• Title/Summary/Keyword: Process Chamber

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Heat Transfer in the Combustion Chamber for the Compact Hot-Water Boiler (콤팩트 온수 보일러 연소실의 열전달 특성)

  • Cho, Jung-Hwan;Seo, Tae-Beom;Kim, Wook-Jung;Kim, Chang-Ju
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.459-464
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    • 2001
  • A mathematical model has been developed to describe the turbulent and reversed flow with convective heat transfer in a cylindrical combustion chamber. By using the mathematical model for high temperature flow enables the trends in overall heat transfer rates to be predicted. The model was applied to the design of the combustion chamber. The influences of the size of air inlet and inlet velocity were investigated for process optimization. Through modelling work it is found that the heat transfer rate to the chamber wall may be enhanced by adjusting the air flow and heat transfer pattern through selecting the air inlet condition. Internal plate has less influence to the heat transfer characteristics.

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An Experimental Study on the Effect of Mixture Distribution in the Constant Volume Combustion Chamber on the Combustion Characteristics (정적 연소실내 혼합기 분포가 연소특성에 미치는 영향에 관한 실험적 연구)

  • 이기형;이창희;안용흠
    • Transactions of the Korean Society of Automotive Engineers
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    • v.12 no.3
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    • pp.10-18
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    • 2004
  • It is well known that the stratified charge combustion has many kind of advantages to combustion characteristics, such as higher thermal efficiency and less CO, NOx levels than conventional homogeneous mixture combustion. Although this combustion can be caused low fuel consumption, it is produced the high unburned hydrocarbon and soot levels because of different equivalence ratio in the combustion chamber. Moreover it has a lot of possibility of low output and misfire if the mixture gas would not be in existence around the spark plug. In this paper, fundamental studies for stratified combustion were carried out using a constant volume combustion chamber. The effect of locally mixture gas distribution according to control the direct injection and premixed injection in the chamber were examined experimentally. In addition, the effects of turbulence on stratified charge combustion process were observed by schlieren photography.

Scale-up of Melting Chamber for a Pyrolysis Melting Incinemtion System (폐기물 열분해/용융 소각 시스템의 용융로 Scale-up 연구)

  • Yang, Won;Kim, Bong-Keun;Yu, Tae-U;Jeun, Keum-Ha
    • 한국연소학회:학술대회논문집
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    • 2007.05a
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    • pp.168-175
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    • 2007
  • Ash melting chamber is one of the key facility of the pyrolysis-melting incineration system, and it should be designed and operated very carefully for avoiding solidification of slag. In this study, an example of numerical and experimental scale-up process of the melting chamber, in which high speed air is injected to the molten slag and generates bubbles, which enhances agitation of the slag and char combustion, is presented. Cold flow test, combustion and melting test in a lab-scale (30 kg/hr) chamber and a pilot scale (200 kg/hr) chamber. Minimum energy for maintaining molten slag is derived, and it was found that the molten slag can be maintained efficiently by concentrating heat into the bubbling slag.

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A Study on the Combustion Characteristics according to Evaporation rate of Methanol - Blended Fuel (메탄올 혼합 연료의 기화율 변화에 따른 연소특성에 관한 실험적 연구)

  • Cho, H.M.
    • Journal of ILASS-Korea
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    • v.2 no.2
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    • pp.24-34
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    • 1997
  • This paper describes the investigation of combustion characteristics of gasoline-methanol blend in constant volume combustion chamber. A constant volume combustion chamber was used to elucidate a basic combustion characteristics and the premixer was installed to control temperature and equivalence ratio. And the maximum pressure, combustion duration and flame propagation according to the evaporation rate were measured to determine the optimal temperature range for evaporating a blend fuel. These experimental results indicate that the combustion characteristics such as combustion chamber pressure and combustion were deteriorated by decreasing surrounding temperature of fuel. These experimental results indicate that the combustion characteristics such as combustion chamber pressure and combustion were deter orated by decreasing surrounding temperature of fuel injected. It was also found that the overall gasification process for methanol blend fuel was influenced by a combustion chamber temperature rather than a premixer temperature.

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Design and Performance Prediction of an Air Chamber for Reduction of Water Hammering (수충격 완화용 공기 챔버의 설계 및 성능 예측에 관한 연구)

  • Kang, S.H.;Ryu, H.S.;Park, M.S.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.4 no.1
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    • pp.57-64
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    • 1992
  • A computer program was developed for the prediction of transient flow in a water supply system. where an air chamber is installed to reduce the water hammering. The governing equations based on a characteristic method are solved using a finite difference method. A design process of an air chamber is shown in the present paper considering the effects of the initial air volume and the discharge coefficients of the orifice on the total volume and over-all performance of the chamber.

