• Electrical & Electronic Materials
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• v.9 no.2
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• pp.188-195
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• 1996

The AlSi etching process using the MERIE type reactor carried out with different process parameters such as C1$_{2}$ and N$_{2}$ gas flow rate, RF power and chamber pressure. The etching characteristics were evaluated in terms of etch rate, selectivity, uniformity and etched profile. As the N2 gas flow rate is increased, the AlSi etch rate is decreased and uniformity has remained constant within .+-.5%. The etch rate is increased and uniformity is decreased, according to increment of the C1$_{2}$ gas flow rate, RF power and chamber pressure. Selective etching of TEOS with respect to AlSi is decreased as the RF power is increased while it is increased by increment of the C1$_{2}$ gas flow rate and chamber pressure, on the other hand, selective etching of photoresist with respect to AlSi is increased by increment of the C1$_{2}$ gas flow rate and chamber pressure, it is decreased as the N$_{2}$ gas flow rate is increased.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.3
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• pp.206-211
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• 2005

The device makers want to make higher density chips on the wafer through scale-down. The change of WSix/poly-Si gate film thickness is one of the key issues under 100 nm device structure. As a new device etching process is applied, end point detection(EPD) time delay was occurred in DPS+ poly chamber of Applied Materials. This is a barrier of device shrink because EPD time delay made physical damage on the surface of gate oxide. To investigate the EPD time delay, the experimental test combined with OES(Optical Emission Spectroscopy) and SEM(Scanning Electron Microscopy) was performed using patterned wafers. As a result, a EPD delay time is reduced by a new chamber seasoning and a new wavelength line through plasma scan. Applying a new wavelength of 252 nm makes it successful to call corrected EPD in WSix/poly-Si stack-down gate etching in the DPS+ poly chamber for the current and next generation devices.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Transactions of the Korean Society of Automotive Engineers
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• v.5 no.3
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• pp.137-146
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• 1997

Spray characteristics of high pressure injectors for diesel engines have been experimentally studied with special emphasis on the effect of swirl. A constant volume chamber was rotated in order to generate a continuous swirl having the flow field of a solid body rotation, resulting in the linear dependance of the swirl number on the rotating speed of the chamber. Emulsified fuel is injected into the chamber and the developing process of fuel sprays is visualized. The fuel spray developing process in D.I. diesel engine was investigated by this liquid injection technique. The effect of swirl on the spray tip penetration is quantified through modelling. Results show that the spray tip penetration is qualitatively different for low and high pressure injections. For high pressure injection case, a good agreement is achieved between the experimental results and the modeling accounting the effect of swirl. For low pressure injection, a reasonable agreement is obtained. It is found that excessive swirl may cause adverse effect on spray dispersion during the initial combustion period since the spray can not be impinged on chamber wall.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.72-75
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• 2023

Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.3
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• pp.33-40
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• 2019

FDM 3D printers have become widespread, and investment in the 3D printer industry is increasing. Therefore, many 3D printers are released and the functions of products are emphasized. However, to lower unit prices, open-type 3D printers are sold in kit form, and their performance is very low. If the 3D printer has many heat sources and is sealed, there is the possibility that the main accessories (the main board, power supply, and motor) will be damaged by trapped heat. At the same time, if the ambient temperature is low due to the properties of the material, the output quality deteriorates. In this study, we analyzed the temperature rise of the main accessories and the quality of the output by the heat bed when a chamber was added to an open-type 3D printer. We also compared the quality of the output due to the air flow with the temperature rise of the main accessories. Moreover, we found the optimal value. As a result of the quality analysis, it was finally confirmed that the case with the chamber at $95^{\circ}C$ was the best for the printing condition. In addition, in the absence of the chamber, the bending of the specimen was found to be large, and in the case of the chamber, the degree of bending was slightly decreased by 0.05 mm.

• Korean Journal of Heritage: History & Science
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• v.42 no.3
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• pp.66-87
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• 2009

