• Journal of Sensor Science and Technology
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• v.27 no.3
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• pp.186-191
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• 2018

Smart textile industries have been precipitously developed and extended to electronic textiles and wearable devices in recent years. In particular, owing to an increasingly aging society, the elderly healthcare field has been highlighted in the smart device industries, and pressure sensors can be utilized in various elderly healthcare products such as flooring, mattress, and vital-sign measuring devices. Furthermore, elderly healthcare products need to be more lightweight and flexible. To fulfill those needs, textile-based pressure sensors is considered to be an attractive solution. In this research, to apply a textile to the second layer using a pressure sensing device, a novel type of conductive textile was fabricated using vapor phase polymerization of poly(3,4-ethylenedioxythiophene) (PEDOT). Vapor phase polymerization is suitable for preparing the conductive textile because the reaction can be controlled simply under various conditions and does not need high-temperature processing. The morphology of the obtained PEDOT-conductive textile was observed through the Field Emission Scanning Electron Microscope (FESEM). Moreover, the resistance was measured using an ohmmeter and was confirmed to be adjustable to various resistance ranges depending on the concentration of the oxidant solution and polymerization conditions. A 3-layer 81-point multi-pressure sensor was fabricated using the PEDOT-conductive textile prepared herein. A 3D-viewer program was developed to evaluate the sensitivity and multi-pressure recognition of the textile-based multi-pressure sensor. Finally, we confirmed the possibility that PEDOT-conductive textiles could be utilized by pressure sensors.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.6_2
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• pp.1059-1065
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• 2020

Demand for pressure sensors is increasing in various fields such as machinery, healthcare and medical care. A recent study is being conducted to create sensors that are more sensitive and have longer linear sections based on measurement principles. In this paper, a film-type sensor with a membrane structure was developed to measure the pressure distributed in the axial direction of a hot roll laminator. Performance of sensors was evaluated by resistance and durability according to membrane diameter. The resistance of the membrane sensor varies according to the contact state and contact area of the electrode. Therefore, the membrane diameter selection is important. Experiments showed the most pronounced variation in resistance under pressure at 8 mm in diameter of membrane. Reliability evaluation of sensors was carried out at room temperature and high temperature. The pressure on the sensor was pressurized 1000 times to measure the initial resistance and the resistance after the evaluation to analyze the change. Sensors showed stable results with low resistance changes of 5.15% and 6.27%, respectively. A large area sensor manufactured using the developed sensor also showed reliable results.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1416-1419
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• 2005

Design and manufacturing of plastic injection mold with cavity pressure/temperature sensors were performed in the present study for tensile test specimen. Standards of mold-base and tensile test specimen were used to design an injection molding system. Cavity pressure and temperature sensors were placed on the side of fixed platen of injection mold machine to prevent them from external impact damage. Injection molding experiments with variations of injection speed and melt temperature were performed and polycarbonate tensile specimens were prepared for the tensile test. It was shown that injection molding processing parameters can have effect on the mechanical properties of the plastic injection molded part.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.11
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• pp.84-90
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• 2007

In this study, design and manufacturing of plastic injection mold with cavity pressure/temperature sensors were performed fur tensile test specimen. International standard system for plastic tensile specimen was applied to design an injection molding system. Cavity pressure and temperature sensors were placed on the side of fixed platen of the injection mold to prevent them from external impact damage. Injection molding experiments with variations of injection speed and melt temperature were performed and then tensile test of the manufactured polycarbonate specimens was also performed. It was shown that injection molding processing parameters can have effect on the mechanical properties of the plastic injection molded part.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.4
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• pp.328-333
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• 2006

In this paper, we developed a pressure measurement apparatus with the parallel structure to improve the measurement efficiency of pressure sensors by reducing the measurement time of pressure. The developed system has two parallel positions for loading Silicon pressure sensor and has a dual valve structure. The semiconductor pressure sensors prepared by Copal Electronics were used to confirm the performance of the developed measurement system. Two stage differential amplifier circuit was employed to amplify the weak output signal and the amplified output signal was improved utilizing a low-pass filter. New apparatus shows the measurement time of pressure two times shorter than that of conventional one with the serial structure, while both structures show the similar linear output versus pressure characteristics.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.277.2-277.2
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• 2014

