• 한국전기전자재료학회논문지
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• 제20권9호
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• pp.749-755
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• 2007

Recently, novel MEMS probe cards can support reliable wafer level chip test with high density probing capacity. However, manufacturing cost and process complexity are crucial weak points for low cost mass production. To overcome these limitations, we have developed micro spring structured MEMS probe card. For fabrication of micro spring module, a wire bonder and electrolytic polished gold wires are used. In this case, stringent tension force control is essential to guarantee the low level contact resistance of micro spring for reliable probing performance. For this, relation between tension force of fabricated probe card and contact resistance is characterized. Compare to conventional probe cards, developed MEMS probe card requires fewer fabrication steps and it can be manufactured with lower cost than other MEMS probe cards. Also, due to the small contact scratch patterns, we expect that it can be applied to bumping types chip test which require higher probing density.

• Applied Microscopy
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• 제51권
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• pp.7.1-7.9
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• 2021

Neuromorphic systems require integrated structures with high-density memory and selector devices to avoid interference and recognition errors between neighboring memory cells. To improve the performance of a selector device, it is important to understand the characteristics of the switching process. As changes by switching cycle occur at local nanoscale areas, a high-resolution analysis method is needed to investigate this phenomenon. Atomic force microscopy (AFM) is used to analyze the local changes because it offers nanoscale detection with high-resolution capabilities. This review introduces various types of AFM such as conductive AFM (C-AFM), electrostatic force microscopy (EFM), and Kelvin probe force microscopy (KPFM) to study switching behaviors.

• 대한기계학회논문집A
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• 제36권8호
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• pp.851-856
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• 2012

마이크로 프로브 팁의 설계는 매우 복잡하고 많은 비용이 든다. 이 논문에서는 새로운 타입의 프로브 팁을 유한요소해석을 이용하여 설계하였다. 유한요소해석을 이용하여 설계를 함으로써 복잡한 설계과정을 단순화 할 수 있다. 우선, 기존 프로브 팁의 실험 결과를 이용하여 유한요소해석기법을 검증하였다. 기존 프로브 팁의 물성은 $100{\mu}m$의 압축 길이시 12.5 gf 의 접촉하중이 측정되었다. 본 연구에서는 새로운 타입의 프로브 팁을 제안하였다. 새로 설계된 프로브 팁의 재료는 NiCo 이며 프로브 팁의 물성은 $100{\mu}m$의 압축 길이시 1~2 gf 의 접촉하중을 나타내었다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.61-62
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• 2002

In order to clarify the contact mechanism between specimen surface and probe tip in the surface observation by the AFM (atomic force microscope) or the FFM (friction force microscope), several molecular dynamics simulations have been performed. In the simulation, a 3-dimensional simulation model is proposed where the specimen and the probe are assumed to consist of mono-crystal line copper and a carbon atom respectively and the effect of cantilever stiffness is also taken into considered. The surface observation process on a well-defined Cu{100} is simulated. The influences of cantilever stiffness on the reactive force images and the behavior of probe tip were evaluated. As a resuIt, several phenomena similar to those observed by the actual surface observation experiment, such as double-slip behavior and dispersion in the stick-slip wave period were observed.

• 펄프종이기술
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• 제30권4호
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• pp.49-58
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• 1998

The SPM could image the most detailed microstructure of a sample in a wet and dry state by measuring the interaction between the atoms on the sample surface and the extremely sharp probe tip. The refined fibre exhibited large wrinkles formed by fibrillar bundles, the disintegrated fibres extensively showed “scale-like features”. By using the Non-Contact Atomic Force Microscopy (NC-AFM) and Contact Atomic Force Microscopy (C-AFM) including Phase Detection Microscopy (PDM) and Force Modulation Microscopy (FMM), it was possible to investigate surface topography, surface roughness and mechanical property (hardness or visco-elasticity) of fibre surface in detail. The PDM and FMM images showed that the disintegrated only fibre displayed uniform mechanical properties, whereas the refined one did not. The surface roughness of pulp fibres was higher in refined fibres than in disintegrated fibres due to the presence of external fibrils. These SPM images would be used to provide visual evidence of morphological change of a single fibre created during mechanical treatments such as refining, drying, calendering and so on.