The definition of the structure of wooden chamber tomb(piled stone-type) is as follows. It is a tomb with wooden chamber, and stones were piled on top of the wooden chamber, and then a wooden structure was placed on top of the piled stones, and more stones were piled on top of the wooden structure, and sealed with clay. Of course this definition can vary according to periods, the buried, etc. Gyeongju-style piled stone type wooden chamber tombs have some distinguished characteristics compared to general definition of piled stone type wooden chamber tombs. Outside the wooden chamber, either stone embankments or filled-in stones were layed out, and pilet-in stones are positioned right above the wooden chamber, and almost every class used this type, and finally, it is exclusively found in Gyeongju area. First generations of this Gyeongju-style piled stone type wooden chamber tombs appeared in first half of 5th century. These tombs inherited characteristics like ground plan, wooden chamber, double chamber(inner chamber and outer chamber), piled stones, burial of the living with the dead, piled stones, from precedent wooden chamber tombs. However these tombs have explicit new characteristics which are not found in the precedent wooden chamber tombs such as stone embankments, wooden pillars, piled stones(above ground level), soil tumuluses. stone embankments and wooden pillars are exclusively found on great piled stone type above-ground level wooden chamber tombs such as the Hwangnamdaechong(皇南大塚). Stone embankments, wooden pillars, piled stones(above ground level) are all elements of building process of soil tumuluses. stone embankments support outer wall of above-ground level wooden chambers and disperse the weight of tumuluses. Wooden pillars functioned as auxiliary supports with wooden structures to prevent the collapse of stone embankments. Piled stones are consists of stones of regular size, placed on the wooden structure. And after the piled stones were sealed with clay, tumulus was built with soil. Piled stones are unique characteristics which reflects the environment of Gyeongju area. Piled stone type wooden chamber tombs are located on the vast and plain river basin of Hyeongsan river(兄山江). Which makes vast source of sands and pebbles. Therefore, tumulus of these tombs contains large amount of sands and are prone to collapse if soil tumulus was built directly on the wooden structure. Consequently, to maintain external shape of the tumulus and to prevent collapse of inner structure, piled stones and clay-sealing was made. In this way, they can prevent total collapse of the tombs even if the tumulus was washed away. The soil tumulus is a characteristic which emerges when a nation or political entity reaches certain growing stage. It can be said that after birth of a nation, growing stage follows and social structure will change, and a newly emerged ruling class starts building new tombs, instead of precedent wooden chamber tombs. In this process, soil tumulus was built and the size and structure of the tombs differ according to the ruling class. Ground plan, stone embankments, number of the persons buried alive with the dead, quantity and quality of artifacts reflect social status of the ruling class. In conclusion, Gyeongju-style piled stone type wooden chamber tombs emerged with different characteristics from the precedent wooden chamber tombs when Shilla reached growing stage.

• Analytical Science and Technology
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• v.19 no.6
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• pp.535-543
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• 2006

Being used widely in semiconductor and display manufacturing, $NF_3$ is internationally considered as one of the regulated compounds in emission. Numerous companies have been continuously trying to reduce the emissions of $NF_3$ to comply with the global environmental regulation. This work is made to report the destruction and removal efficiency (DRE) of electrically heated scrubbers and the use rate in process chambers installed in three main LCD manufacturing companies in Korea. As the measurement techniques for $NF_3$ emission, mass flow controlled helium gas was continuously supplied into the equipment by which scrubber efficiency is being measured. The partial pressures of $NF_3$ and helium were accurately measured for each sample using a mass spectrometer, as it is emitted from inlet and outlet of the scrubber system. The results show that the DRE value for electrically heated scrubbers installed before 2004 is less than 52 %, while that for the new scrubbers modified based on measurement by scrubber manufacturer has been sigificentely improved upto more than 95 %. In additon, we have confirmed the efficiency depends on such variables as the inlet gas flow rate, water content, heater temperature, and preventative management period. The use rates of $NF_3$ in process chambers were also affected by the process type. The use rate of radio frequency source chambers, built in the $1^{st}$ and $2^{nd}$ generation process lines, was determined to be less than 75 %. In addition, that of remote plasma source chambers for the $3^{rd}$ generation was measured to be aboove 95 %. Therefore, the combined application of improved scrubber and the RPSC process chamber to the semiconductor and display process can reduce $NF_3$ emmision by 99.95 %. It is optimistic that the mission for the reduction of greenhouse gas emission can be realized in these LCD manufacturing companies in Korea.

• 한국신재생에너지학회:학술대회논문집
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• 2006.11a
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• pp.425-428
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• 2006

Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is $20{\times}20{\times}0.53mm^3$. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is $3^{\circ}C$ for 5 sec at 0.032W.

• Journal of ILASS-Korea
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• v.6 no.1
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• pp.25-34
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• 2001

Several efforts to meet the exhaust gas regulation have been undertaken by many researchers in recent years. Main researches are on development of design techniques of intake port and combustion chamber, atomisation of fuel and precise control of air-fuel ratio, post-treatment of exhaust gas and so on. Engine technology is changed from PFI to GDI to correspond with exhaust gas regulation. GDI technique makes it possible to preserve lean air-fuel ratio and control accurate air-fuel ratio. Nevertheless, It is not cleared that information of spray characteristics and atomization process are very dependent on fluctuation of pressure and change of temperature in intake stroke. In this study, a constant volume combustion chamber is manufactured to investigate various fluctuations of in-cylinder pressure for injection duration. It is taken photographs of injection process of conventional GDI injector using PMAS. Then, it was verified experimently that ambient conditions as temperature and pressure of combustion chamber have effects on process of spray growth and atomization of fuel.