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Optimization of the Material and Structure of Component Parts for Reducing the Number of Impurity Particles in CVD Process

  • Kim, Won Kyung;Woo, Ram;Roh, Jong Wook
    • Journal of the Korean Ceramic Society
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    • v.56 no.3
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    • pp.277-283
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    • 2019
  • We have examined minimization of the number of impurity particles by replacing the load-lock chamber materials of the chemical vapor deposition equipment through optimization of the pumping method in the deposition chamber. In order to reduce the number of impurity particles in the chamber, the load-lock spacer material was changed from monomer casting nylon to Torlon. Furthermore, we controlled the pumping speed and number of pumping ports, which resulted in a reduction in the impurity particle generation from 2.67% to 0.52%. This study revealed that the selection of the material for the parts of a chemical vapor deposition chamber can minimize particle generation, thereby presenting a method of optimization method of the chemical vapor deposition chamber.

Advanced Nickel Electroforming Technology for The Regenerative Thrust Chamber of the Rocket Engine

  • Sakaguchi, Hiroyuki;Makino, Takashi;Ishibashi, Toshiyuki
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2008.03a
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    • pp.427-430
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    • 2008
  • Electroforming is one of the key technologies for the regenerative thrust chamber of the rocket engine. To use nickel electroforming method for the thrust chamber, direct electroforming of nickel on cupper and the welding method between different materials are needed. Minimizing the internal stress is one of the important factor for making thick electroforming,. Also minimizing contamination(ex. Sulfur containing compound) is another important factor for the stability of quality. This paper includes advanced methods for thick nickel electroforming, those of strength test results and EDS/EPMA inspection results. Advanced for electroforming process makes the achievement of Electro-beam welding between Inconel718(Manifold) and Nickel Electroforming. This paper also includes the influence of the electroforming precipitation angle on strength. Thus advanced electroforming improvement processes and the test results make achievement for manufacturing of the regenerative thrust chamber with direct nickel thick electroforming on cupper materials.

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A Study on Various Parameters of the PE-CVD Chamber with Wafer Guide Ring (웨이퍼 가이드링 적용에 따른 PE-CVD 챔버 변수에 대한 연구)

  • Hyun-Chul Wang;Hwa-Il Seo
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.2
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    • pp.55-59
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    • 2024
  • Plasma Enhanced Chemical Vapor Deposition (PE-CVD) is a widely used technology in semiconductor manufacturing for thin film deposition. The implementation of wafer guide rings in PE-CVD processes is crucial for enhancing efficiency and product quality by ensuring uniform deposition around wafer edges and reducing particle generation. On the other hand, to prevent overall temperature non-uniformity and degradation of thin film quality within the chamber, it is essential to consider various parameters comprehensively. In this study, after applying the wafer guide rings, temperature variations and fluid flow changes were simulated. Additionally, by simulating the temperature and flow changes when applied to the PE-CVD chamber, this paper discusses the importance of optimizing variables within the entire chamber.

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Characterizations of a Cold Trap System for the Process Stabilization of Al2O3 by ALD Equipment (ALD 장비의 Al2O3 공정 안정화를 위한 저온 트랩 장치의 특성 평가)

  • Yong Hyeok Seo;Won Woo Lee;In Hwan Kim;Ji Eun Han;Yeon Ju Lee;Che Hoo Cho;Yongmin Jeon;Eou-Sik Cho;Sang Jik Kwon
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.1
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    • pp.92-96
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    • 2024
  • The application of the technology for forming Al2O3 thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al2O3 thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.

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Characteristics of Beeswax-treated Hanji Aged by Closed and Ventilated Chamber (밀폐 및 배기조건에서 열화된 밀랍지의 열화특성 분석)

  • Kang, Yeong Seok;Yang, Eun Jeong
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.44 no.6
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    • pp.9-14
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    • 2012
  • Currently a variety of efforts to conserve and restore the injured the Annal of the Joseon Dynasty are continued and many studies about the aging pathway of the beeswax-treated volume have being progressed. In this study, two chambers were set up to assess the influence of VOCs(Volatile Organic Compounds) generated in process of beeswax deterioration. One chamber was closed and the other was continuously ventilated in order to remove the VOCs. In results, the acid compounds of beeswax-treated Hanjis aged in closed chamber was more than that aged in ventilated chamber. The folding endurance of beeswax-treated Hanjis aged in closed chamber was lower than that aged in ventilated chamber. Accumulated acid compounds of beeswax-treated Hanji in closed chamber may cause accelerated aging and strength decrease. In conclusion, accumulated acid compounds can accelerate the aging of beeswax-treated Hanji and cause the severe deterioration of inside of beeswax-treated volume. Therefore, to preserve more safely beeswax-treated volumes of the Annals of the Joseon Dynasty, it is essential that VOCs emitted from beeswax-treated volume are ventilated.