• 소성∙가공
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• 제26권2호
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• pp.115-120
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• 2017

Porthole extrusion process is a very effective metal forming process to produce aluminum profiles with hollow sections. The structure of porthole extrusion die is very complex. In this process, the billet is divided by porthole bridge, and then the divided billet is welded in the welding chamber. The welding pressure in the welding chamber is very important. The higher welding pressure improves the quality of the aluminum profiles. Therefore, the objective of this study is to develop a new porthole extrusion die for improving the welding pressure in the welding chamber by using numerical analysis. The effectiveness of the new porthole extrusion die was verified by using numerical analysis. Through numerical analysis, the welding pressures in the welding chamber between the new porthole die and the conventional porthole die were compared with each other.

• 전기학회논문지
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• 제59권1호
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• pp.152-159
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• 2010

This paper describes the actual application of a feedback control loop as a means for minimizing turbine impulse chamber pressure variation during the turbine steam valve tests at a 1,000 MW nuclear power plant. The chamber pressure control loop was implemented in the new digital control system which was installed as a replacement for the old analog type control system. There has been about 40MW of the generator output change during the steam valve tests, especially the high pressure governing valve tests, because the old control system had not the impulse chamber pressure control so the operators had to compensate steam flow drop manually. The process of each valve test consists of a closing process and an reopening process and the operators can make sure that the valves are in their sound conditions by checking the valves movement. The control algorithm described in this paper contributed to keep the change in megawatt only to 6MW during the steam valve tests. Thereby, the disturbance to reactor control was reduced, and the overall plant control system's stability was greatly improved as well.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.608-612
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• 2009

30톤급 액체로켓엔진 연소기 개발 기술을 바탕으로 75톤급 기술검증용 연소기 시제품을 제작하였다. 시제품 제작에서 검증하고자 하였던 일부 기계가공 공정 및 접합 기술들은 75톤급 연소기에서도 동일하게 적용할 수 있음을 확인하였다. 새롭게 설계된 연소기 헤드부는 새로운 공정을 적용하여 제작하였다. 기술검증용 시제품을 통해 확립된 공정 및 기술들은 대형 액체로켓엔진 연소기 제작 기술의 신뢰성을 향상 시킬 것이다.

• 한국기계가공학회지
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• 제14권1호
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• pp.92-97
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• 2015

The design of the glass-carrier was studied using simulations of the temperature distribution of an ITO deposition inline-sputter process. The temperature distribution was simulated in Heating Chamber 7, and in the ITO Deposition Chambers 8 and 9. The temperature distribution of the glass sheets was low in both the lower and upper lines. Moreover, it was observed that the temperature in Chamber 8 significantly affected the temperature in Chamber 9, and that the latter was hotter. The rear of the chambers were subjected to more heating than the fronts, so the temperature range at the back was wider. Redesigning the shape of the carrier made it possible to load more glass sheets on the glass carrier, and to make deposits on the ITO glass at higher temperature, over a wider area.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2008년도 춘계학술대회
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• pp.23-29
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• 2008

- High Density Plasma Source-CCP-Dual/Triple, RF Frequency Control - Radical/Flux Analysis - Low Pressure Process - Chamber Design (Process gap/Wall gap) - Chamber Temp. Control. - ESC Dielectric Materials - Uniform Gas Injection

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• 물과 미래
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• 제28권5호
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• pp.141-150
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• 1995

공기실(air chamber)은 관망에 있어 압력수두가 설계치를 초과하지 않고 또한 최저 압력수두가 발생하지 않도록 하기 위해 설계된다. 따라서 공기실은 갑작스런 펌프의 중단에 따르는 순간적인 최고 및 최저 압력수두의 발생을 방지하기 위해 사용되어 진다. 본 연구에서는 가상적인 관망에 공기실을 적용하여 공기실의 공기부피, 위치, 면적, 오리피스에서의 손실계수 그리고 polytropic지수의 변화에 따른 압력수두의 완화효과를 분석하였다. 분석결과 공기의 부피가 증가할수록 최고압력수두는 감소하고 최저 압력수두는 증가함을 보여주었으며, 공기실의 위치나 단면적의 변화는 완화효과의 변화가 별로 없었다. 또한 오리피스 손실계수를 증가할수록 최고 압력수두가 감소함을 보이고, 공기실의 공기가 등온변화과정을 따를때가 단열변화과정을 따를 때보다 최고 압력수두가 낮음을 보여주었다.

• 소성∙가공
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• 제11권6호
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• pp.495-502
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• 2002

The welding pressure in extru bending process is affected by the shape of welding chamber of porthole die. It is very important to increase the welding pressure when the tube should be extruded particulary from four billets of the materials. The high circumferential stress of the tube can make the welding pressure increase during the extru-bending. In order to increase the circumferential stress, it is necessary to make the billets pass through the narrow gap between the conical die and the conical plug. This paper describes the welding pressure by the experiments and the analysis with the two types of the chamber. One of them is the chamber between the flat die and straight mandrel, and the other one is the chamber between the conical die and conical plug. The results of the experiments and the analysis shows that the conical chamber makes the welding pressure increase by the effect of the reducing diameter of tube and the welding pressure by the conical dic and plug is stronger than the welding pressure by the flat die and straight mandrel.

• 한국기계가공학회지
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• 제18권5호
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• pp.1-8
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• 2019

Breath analysis using a portable device is better than the classical breath analysis system in terms of installation and operation. There is an increasing need to develop cost-effective equipment for testing gas sensors from the viewpoint of functionalities that can be applied applicable to portable devices. In the present study, an economical gas chamber for in-situ gas measurement is implemented with a single gas chamber without using expensive gas storage and control equipment; the gas response characteristics are analyzed using the above-described chamber. The main features of the implemented gas chamber are simple injection procedure, improved gas diffusion, easy measurement and cleaning, support for low-power mode measurement function for portable devices, and open source platform. Moreover, an analysis of gas response characteristics based on changes in sensor voltage show that the sensitivity and 90% response time are affected by the sensor voltage. Furthermore, the sensitivity graph has an inflection point in a specific range. The gas sensor applied in this study showed fast response speed and high sensitivity for sensor voltages of 3.0-3.5 V, regardless of the concentration of acetone gas, the target gas used in this study.

• 항공우주기술
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• 제7권2호
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• pp.103-109
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• 2008

액체로켓 연소기의 제작에 필수적인 재생냉각 노즐의 벌징공정에 대한 연구를 수행하였다. 벌징공정을 개발하기 위하여 벌징시험용 재료에 대한 인장시험을 수행하여 기계적인 물성 값들을 획득하였다. 벌징공정을 완료하기 위해서는 벌징치구가 2개 또는 3개 필요하였다. 재료의 네킹이 벌징공정에서 발생되는 주된 실패 원인이었으며, 재료의 그레인 사이즈가 이 네킹 발생에 큰 영향을 미침을 본 연구에서 나타났다. 그레인 사이즈를 조절한 재료로 현재 개발된 벌징공정을 이용하여 축소형 및 30톤 실물형 재생냉각 노즐의 제작을 성공적으로 수행함으로서 본 연구에서 개발된 벌징공정의 적용성 및 유용성을 보여주었다.