Abstract
The characteristics for bimorph PZT cantilever of laboratory-fabricated have been evaluated experimentally. The deflections of cantilever with PZT are result from a capillary force between a water drop and a tip of cantilever. The output voltage due to deflect cantilever are depend on the tip shape and thickness of cantilever. We applied a bimorph PZT cantilever to oil thickness measurement. This reasonable concept is that the output voltage be caused by different defected characteristics between oil and surface. Experimental results demonstrated that the high measurement accuracy of the oil film thickness is obtained from the probe.