• Title/Summary/Keyword: Pressure force

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Planarization Uniformity Improvement by a Variable Pressure Type of the Polishing Head with the Thin Rubber Sheet (얇은 고무막 형태의 압력가변 연마헤드를 이용한 웨이퍼 평탄도 개선 방법에 관한 연구)

  • Lee Hocheol
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.4
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    • pp.44-51
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    • 2005
  • In this paper, a new polishing head with the variable pressure structure was studied to improve the planarization uniformity of the conventional template-metal head. Metal surface waviness and slurry distribution on the pad have been known to affect the polishing uniformity even in the synchronized quill and platen velocities. A polishing head with silicon rubber sheet was used to get a curved pressure distribution. In the experiment, the vertical deflection behavior on the pad was characterized with back pressure in the air chamber. Quill force increased linearly with backpressure. However, backpressure under a quill force made the upward movements of the quill. In the wafer polishing experiments, polishing rate and polishing thickness distribution were severely changed with backpressure. The best uniformity was observed with the standard deviation off.5% level of average polishing removal 215nm at backpressure 12.1kPa.

A Hydraulic-Oil Pump System using SR Drive with a Direct Torque Control Scheme

  • Lee, Dong-Hee;Kim, Tae-Hyoung;Ahn, Jin-Woo
    • Journal of Power Electronics
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    • v.9 no.3
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    • pp.491-498
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    • 2009
  • The hydraulic-oil pump is widely used for building machinery, brake systems of vehicles and automatic control systems due to its high dynamic force and smooth linear force control performance. This paper presents a novel direct instantaneous pressure control of the hydraulic pump system with SRM drive. The proposed hydraulic pump system embeds the pressure controller and direct instantaneous torque controller. Due to the proportional relationship between pump pressure and torque, pressure can be controlled by the motor torque directly. The proposed direct torque controller can reduce inherent torque ripple of SRM, and develop a smooth torque, which can increase the stability of the hydraulic pump. The proposed hydraulic pump system has also fast step response and load response. The proposed hydraulic pump system is verified by computer simulation and experimental results.

flow analysis in Micro Channel with a Couple of Fins (박막이 부착된 마이크로 채널 내의 유동해석)

  • Jeong Jae-Tack
    • 한국전산유체공학회:학술대회논문집
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    • 2005.04a
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    • pp.228-233
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    • 2005
  • Two-dimensional Stokes flows through a micro channel with a couple of symmetric vertical fins are investigated. At far up- and down-stream from the fins, the plane Poiseuille flow exists in the channel. The slip boundary conditions are applied to take account of the Knudsen number effects. For the analysis, the method of eigen function expansion and collocation method are employed. By the results, the streamline patterns and pressure distributions are shown and the force exerted on the fin and the excess pressure drop due to the fins are determined as functions of the length of the fin and Knudsen number. It may be conjectured that the force and the excess pressure drop are almost independent of the Knudsen number.

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Development of Numerically Controlled Hydraulic Cushion System for Use in Deep Drawing of Sheet Metals

  • Lee, Jeong-Woo;Park, Chi-Soo
    • 제어로봇시스템학회:학술대회논문집
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    • 2000.10a
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    • pp.301-301
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    • 2000
  • It is well known, for many years, that deep drawability ,can be improved by applying variable blank holding force. To apply variable blank holding force during cup during, we set up pressure controlling system on experimental hydraulic press, and the pressure control system is often called NC(Numerically Controlled} cushion system. Using the NC cushion system we carry out pressure control experiment and the proposed structure shows good performance. And we compare drawability of square steel cups with NC cushion and that with conventional cushion. The results show drawability is greatly improved when the pressure control curve is designed in a S-shaped curve. This paper includes design details of the NC cushion system and experimental analysis of drawability with experimental NC cushion system.

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A Study on the Reduction of Viscous Frictional Force with Uniform Pressure Distribution in the Turbulent Boundary Layer (균일(均一) 압력(壓力) 분포(分布)에 의(依)한 난류(亂流) 경계층내(境界層內) 결성(結性) 마찰력(摩擦力)의 감소화(減小化)에 관한 연구(硏究))

  • Sung, Du-Nam;Kim, Si-Young
    • Journal of Fisheries and Marine Sciences Education
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    • v.9 no.1
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    • pp.40-48
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    • 1997
  • In this study, uniform pressure distribution with small hole on the surface of symmetric object were given to reduce the viscous frictional force. The results were as follows : 1. The velocity on upper stream were accelerated by uniform pressure distribution on symmetric objects for reducing the viscous frictional resistances. 2. The effects of the distributed small holes were reduced the viscous frictional resistances in down stream region more than upper stream due to the increasing pressure in reverse flow region. 3. The viscous skin friction on surface of symmetric objects with and without distributed small holes are effect in region of upper stream and much decreased in down stream region due to increasing of boundary layer thickness.

