupole strengths based on MOBO. The results show that: (i) By considering the particle-matter interaction and the realistic vacuum chamber, the precision in the prediction of the beam properties is improved; (ii) After optimization, the transmission efficiency of the entire beamline is relatively increased by an average of 6.52 % under different energy settings, especially 11.39 % at 70 MeV.

Efficient Multicasting Mechanism for Mobile Computing Environment Machine learning Model to estimate Nitrogen Ion State using Traingng Data from Plasma Sheath Monitoring Sensor (Plasma Sheath Monitoring Sensor 데이터를 활용한 질소이온 상태예측 모형의 기계학습)

  • Jung, Hee-jin;Ryu, Jinseung;Jeong, Minjoong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2022.05a
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    • pp.27-30
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    • 2022
  • The plasma process, which has many advantages in terms of efficiency and environment compared to conventional process methods, is widely used in semiconductor manufacturing. Plasma Sheath is a dark region observed between the plasma bulk and the chamber wall surrounding it or the electrode. The Plasma Sheath Monitoring Sensor (PSMS) measures the difference in voltage between the plasma and the electrode and the RF power applied to the electrode in real time. The PSMS data, therefore, are expected to have a high correlation with the state of plasma in the plasma chamber. In this study, a model for predicting the state of nitrogen ions in the plasma chamber is training by a deep learning machine learning techniques using PSMS data. For the data used in the study, PSMS data measured in an experiment with different power and pressure settings were used as training data, and the ratio, flux, and density of nitrogen ions measured in plasma bulk and Si substrate were used as labels. The results of this study are expected to be the basis of artificial intelligence technology for the optimization of plasma processes and real-time precise control in the future.

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Estimation of Temperature Distribution on Wafer Surface in Rapid Thermal Processing Systems (고속 열처리공정 시스템에서의 웨이퍼 상의 온도분포 추정)

  • Yi, Seok-Joo;Sim, Young-Tae;Koh, Taek-Beom;Woo, Kwang-Bang
    • Journal of Institute of Control, Robotics and Systems
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    • v.5 no.4
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    • pp.481-488
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    • 1999
  • A thermal model based on the chamber geometry of the industry-standard AST SHS200MA rapid thermal processing system has been developed for the study of thermal uniformity and process repeatability thermal model combines radiation energy transfer directly from the tungsten-halogen lamps and the steady-state thermal conducting equations. Because of the difficulties of solving partial differential equation, calculation of wafer temperature was performed by using finite-difference approximation. The proposed thermal model was verified via titanium silicidation experiments. As a result, we can conclude that the thermal model show good estimation of wafer surface temperature distribution.

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A Numerical Study on Stratified Charge Formation and Combustion Processes (성층급기 연소현상에 관한 수치적 연구)

  • Lee, Suk-Young;Huh, Kang-Y.
    • Transactions of the Korean Society of Automotive Engineers
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    • v.15 no.5
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    • pp.86-96
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    • 2007
  • A direct-injection stratified-charge(DISC) engine has been considered as a promising alternative in spite of high unburned hydrocarbon emission levels during light load operation. In this paper investigation is made to characterize formation and combustion processes of stratified mixture charge in a simple constant volume combustion chamber. Both experimental and numerical analyses are performed for fluid and combustion characteristics with 3 different induction types for rich, homogeneous and lean mixture conditions. The commercial code FIRE is applied to the turbulent combustion process in terms of measured and calculated pressure traces and calculated distributions of mean temperature, OH radical and reaction rate. It turns out that the highest combustion rate occurs for the rich state condition at the spark ignition location due to existence of stoichiometric mixture and timing.

Temperature Uniformity of the Glass Panel Heated in the Infrared Heating Chamber

  • Lee, Kong-Hoon;Kim, Ook-Joong
    • Journal of Mechanical Science and Technology
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    • v.19 no.10
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    • pp.1950-1956
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    • 2005
  • An analysis has been carried out to investigate the effect of the reflectivity on the temperature distribution of a glass panel by infrared radiant heating. Halogen lamps are used to heat the panel, located near the top and bottom of the rectangular chamber. The thermal energy is transferred from the lamps to the panel only by radiation and it is considered by using view factor. The conductive transfer is limited inside the panel. The results show that the uniformity of the temperature distribution of the panel is improved and, at the same time, the time for heating increases as the wall reflectivity increases. The temperature difference between the center and the corner reaches a maximum in the early stage of the heating process and then decreases until it reaches a uniform steady-state value.