For next-generation electronic applications, human-machine interface devices have recently been demonstrated such as the wearable computer as well as the electronic skin (e-skin). For integration of those systems, it is essential to develop many kinds of components including displays, energy generators and sensors. In particular, flexible sensing devices to detect some stimuli like strain, pressure, light, temperature, gase and humidity have been investigated for last few decades. Among many condidates, a pressure sensing device based on organic field-effect transistors (OFETs) is one of interesting structure in flexible touch displays, bio-monitoring and e-skin because of their flexibility. In this study, we have investigated a flexible e-skin based on highly sensitive, pressure-responsive OFETs using microstructured ferroelectric gate dielectrics, which simulates both rapidly adapting (RA) and slowly adatping (SA) mechanoreceptors in human skin. In SA-type static pressure, furthermore, we also demonstrate that the FET array can detect thermal stimuli for thermoreception through decoupling of the input signals from simultaneously applied pressure. The microstructured highly crystalline poly(vinylidene fluoride-trifluoroethylene) possessing piezoelectric-pyroelectric properties in OFETs allowed monitoring RA- and SA-mode responses in dyanamic and static pressurizing conditions, which enables to apply the e-skin to bio-monitoring of human and robotics.

• Journal of Sensor Science and Technology
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• v.33 no.1
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• pp.7-11
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• 2024

Soft-pressure sensors have numerous applications in soft robotics, biomedical devices, and wearable smart devices. Herein, we present a highly sensitive electronic skin device with an isotropic wrinkled pressure sensor. A conductive ink for soft pressure sensors is produced by a solution process using polydimethylsiloxane (PDMS), poly 3-hexylthiophene (P3HT), carbon black, and chloroform as the solvents. P3HT provides high reproducibility and conductivity by improving the ink dispersibility. The conductivity of the ink is optimized by adjusting the composition of the carbon black and PDMS. Soft lithography is used to fabricate a conductive elastic structure with an isotropic wrinkled structure. Two conductive elastic structures with an isotropic wrinkle structure is stacked to develop a pressure sensor, and it is confirmed that the isotropic wrinkle structure is more sensitive to pressure than when two elastic structures with an anisotropic wrinkle structure are overlapped. Specifically, the pressure sensor fabricated with an isotropic wrinkled structure can detect extremely low pressures (1.25 Pa). Additionally, the sensor has a high sensitivity of 15.547 kpa^-1 from 1.25 to 2500 Pa and a linear sensitivity of 5.15 kPa^-1 from 2500 Pa to 25 kPa.

• Journal of Sensor Science and Technology
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• v.10 no.3
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• pp.173-179
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• 2001

The currently used semiconductor pressure sensors are piezoresistive and capacitive type. Especially, semiconductor micro pressure sensors have a great deal of attention because of their small size. However, its fabrication processes are difficult, so that its yield is poor. For the purpose of resolving the drawbacks of the existing silicon pressure sensors, we demonstrate a new type of pressure sensor using PSFET(pressure sensitive field effect transistor) and investigate its operational characteristics. We used PZT(Pb(Zr,Ti)$O_3$) as a pressure sensing material. PZT thin films were deposited on a gate oxide of MOSFET by an rf-magnetron sputtering method. To abtain the stable phase, perovskite structure, furnace annealing technique have been employed in PbO ambient. The sensitivity of the PSFET was 0.38 mV/mmHg.

• Journal of Sensor Science and Technology
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• v.4 no.1
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• pp.29-34
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• 1995

The absolute silicon pressure sensors are fabricated using SDB(silicon direct bonded) wafer. The fabricated pressure sensors consist of four bridge type piezoresistances and a diaphragm which plays a role of mechanic amplifier to supplying pressure. In order to make the diaphragm cavity in low vaccum condition, we anodically bonded Si diaphragm with pyrex 7740 glass in 0.02mmHg, at $400^{\circ}C$. The sensitivity and offset voltage of the fabricated sensors were $30.4{\mu}V/VmmHg$ and 30.6mV, respectively.