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The Size of Crowd Pressure According to Number of Persons (가력 인원수에 따른 군중하중의 크기에 관한 실험적 연구)

  • Kim, Jin-Sik;Shin, Yun-Ho;Choi, Soo-Kyung
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2016.05a
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    • pp.93-94
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    • 2016
  • The resistance of crowd pressure is an important performance to be influential on safety of facility users among performances required for light weight walls of public facilities. This study has empirically evaluated the estimation of size of crowd pressure to be applied to a wall of structure. For the load analysis test, the force plate with stiffness of 28 kN/cm was designed and manufactured. For inspectors, 15 males in the age of 20s were selected. The action of putting load was set as instantaneous push of plate and continuous push. As the load was increased linearly from the weight of inspector, the size of load was indicated as the load ratio. In case of instantaneous force, about 1.18 times the weight of pushing personnel was acted as a load. In case of continuous push, about 0.80 times the weight of pushing personnel was acted as a load.

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In-Process Diagnosis of Servovalve wear in Hydraulic Force Control Systems (유압실린더 힘 제어계의 인-프로세스 서보밸브 마모진단에 관한 연구)

  • Kim, S.D.;Jeon, S.H.;Chang, Y.
    • Transactions of The Korea Fluid Power Systems Society
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    • v.6 no.2
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    • pp.22-30
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    • 2009
  • An in-process method of diagnosing the spool wear of hydraulic servovalves was explored. The diagnostic method discussed in this paper is for force-control hydraulic servo systems. The key principle used is that pressure sensitivity of a servovalve drops as the valve spool wears out so that it is possible to determine the spool condition by monitoring pressure sensitivity. A diagnostic algorithm was developed and evaluated through numerical simulation and experiments. Two major steps of diagnosis are the evaluation of null bias of the servovalve and the approximation of pressure sensitivity, both of which could be successfully done during normal operation of a servo system. The difference between a new servovalve and a worn valve could be clearly detected in-process, and the diagnostic test was found to be repeatable.

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A Development of Proportional Pressure Control Valve (비례압력제어밸브 개발)

  • Yun, S.N.;Ahn, B.K.;Ryu, J.S.;Ham, Y.B.
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1041-1046
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    • 2004
  • A proportional pressure control valve has a nonmagnetic ring which is inserted in between a coil and plunger and it can get attraction force in proportion to input current by an influence of control cone. Therefore, a proportional pressure control valve is applied to a servo system as substitution of servo valve and an on-off solenoid valve widely because control of a high level is possible and pollution level is low. The purpose of this study is to develop domestic model of a proportional pressure control valve, and a test model was designed and manufactured through valve system analysis and finite element analysis. And comparison between results of theoretical analysis and static / dynamic characteristics test were carried out on a manufactured test model, and it was confirmed that it has excellent performance in comparison with other foreign products.

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A Study on the Closing Force according to the Opening Angle of the Door in the Smoke Control System (제연구역 출입문 개방 각도에 따른 폐쇄력에 관한 연구)

  • Oh, Won-Sin;Joung, Suck-Hwan
    • Journal of the Korea Safety Management & Science
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    • v.23 no.4
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    • pp.43-48
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    • 2021
  • In this study, the experiment was conducted on a fire door(W × H = 0.98 m × 2.19 m) installed on the vestibule. The effective leakage area for each opening angles and closing forces derived from the impulse-momentum equation was compared and analyzed with the experimental results. As a result of the experiment, the major factors affecting the door closing forces were the pressure difference and the area of the door. The difference of door closing forces between measured and calculated values by the impulse-momentum equation showed a deviation of less than ±15% at the opening angles of 5°to 10°. At the door opening angle of 2.5°, the dynamic pressure was much higher than the measured static pressure, and this pressure difference is estimated to be air resistance acting to prevent the door from being completely closed.

Bite Force, Occlusal Contact Area and Occlusal Pressure of Patients with Temporomandibular Joint Internal Derangement (측두하악관절 내장증 환자의 교합력, 교합 접촉 면적 및 교합압)

  • Kim, Ki-Seo;Choi, Jong-Hoon;Kim, Seong-Taek;Kim, Chong-Youl;Ahn, Hyung-Joon
    • Journal of Oral Medicine and Pain
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    • v.31 no.3
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    • pp.265-274
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    • 2006
  • Temporomandibular joint (TMJ) internal derangement, especially disc displacement with reduction (DDwR) is the most common TMJ arthropathy and has been thought to do some effects on masticatory performance. Measuring of maximal bite force has been widely used as objective and quantitative method of evaluating masticatory performance, but previous studies showed various results due to various characteristics of subjects and different measuring devices and techniques. In a few studies about the correlation of bite force and temporomandibular disorders (TMD), some authors reported that bite force and masticatory performance would be reduced in patients with TMD because of pain. But the correlation of changes in structure of articular disc and masticatory performance has not been well investigated yet. In this study, to investigate the influences of non-painful disc change on the masticatory performance, we measured the value of maximal bite force, occlusal contact area and occlusal pressure of 39 patients with non-painful DDwR of the TMJ using pressure sensitive film, and compared it with that of 59 controls. The results are summarized as follows: 1. The maximal bite force (P<0.01) and the occlusal contact area (P < 0.05) of the DDwR patients were greater than the controls. 2. There was no significant difference in occlusal pressure between the DDwR patients and the controls (P > 0.05). 3. The maximal bite force of the male group was greater than that of the female group (P < 0.05). However, the occlusal contact area and the occlusal pressure between the male and the female group didn't show significant difference (P > 0.05). From the results above, we can suggest that DDwR could be a factor of changing bite force, but more controlled, large scaled and EMG related further study is needed.