• Journal of the Korean Society for Precision Engineering
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• v.18 no.1
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• pp.89-97
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• 2001

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded springs attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating mode, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching (GPE) of the buried sacrificial oxide layer, metal electrode formation. An eletromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical model, an operating condition for high performance of the gyroscope is obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.535-538
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• 2005

The purpose of this work is to study a process organization on space cognition by visio-auditory stimulation. We develop the system of visuo-auditory stimulation and Humans responses measurement to observe the relationship between the sensory and the motor system fur the localization of visual and auditory target direction in the space. The experiments is performed in a soundproof chamber, 2163 red, green and yellow LED(Luminescent Diode, Brightness: $20cd/m^2$ 1 degree apart each other)arrayed in front of half-circle panel were used and 57 Speaker(5 degree apart each other) arrayed in the hidden of half-circle panel. Physiological parameters such as EOG (Electro-Oculography), head movement and their synergic control are measured by BIOPAC system and Optotrak Certus. This result shows that the response latency time of the perception motion in the center is laster than the periphery of panel. These results can be used in the study of characterizing the spatial cognition.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.62-71
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• 1999

Integrating micro-machined sensors and actuators on the conventional devices with the copper power lines was incompatible to fabricate the mass produced micro electromechanical system (MEMS) devices. To achieve the compatibility of the wiring method between MEMS parts and devices, we developed the three-dimensional sputter-evaporation system that coats micropatterned thin copper films on the surface of the MEMS element. The system consists of a process chamber, two branch chambers, the substrate holder, and a linear-rotary motion feedthrough. Thin copper film was sputtered and evaporated on the biocompatible polymer, Pellethane$^{circed{R}}$ and silicone, catheter that is 2 mm in diameter and 700 mm in length. The metal film coating technique with three-dimensional thin film sputter-evaporation system was developed to apply the power and signal lines on the micro active endoscope. In this paper, we developed the three-dimensional metal film sputter-evaporation system operated on the low temperature for the biopolymeric substrates used in the medical MEMS devices.

• Journal of Advanced Navigation Technology
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• v.17 no.5
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• pp.574-580
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• 2013

In this paper, The process of thin-film coating technology was applied to improve adhesion of the hardness thin film and nitride layer. This thin-film coating technology have formed composite thin-film to gain hardness and toughness used in press mold. The thin-film coating manufacturing technology increased vacuum present in the vacuum chamber and improved the throw ratio of the gun power using physical vapor deposition coating technology. Ti alloys target improved performance and surface material through the development of a composite film coating technology for various precision machining parts.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.183-186
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• 2004

The dry etch behavior of PZT thin films was investigated in $BCl_3/N_2$ plasma. The experiments were carried out with measuring etch rates and selectivities of PZT to $SiO_2$ as a function of gas concentration and input rf power, chamber pressure. The maximum etch rate was 126 nm/min when 30% $N_2$ was added to $BCl_3$ chemistry. Also, as input rf power increases, the etch rate of PZT thin films was increased. Langmuir probe measurement showed the noticeable influence of $BCl_3/N_2$ mixing ratio on electron temperature and electron density as input rf power increased. The variation of Cl radical density as plasma parameters changed was examined by Optical Emission Spectroscopy (OES) analysis. According to X-ray diffraction (XRD) analysis, PZT thin films were damaged in plasma and an increase in (100), (200) and (111) phases showed the improvement in structure of the PZT thin films after the $O_2$ annealing process.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.520-526
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• 2012

The appearance of the negative differential pressure(NDP), in which the shot base pressure is higher than the breech pressure, indicates that a potential damage on the gun system is increased. In order to safeguard the gun system, the igniter must be designed to minimize the NDP during the firing process. From this reason, the effect of igniter's burning rate on the NDP of the interior ballistics has been investigated through the numerical simulations. The NDP has been increased with increment of the coefficient in the burning rate of the igniter. A sudden change of the chamber pressure has been shown in case of using a singular coefficient.

• Proceedings of the KSR Conference
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• 2008.11b
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• pp.1710-1716
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• 2008

The Loop Heat Pipe (LHP) operates to pump the working fluid by means of the capillary force in a wick structure. Particularly, it is difficult to design and manufacture the evaporator consisted of a grooved container and a compensation chamber as well as the wick structure. This study is related to design and manufacture the grooved container coupled with wick structure, the properties of the wick structure such as the permeability, the porosity, and the maximum capillary pressure were measured to apply the cooling technology for Insulated Gate Bipolar Transistor (IGBT). The container of the LHP was manufactured by the electrical discharge process and the wick structure was sintered with the nickel particle by an axial-press apparatus with the pulse electronic discharge. As results, the properties of the wick were experimentally obtained about 60% of the porosity, 35kPa of the maximum capillary force and $1.53{\times}10-13m2$ of the permeability.

• Nuclear Engineering and Technology
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• v.51 no.3
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• pp.776-783
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• 2019

Laser welding is usually a more effective method than electron-beam one since a vacuum chamber is not required. It is important for joining Zr-1%Nb (E110) alloy in a manufacturing process of nuclear fuel rods. In the present work, effect of energy parameters of pulsed laser welding on properties of butt joints of sheets with a thickness of 0.5 mm is investigated. The most efficient combination has been found (8-11 J pulse energy, 10-14 ms pulse duration, 780-810 W peak pulse power, 3 Hz pulse frequency, 1.12 mm/s welding speed). The results show that ultimate strength under static loading can not be used as a quality criterion for zirconium alloys welds. Increased shielding gas flow rate does not allow to protect weld metal totally and contributes to defect formation without using special nozzles. Several types of imperfections of the welds have been found, but the major problem is branching microcracks on the surface of the welds. It is difficult to identify the cause of their appearance without additional research on improving the welding zone protection (gas composition and flow rate as well as nozzle configuration) and studying the hydrogen content in the welds.

• Journal of Hydrogen and New Energy
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• v.33 no.5
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• pp.598-606
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• 2022

With the advancement of industry, the use of various sustainable energy sources and solutions to problems affecting the environment are being actively requested. From this point of view, it is intended to directly burn unused biogas to use it as energy and to solve environmental problems such as greenhouse gases. In this study, a new type of cavity matrix combustor capable of low-emission complete combustion without complex facilities such as separation or purification of biogas produced in small and medium-sized facilities was proposed, and CFD numerical calculation was performed to understand the performance characteristics of this combustor. The cavity matrix combustor consists of a burner with a rectangular porous microwave receptor at the center inside a 3D cavity that maintains a rectangular parallelepiped shape composed of a porous plate that can store heat in the combustor chamber. As a result of numerical calculation, the biogas supplied to the inlet of the combustor is converted to CO and H₂, which are intermediate products, on the surface of the 3D matrix porous burner. And then the optimal combustion process was achieved through complete combustion into CO₂ and H₂O due to increased combustibility by receiving heat energy from the microwave heating receptor.

• The Journal of the Korea institute of electronic communication sciences
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• v.17 no.5
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• pp.927-932
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• 2022

Instrument drift is caused by the passage of time, environmental changes, normal wear and tear, debris buildup, sudden shock, vibrations, electromagnetic fields, and improper use. Since it is inappropriate to directly determine the change of the output value as drift during the limited test period, a new algorithm that reflects both zero drift and span drift by giving changes over time to the calibration method of the instrument was proposed. The temperature drift was calculated to be 0.49% for about 60 minutes at 1-minute intervals in the nine-step constant temperature environment through the warming and cooling process.