• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.665-666
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.845-852
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• 2012

The diaphragm-type stylus probe was developed for ultra-precision on-machine measurement (OMM) application. This probe is equipped with two diaphragms which are parallel and one capacitive sensor is used for detecting the vertical motion of end tip in the stylus when it is contacted to the optical freeform surface. For better performance of proposed probes, several design parameters such as axial stiffness and the lateral deformations were investigated with finite element analysis techniques. To verify the feasibility, the profiles of the master sphere ball were measured on the ultra-precision milling machine. The measurement results show that the proposed probe can calculate the radius of the circle within the accuracy of 0.1 ${\mu}m$ for the ultraprecision optical surface.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.6
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• pp.130-138
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• 2012

There are increasing demands from the industry for intelligent robot-calibration solutions, which can be tightly integrated to the manufacturing process. A proposed solution can simplify conventional robot-calibration and teaching methods without tedious procedures and lengthy training time. iGPS(Indoor GPS) system is a laser based real-time dynamic tracking/measurement system. The key element is acquiring and reporting three-dimensional(3D) information, which can be accomplished as an integrated system or as manual contact based measurements by a user. A 3D probe is introduced as the user holds the probe in his hand and moves the probe tip over the object. The X, Y, and Z coordinates of the probe tip are measured in real-time with high accuracy. In this paper, a new approach of robot-calibration and teaching system is introduced by implementing a 3D measurement system for measuring and tracking an object with motions in up to six degrees of freedom. The general concept and kinematics of the metrology system as well as the derivations of an error budget for the general device are described. Several experimental results of geometry and its related error identification for an easy compensation / teaching method on an industrial robot will also be included.

• Journal of the Korean institute of surface engineering
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• v.31 no.1
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• pp.45-53
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• 1998

Sharp tips are commonly used for applications in fields as diverse as nanolithography, lowvoltage field emitters, emitters, nanoelectroniecs, electrochemisty, cell biology, field-ion and electron microscopy. tungsten wire, mater만 used in this experiment, which test the chip of wafer has been used to the needle of probe card. Tungsten wire was sharpened by electrochemical etching methode to get a typical tip shape.

• Bulletin of the Korean Chemical Society
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• v.33 no.5
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• pp.1748-1752
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• 2012

We carried out the tip-enhanced Raman scattering (TERS) with a tip that is functionalized with a Aunanoparticle (AuNP, with a diameter of 250 nm). The AuNP tip is fabricated by a direct mechanical pickup of a AuNP from a flat substrate, and the TERS signal from the AuNP tip - organic monolayer - Au thin film (thickness of 10 nm) is recorded. We find that such a AuNP-tip interacting with a thin film routinely yields signal enhancement larger than ${\sim}10^4$, which is sufficient not only for local (with detection area of ~200 $nm^2$) Raman spectroscopy, but also the nanometric imaging of organic monolayers within a reasonable acquisition time (~20 minutes/image).

• Journal of Electrical Engineering and Technology
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• v.13 no.1
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• pp.406-412
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• 2018

In this paper, we propose a narrow resonant waveguide probe that can improve the measurement sensitivity in near-field scanning microwave microscopy. The probe consists of a metal waveguide incorporating the following two sections: a straight section at the tip of the probe whose cross-section is a double-ridged rectangle, and whose height is much smaller than the waveguide width; and a standard waveguide section. The advantage of the narrow waveguide is the same as that of the quarter-wave transformer section i.e., it achieves impedance-matching between the sample under test (SUT) and the standard waveguide. The design procedure used for the probe is presented in detail and the performance of the designed resonant probe is evaluated theoretically by using an equivalent circuit. The calculated results are compared with those obtained using the finite element method (Ansoft HFSS), and consistency between the results is demonstrated. Furthermore, the performance of the fabricated resonant probe is evaluated experimentally. At X-band frequencies, we have measured the one-dimensional scanning reflection coefficient of the SUT using the probe. The sensitivity of the proposed resonant probe is improved by more than two times as compared to a conventional waveguide cavity type probe.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1383-1388
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• 2004

The flow characteristics in the blade passage of a low speed axial flow fan have been investigated by experimental analysis using a rotating hot-wire sensor for design and off-design operating conditions. The results show that the tip leakage vortex is moved upstream when flow rate is decreased, thus disturbing the formation of wake flow near the rotor tip. The tip leakage vortex interfaces with blade pressure surface, and results in high velocity fluctuation near the pressure surface. From the relative velocity distributions near the rotor tip, large axial velocity decay is observed at near stall condition, which results in large blockage compared to that at the design condition. Througout the flow measurements using a quasi-orthogonal measuring points to the tip leakage vortex, it is noted that the radial position of the tip leakage vortex is distributed between 94 and 96 percent span for all flow conditions. High spectrum density due to the large fluctuation of the tip leakage vortex is observed near the blade suction surface below the frequency of 1000 Hz at near stall condition.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.8
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• pp.1436-1440
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• 2007

Beryllium copper has been known to be an important material for the various fields of industry because it can be used for mechanical and electrical/electronic components that are subjected to elevated temperatures (up to $400^{\circ}C$ for short times). Blade type tip for probing the cells of liquid crystal display(LCD) was fabricated using beryllium copper foil. The dry film resist was employed as a mask for patterning of the blade type tip. The beryllium copper foil was etched using hydrochloric acidic iron-chloride solution. The concentration, temperature, and composition ratio of hydrochloric acidic iron-chloride solution affect the etching characteristics of beryllium copper foil. Nickel with the thickness of $3{\mu}m$ was electroplated on the patterned copper beryllium foil for enhancing its hardness, followed by electroplating gold for increasing its electrical conductivity. Finally, the dry film resist on the bridge was removed and half of the nickel was etched to complete the blade type tip.

• Proceedings of the KOSOMBE Conference
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• v.1998 no.11
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• pp.147-148
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• 1998

In this paper, we developed the process for depth-probe type silicon microelectrode arrays. The process consists of four mask steps only. The steps are for defining sites, windows, and for shaping probe using plasma etch from above, and for shaping using wet etch from below, respectively. The probe thickness is controlled by dry etching, not by impurity diffusion. We used gold electrodes with a triple dielectric system consisting of oxide/nitride/oxide. The shank of the probe taper from 200um to tens of urn tip and has 30 um thickness.

• Applied Microscopy
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• v.46 no.3
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• pp.127-133
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• 2016

Atom probe tomography is a time-of-flight mass spectrometry-based microanalysis technique based on the field evaporation of surface atoms of a tip-shaped specimen under an extremely high surface electric field. It enables three-dimensional characterization for deeper understanding of chemical nature in conductive materials at nanometer/atomic level, because of its high depth and spatial resolutions and ppm-level sensitivity. Indeed, the technique has been widely used to investigate the elemental partitioning in the complex microstructures, the segregation of solute atoms to the boundaries, interfaces, and dislocations as well as following of the evolution of precipitation staring from the early stage of cluster formation to the final stage of the equilibrium precipitates. The current review article aims at giving a comment to first atom probe users regarding the limitation of the techniques, providing a brief perspective on how we correctly interprets atom probe data for targeted applications.