• 한국산학기술학회논문지
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• 제11권4호
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• pp.1210-1215
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• 2010

프로브 카드는 반도체 제조 공정 전에 반도체 소자 및 필름의 기능과 성능을 검사하기 위한 테스트 장비이다. 반도체 산업의 급속한 기술 발전과 반도체 소자의 고집적화로 인하여 반도체 소자의 패드 간격과 패드의 수가 증가하고 있다. 따라서 반도체 소자의 크기 및 배열의 형태가 계속 축소됨에 따라 미세 피치를 갖고 검사용 핀의 수가 많은 프로브 카드가 필요하다. 본 논문에서는 수직형 프로브 카드의 적용을 위하여 MEMS 기술을 이용한 프로브 팁을 개발하였다. 프로브 팁의 설계를 위해서 유한요소해석을 이용하여 프로브 팁의 구조 및 기계적 특성에 대한 구조설계를 수행하였다. 또한 구조 설계를 적용한 프로브 팁을 제작하여 유한요소해석의 결과와 실제 시험을 통한 접촉력의 평가를 수행하였다. 이에 따라 피치 간격이 약 $50{\mu}m$이하의 프로브 카드를 제작하였다.

• 한국농업기계학회:학술대회논문집
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• 한국농업기계학회 1993년도 Proceedings of International Conference for Agricultural Machinery and Process Engineering
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• pp.1340-1345
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• 1993

Five textural characteristics , epicarp strength, deformation , firmness , toughness and penetration time were calculated from force/deformation curves obtained by pressure testing tomato fruits. The fruits were harvested at either the mature-green or red maturity stages. The effects of changing the probe diameter and cross-head speed were investigated on force/deformation characteristics of tomatoes. It was confirmed that increasing of cross-head speed and probe diameter highly significantly effect all textural of the characteristics mentioned above , except epiarp strength of red tomatoes at 200 mm minute cross-head and penetration time of red and green tomatoes after 200mm minute and 100 mm minute cross-head respectively.

• 한국정밀공학회지
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• 제25권11호
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• pp.119-125
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• 2008

The objective of this study was to compare micro-scale friction coefficients with and without synovial fluid, and micro-scale measurements were performed using atomic force microscopy (AFM) with a $5{\mu}m$ spherical probe. Four cylindrical cartilage specimens were harvested from two fresh bovine humeral heads (4-6 months old). $Average{\pm}standard$ deviation values of the micro-scale AFM frictional coefficients calculated from the liner fit of friction versus normal force was $0.177{\pm}0.012$ and $0.130{\pm}0.010$ with and without synovial fluid coating on AFM probe respectively, showing its reduction by ${\sim}27%$ with synovial fluid. To the best of our knowledge, this experimental study investigates the first such comparisons of frictional response of articular cartilage with and without synovial fluid coating on AFM probe, and provides significant insights into the role of synovial fluid in the articular cartilage friction and lubrication independently of the confounding effect of fluid pressurization in the articular cartilage.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1730-1733
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• 2007

As semiconductor and MEMS devices become smaller, testing process during their production should follow such a high density trend. A circuit inspection tool "probe card" makes contact with electrode pads of the device under test (DUT). Nowadays, electrode pads are irregularly arranged and have height difference. In order to absorb variations in the heights of electrode pads and to generate contact loads, contact probes must have some levels of mechanical spring properties. Contact probes must also yield a force to break the surface native oxide layer or contamination layer on the electrodes to make electric contact. In this research, new vertical micro contact probe with bellows shape is developed to overcome shortage of prior work. Especially, novel bellows shape is used to reduce stress concentration in this design and stopper is used to change the stiffness of micro contact probe. Variable stiffness can be one solution to overcome the height difference of electrode pads.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.77-80
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• 2005

Local probe techniques such as scanning probe microscopy (SPM) or atomic force microscopy (AFM) extended our perception into ultra small world. Specially, the sense of touching was extended by AFM into the micro- and nanoworld and has provided complementary new insights of the microscopic world. In addition, touching objects is an essential step before trying to manipulate things. SPM as a touch sensor not only measure the mechanical properties but also detect different properties such as magnetic, electrical, ionic, thermal, chemical and biophysical properties in nanoscale and even less. Obtaining biophysical measurements, monitoring dynamics and processes together with high-resolution imaging of the biomolecules and cells with rather simpler sample preparation than any other techniques give great attractions to the scientists experimenting with biological samples. Among the many AFM capabilities we will specifically introduce the force plot which is used to measure tip-sample interactions and its application this time.