• Journal of Surface Science and Engineering
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• v.29 no.1
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• pp.45-59
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• 1996

Ultrafine powders(UFPs) of aluminum nitride(AlN) have been synthesized by chemical reactions in the nitrogen atmosphere and the gaseous aluminum evaporated from Al powders in thermal plasmas produced by a DC plasma torch. A synthesis system consisting of a plasma torch, a finely-controllable powder feeder, a reaction chamber, and a quenching-collection chamber have been designed and manufactured, and a filter for gathering AlN UFPs produced by the quenching process subsequent to the synthesis is set up. The synthesis process is interpreted by numerical analyses of the plasma-particle interaction and the chemical equilibrium state, respectively, and a fully-saturated fractional factorial test is used to find the optimum process conditions. The degrees and ultrafineness of synthesis are evaluated by means of SEM, TEM, XRD, and ESCA analyses. AlN UFPs synthesized in the optimum process conditions have polygonal shapes of the size of 5-100 nm, and their purities differ depending on collecting positions and filter types, and the maximum purity obtained is 72 wt% at the filter.

• Transactions of Materials Processing
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• v.10 no.4
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• pp.311-318
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• 2001

Porthole die extrusion has a great advantage in the forming of long hollow section tubes. It is difficult to produce long hollow section tubes with complicated section by the conventional extrusion process with a mandrel on the stem Because of the limit of the length of mandrel and the complexity of cross section. Porthole die extrusion is affected by many parameters, such as extrusion ratio, extrusion speed, die geometry, porthole number, bearing length etc. Up to now, most of studies about porthole die extrusion have been investigated by experiments or steady state FE-analysis. However, in this paper, porthole die extrusion is analysed by the unsteady state 3D FE-simulation. And the result of unsteady state analysis is compared with the experimental result. Also, the surface state of extruded tubes are examined for the various process conditions.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.658-663
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• 2000

Slopping phenomena deteriorate the productivity and the stability of operation in oxygen converter process. To predict and prevent that, it needs reliable perception of the internal state of the oxygen converter chamber. Equipment was developed to measure the dynamic and static behavior of the oxygen-blowing lance 3-dimensionally and the measured signal is analyzed in relation to slopping phenomena. It was found that the behavior of the lance is strongly correlated to the change of slag foam height and the instability of molten steel behavior. So slopping phenomena can be predicted by simultaneously analyzing the measured behavior of the lance and the control factors such as the flow rate of oxygen and the height of lance.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10a
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• pp.607-612
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• 1992

For hydroforming process, determination of back-up fluid pressure in chamber is one of the most essential tasks. In this paper, we present a back-up pressure estimation system which estimates the back-up pressure of hydroforming process utilizing a multi-layered neural network. The neural network learns the nonlinear relation ship between the back-up pressure and the geometric state variables of hydroforming process. The proposed method does not necessitate sophisticated analysis on hydroforming process but some geometric intuition. The experimental results show that the neural network well approximates the nonlinear relationship between the back-up pressure and the geometric state variables of hydroforming process, thus giving the good estimation of back-up pressure vs punch stroke curve.

• Journal of Advanced Marine Engineering and Technology
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• v.24 no.1
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• pp.88-93
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• 2000

In this study, the mixing process of two-phase flow generated by two jets with height difference is analyzed. The primary jet is jetted on the condition of the state mixed pulverized solid particles with air. The height difference between the main jet and the secondary jet is changed into three kinds(0, 32.5, 47.5mm). The velocity vector field, concentration field and turbulent properties of solid particles are measured by using 3-Dimensional Particles Dynamics Analyzer. As the height difference of two jets through the two nozzles increases, the solid particle recirculation zone and the dense zone in the combustion chamber become large. The solid particle concentration at the center of the combustion chamber gets dense because the particle velocity remains slow due to the existence of the solid particle recirculation zone. The particle concentration in the combustion chamber can also be influenced by the hight difference of two jets.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.05a
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• pp.299-302
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• 2009

The objective of the present study is to analyze the transient flow through theejector system with the help of a computational fluid dynamics (CFD) method. An attempt is made to investigate the interesting and conflicting phenomenon of the infinite entrainment into the primary stream without an infinite mass supply from the secondary chamber. The results obtained show that the one and only condition in which an infinite mass entrainment can be possible in such types of ejectors is the generation of a re-circulation zone near the primary nozzle exit. The flow in the secondary chamber attains a state of dynamic equilibrium of pressures at the onset of the recirculation zone. A steady flow in the ejector system is valid only after this point.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.1485-1488
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• 1997

The capacity of memory chip has increased vert quickly and 64MDRAM becomes main product in semiconductor manufacturing lines consists of many sequential processes, including etching process. although it needs direct sensing of wafer state for the accurae detching, it depends on indirect esnsing and sample test because of the complexity of the plasma etching. This equipment receives the inner light of etch chamber through the viewport and convets it to the voltage inetnsity. In this paper, EDP voltage signal has a new role to detect etching failure. First, we gathered data(EPD sigal, etching time and etchrate) and then analyzed the relationships between the signal variatin and the etch rate using two neural network modeling. These methods enable to predict whether ething state is good or not per wafer. For experiments, it is used High Density Inductive coupled Plasma(HDICP) ethcing equipment. Experiments and results proved to be abled to determine the etching state of wafer on-line and analyze the causes by modeling and EPD signal data.

• Transactions of the Korean Society of Automotive Engineers
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• v.12 no.2
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• pp.69-75
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• 2004

The present study is numerically investigated for the high pressure effects on the vaporization process of the DME droplet. The evaporation rate of DME droplets is about twice that of dodecane droplets at the same chamber condition. The DM droplet vaporization characteristics is parametrically studied for the wide range of the operating conditions encountered with the high pressure combustion process.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2606-2611
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• 2003

Comprehensive study on the control system design for a RTP process has been conducted. The purpose of the control system is to maintain maximum temperature uniformity across the silicon wafer achieving precise tracking for various reference trajectories. The study has been carried out in two stages: thermal balance modeling on the basis of a semi-empirical radiation model, and optimal iterative learning controller design on the basis of a linear state space model. First, we found through steady state radiation modeling that the fourth power of wafer temperatures, lamp powers, and the fourth power of chamber wall temperature are related by an emissivity-independent linear equation. Next, for control of the MIMO system, a state space modeland LQG-based two-stage batch control technique was derived and employed to reduce the heavy computational demand in the original two-stage batch control technique. By accommodating the first result, a linear state space model for the controller design was identified between the lamp powers and the fourth power of wafer temperatures as inputs and outputs, respectively. The control system was applied to an experimental RTP equipment. As a consequence, great uniformity improvement could be attained over the entire time horizon compared to the original multi-loop PID control. In addition, controller implementation was standardized and facilitated by completely eliminating the tedious and lengthy control tuning trial.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.3
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• pp.247-255
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• 2016

The purpose of this study is to investigate unsteady-state characteristics of a pintle thruster with various pintle speed. Based on steady state experimental results, non-linear pintle stroke equation is obtained and applied to the unsteady state experimental system. For the unsteady state experiments, three different pintle speeds are used: 3.10 mm/s, 5.65 mm/s, 10.83 mm/s, respectively. Results show that backward pintle stroke results in faster convergence time because of high chamber pressure during backward pintle stroke sequence. During the forward and backward process, thrust curve shows singular points. These phenomenons is caused by variation of mass flow rate, which is mainly due to changes of both chamber pressures and nozzle throat area. This behavior becomes distinctive for a faster pintle speed case.