Development of a Pressure Measurement System with the Parallel Structure |
Yun, Eui-Jung
(호서대학교 정보제어공학과)
Kim, Jwa-Yeon (호서대학교 신소재공학과) Lee, Kang-Won (한국생산기술연구원 메카트로닉스팀) Lee, Seok-Tae (한국생산기술연구원 메카트로닉스팀) |
1 | 김우정, 조용수, 강현재, 최시영, '압저항형 압력센서를 이용한 초소형 하중센서의 개발', 센서학회지, 14권, 4호, p. 237, 2005 |
2 | J. M. Borkey and K. D. Wise, 'Integrated signal conditioning for pressure sensor', IEEE T-ED, Vol. ED-26, p. 1906, 1979 |
3 | G. Kaltsas, D. Goustouridis, A. G. Nassiopoulou, and D. Tsoukalas, 'Combination of integrated thermal flow and capacitive pressure sensors for high sensitivity flow measurements in both laminar and turbulent regions', J. of Physics, Conference Series, Vol. 10, p. 277, 2005 |
4 | A. Druzhinin, E. Lavitska, and I. Maryamova, 'Medical pressure sensors on the basis of silicon microcrystals and SOI layers', Sensors and Actuators B, Vol. 58, p. 415, 1999 |
5 | Copal Electronics Catalog, 'Pressure Transducer', Copal Electronics, p. 1, 2005 |
6 | H. Tanigawa, T. Ishihara, M. Hirata, and K. Suzuki, 'MOS integrated silicon pressure sensor', IEEE T-ED, Vol. ED-32, No. 7, p. 1191, 1985 |
7 | V. Voronin, I. Maryamova, and Y. Zaganyachi, 'Silicon whiskers of mechanical sensors', Sensors and Actuators, Vol. A30, p. 27, 1992 |