Analysis of Temperature Distribution of the Glass Panel in the Infrared Heating Chamber (적외선 가열로에서 가열되는 유리 패널의 온도분포 해석)

  • Lee, Kong-Hoon;Kim, Ook-Joong;Ha, Su-Seok;Kang, Sae-Byul;Lee, Joon-Sik
    • Proceedings of the KSME Conference
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    • 2003.11a
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    • pp.278-283
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    • 2003
  • Analysis has been carried out to investigate the temperature variation and the uniformity of the temperature distribution of the glass panel by infrared radiant heating. Halogen lamps are used to heat the panel and located near the top and bottom of the rectangular chamber. The thermal energy is transfered only by radiation and the radiation exchange occurs only on the solid surfaces and is considered by using the view factor. The results show that the uniformity of the temperature distribution of the panel is improved but the time for heating increases as the wall reflectivity is large. The temperature difference reaches a maximum in the early stage of the heating process and then decreases until it reaches the uniform steady-state value.

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Analysis of Decompression Control Characteristics of Pneumatic Pressure Control System Considering Heat Transfer Characteristics (열전달 특성을 고려한 공기압 압력제어계의 감압제어특성 해석)

  • Jang, J.S.
    • Journal of Power System Engineering
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    • v.10 no.1
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    • pp.90-95
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    • 2006
  • Pneumatic control systems have been mainly used as a high speed operating system. Therefore, state change of air in a control volume was assumed to be adiabatic change and, pneumatic control systems have been analyzed by using this assumption. Especially, when absolute value of pressure change in the control volume is small, there is a tendency to neglect effect of temperature change on pneumatic control system because temperature change owing to pressure change is small. In this study, an effect of temperature change of air on the decompression control process was analyzed by considering change of mass flow rate, and heat transfer characteristics between air in the chamber and the chamber wall. As a result, this study could confirm that a slight temperature change of the air in the pneumatic pressure control system can influence on the dynamic characteristics of pressure response, and pressure control performance.

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The Study of Effect on Oxygen Chamber for Recovery of Muscular Fatigue (산소 챔버의 근육 피로회복효과에 대한 연구)

  • Yoo, Su-Jeong;Nam, Eun-Young;Kim, Hyeong-Jun
    • The Journal of Korean Obstetrics and Gynecology
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    • v.29 no.2
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    • pp.83-98
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    • 2016
  • Objectives: This Study was designed to investigate the effect of Oxygen chamber to recover muscle fatigue. Methods: Twenty Subjects were divided into Oxygen Chamber Group (n=10) and Rest group (n=10). Subjects visited hospital two times, blood tests were performed 3 times for each visit. 1st blood test was performed in 4 hours hunger state. 2nd blood test was performed within 5 minutes after the 6 minutes bike exercise. 3rd blood test was performed after the 40 minutes Oxygen treatment or 40 minutes rest in bed. Blood test items were Lactate, Glucose, Lactate Dehydrogenase, Creatine Kinase, Free Fatty Acid. 2nd visit was applied 1st visit process, But Oxygen Chamber group was crossed over to Rest Group, Rest Group was crossed over to Oxygen Chamber group. The Blood test result was analyzed with paired T-test using SPSS for Windows version 21. Results: The reduction of Lactate in Oxygen Chamber Group (6.86±2.07 mmol/ℓ) was higher than Rest group (6.57±2.33 mmol/ℓ), but it was not statically significant (p=0.68). The reduction of Glucose in Oxygen Chamber Group (6.85±12.14 mg/dl) was lower than Rest group (7.60±9.83 mg/dl), but it was not statically significant (p=0.83). The reduction of Lactate Dehydrogenase in Oxygen Chamber Group (16.10±14.91 mmol/ℓ) was lower than Rest group (19.75±12.46 mg/dl), but it was not statically significant (p=0.41). The reduction of Creatine Kinase in Oxygen Chamber Group (13.40±5.69 U/ℓ) was lower than Rest group (15.25±8.01 U/ℓ), but it was not statically significant (p=0.41). The reduction of Free Fatty Acid in Oxygen Chamber Group (285.50±174.13 uEq/ℓ) was higher than Rest group (196.15±131.58 uEq/ℓ), but it was not statically significant (p=0.07). Conclusions: This study showed Oxygen chamber therapy could be effective to recover muscle fatigue.

FE analysis of Extrusion Process and Estimation of welding strength for Micro Multi Cell Tube with Serration (세레이션형 미세 멀티셀 튜브 압출 및 접합강도 평가)

  • Lee Jung Min;Kim Byung Min;Jo Hyung Ho;Kang Chung Gil
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.9 s.174
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    • pp.49-59
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    • 2005
  • This paper describes a development of the extrusion process and estimation of the weldability for multi cell tubes used to cooling system of automobiles. A study on extrusion process is performed through the 3D FE simulation in non-steady state and extrusion experimentation. Also, nano-indentation test is employed to estimate the weldability of tubes. Especially, An evaluation of the weldability using the nano-indentation is accomplished as compared with nano-hardness in welded part and in the others. Finally, the pattern of the mandrel defection is investigated according to shapes of the porthole and/or chamber.