• 센서학회지
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• 제30권4호
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• pp.236-242
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• 2021

In this paper, we report the fabrication of the tip-on-gate of a field-effect-transistor (ToGoFET) probe using a standard complementary metal-oxide-semiconductor (CMOS) process and the performance evaluation of the fabricated probe. After the CMOS process, I-V characteristic measurement was performed on the reference MOSFET. We confirmed that the ToGoFET probe could be operated at a gate voltage of 0 V due to channel ion implantation. The transconductance at the operating point (Vg = 0 V, Vd = 2 V) was 360 ㎂/V. After the fabrication process was completed, calibration was performed using a pure metal sample. For sensitivity calibration, the relationship between the input voltage of the sample and the output current of the probe was determined and the result was consistent with the measurement result of the reference MOSFET. An oxide sample measurement was performed as an example of an application of the new ToGoFET probe. According to the measurement, the ToGoFET probe could spatially resolve a hundred nanometers with a height of a few nanometers in both the topographic image and the ToGoFET image.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.227.1-227
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• 2003

• 한국생산제조학회지
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• 제23권2호
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• pp.178-185
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• 2014

This paper describes a fabrication multiplexing sensor probe that employs a fiber Bragg grating(FBG) based on multiple measurements to determine the blade deflection of a wind power generator the reliability analysis of this probe is also presented. To diminish the temperature sensitivity of the FBG sensor, we form multiple CFRPs onto the upper and lower layers of the FBG and package it with an epoxy resin. As a result, the depth of the CFRP is 1mm, and the temperature sensitivity is $2.39pm/^{\circ}C$. We construct a sensor network utilizing the fabricated sensor with a blade beam model. As the number of pendulums is increased on the fore-end of the beam, the strain value is measured. The strain variation is calculated from the measurement of the load on the blade beam model by monitoring the strain of the FBG sensor. When the linear equation is applied, the strain error is 0.4% and when the finite difference method is used, the tip deflection error is 3.3%. The displacement error derived from the strain value of the FBG sensor is 4.39%. The calculated result between the measured value of the dead-end of the beam and the strain is less than 2.46% tip distortion error. Therefore, our proposed multiplexing sensor probe is a low-cost and high-reliability solution for a commercial wind power generator.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1228-1231
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• 2005

This paper reports about the development of scanning probe microscopy (SPM) tip with multi-walled carbon nanotube (MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which causes the dielectrophoresis was used for alignment and deposition of CNTs to the metal coated SPM tip. By dropping the MWNT solution and applying an electric field between an SPM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the SPM tips due to the attraction by the dielectrophoretic force. In this paper, we investigate experimental conditions about the alignment of the CNT to tip axis according to the change of the angle between a tip and an electrode. Experimental results are presented, and then fabricated CNT tips are showed and measurement results for 15nm gold particles are compared with that of the conventional silicon tip.

• Tribology and Lubricants
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• 제19권3호
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• pp.133-138
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• 2003

The characteristics for bimorph PZT cantilever of laboratory-fabricated have been evaluated experimentally. The deflections of cantilever with PZT are result from a capillary force between a water drop and a tip of cantilever. The output voltage due to deflect cantilever are depend on the tip shape and thickness of cantilever. We applied a bimorph PZT cantilever to oil thickness measurement. This reasonable concept is that the output voltage be caused by different defected characteristics between oil and surface. Experimental results demonstrated that the high measurement accuracy of the oil film thickness is obtained from the probe.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.645-646
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• 2006

The oscillation amplitude of a probe tip is an important parameter to determine the resolution of atomic force microscopy (AFM) techniques. In this work, we introduce a new method for the measurement of the oscillation amplitude of a quartz tuning fork tip sub-nanometer resolution.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.463-464
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• 2006

This paper present experimental results by non-contact mode Atomic Force Microscopy using high aspect ratio tips (HAR-T). We fabricated the carbon nanotube tip based on dielectrophoresis and the carbon nano probe by focused ion beam after dielectrophoretic assembling. In this paper, we measure AAO sample and trench structure to estimate HAR-T's performance and compared with conventional Si tip. We confirmed that results of HAR-T's performance in non contact mode was very superior than conventional tip.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2009년 추계학술발표대회
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• pp.235-238
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• 2009

To study the relationship between spark ignition and the gap in the nano-scale region, the electric potential was applied to between a Pt-Ir tip and a gold substrate. The tip was sharpened by electro-chemical etching process in the solution of $CaCl_2;H_2O$ and acetone. The radius of tip was measured to be around 200nm and attached to the scanning probe microscope to control the gap between the tip and the substrate. The electric potential of 10V to 80V was applied to initialize the spark. The gaps and the current profile were measured to analyze the characteristics of spark ignition. A spark sustaining time was measured to be between 50ns and 200ns depending on the applied electric potential and the gap between the electrodes. The continuous electric discharge was successfully sustained up to 1 second of spark or arc time. The developed process can be applicable to the micro-scale fabrication of automotive sensors as a similar concept of GTAW.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1999년도 하계종합학술대회 논문집
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• pp.563-566
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• 1999

The functional diagnosis instrument should be preceded first to both the accurate selection of exact acupoint and discrimination. so the measuring and stimulating method are improved to SPAC pattern to evaluate impedance existed in the body. As a result, the resistance factor between skin and probe, the dipolization of cell was reduced so that the judgement of acupoint is advanced. After extraction of optimization parameter of SPAC pattern which the high discrimination efficiency and the lowest affection on the human body is controlled by using microprocessor to enhance conviction. The discrimination efficiency was confirmed by meridian visualization system. Also mechanism of probe was improved to increase efficiency of image recognition processing. The image of discriminated acupoint with probe is obtained by using a camera, the location on the tip of probe is recognized and processed. And then these are converted to virtual color by proportional to measuring current level of scan point on skin.

• 비파괴검사학회지
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• 제7권2호
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• pp.35-41
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• 1988

The optimum test conditions of measuring the crack height were determined for the two-probe ultrasonic diffraction method. The applicability and the accuracy of the two-probe ultrasonic diffraction method on the inclined artificial cracks and the fatigue cracks were evaluated. It us possible to measure the height of the normal and inclined artificial cracks with the maximum error of ${\pm}\;0.5mm$ with the two-probe ultrasonic diffraction method. It was found, however, that the accuracy of this method in meaasuring the height of the fatigue crack depends on the degree of closure of the crack tip. It was desirable to choose a refraction angle as small as possible, but the angle should not be so small that the distortion of the lateral waveform became appreciable.