• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.423-426
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• 1998

Piezoresistive pressure sensors have fabricated using electrochemical etch-stop technique. Si diaphragm having thickness of n-epi. layer was fabricated and used to detect pressure range from 0 to 1 kg/$\textrm{cm}^2$. Piezoresistors were diffused 3${\times}$10$\^$18/ cm$\^$-3/ and placed at diaphragm edge for maximum pressure detection. The characteristics of electrochemical etch-stop in TMAH/lPA/pyrazine solution were also discussed. I-V curves of n and p-type Si in TMAH/lPA/pyrazine solution were obtained. Etching rate is highest at optimum etching condition, TMAH 25wt.%/IPA 17vo1.%/pyrazine 0.1/100m1, thus the elapsed time of etch-stop was reduced.

• 로봇학회논문지
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• 제17권2호
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• pp.152-158
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• 2022

As various mobile robots and manipulator robots have been commercialized, robots that can be used by individuals in their daily life have begun to appear. With the development of robots that support daily life, the interaction between robots and humans is becoming more important. Manipulator robots that support daily life must perform tasks such as pressing buttons or picking up objects safely. In many cases, this requires expensive multi-axis force/torque sensors to measure the interaction. In this study, we introduce a low-cost two-axis pressure sensor that can be applied to manipulators for education or research. The proposed system used three force sensitive resistor (FSR) sensors and the structure was fabricated by 3D printing. An experimental device using a load cell was constructed to measure the biaxial pressure. The manufactured prototype was able to distinguish the +-x-axis and the +-y-axis pressures.

• 감성과학
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• 제24권2호
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• pp.65-74
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• 2021

최근 ICT 산업의 기술혁신이 일어남에 따라 생체신호을 인식하고 이에 대해 대응을 하기 위한 웨어러블 센싱 장치에 대한 수요가 증가하고 있다. 이에 따라 본 연구에서는 단순한 함침과정을 통해 3차원 스페이서(3D spacer)직물을 단일벽 탄소나노튜브(SWCNT)분산용액에 함침공정을 진행해 단일층(monolayer) 압전 저항형 압력 센서(piezoresistive pressure sensor)를 개발하였다. 3D 스페이서 원단에 전기전도성을 부여하기 위해 시료를 SWCNT 분산용액에 함침공정을 진행한 후 건조하는 과정을 거쳤다. 함침된 시료의 전기적 특성을 파악하기 위해 UTM (Universal Testing Machine)과 멀티미터를 이용해서 압력의 변화에 따른 저항의 변화를 측정하였다. 또한 센서의 전기적 특성의 변화를 관찰하기 위해 분산용액의 농도, 함침횟수, 시료의 두께를 다르게 해서 시료의 센서로서의 성능을 평가했다. 그 결과 wt0.1%의 SWCNT 분산용액에 함침공정을 2번 진행한 시료가 센서로서 가장 뛰어난 성능을 나타냄을 알 수 있었다. 두께별로는 7mm 두께의 센서가 가장 높은 GF를 보이고 13mm 두께의 센서가 작동범위가 가장 넓음을 확인했다. 본 연구를 통해 3D spacer 원단으로 제작한 스마트 텍스타일 센서는 공정과정이 단순하면서도 센서로서 성능이 뛰어나다는 장점을 확인할 수 있었다.

• 센서학회지
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• 제15권2호
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• pp.106-111
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• 2006

Pulse sensors generally have characteristics that cause a analytical error by the interference of signals according to tiny motion of body and pressure applied to skin. To resolve this problem, we implemented the sensor that is capable of simultaneously measuring pressure and PPG(photoplethymogram) in a state attached to skin. Pressure and PPG was recorded at the finger and wrist respectively to evaluate the usefulness of the implemented sensor. Then, it was observed that the shape of PPG from sensor changed by pressure pushing down skin. Results of this study suggested that it is possible to monitor a degree of skin pressurization and to guarantee a reliable measurement by simultaneously measuring pressure and PPG using implemented integrated sensor when measuring PPG on the wrist or the finger.

• International journal of advanced smart convergence
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• 제11권4호
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• pp.240-246
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• 2022

In order to measure the respiratory rate, one of the major vital signs, many devices have been developed and related studies have been conducted. In particular, as the number of wearers of respirators increases in the COVID-19 pandemic situation, studies have been conducted to measure the respiratory rate of the wearer by attaching an electronic sensor to the respirator, but most of them are cases in which an air flow sensor or a microphone sensor is used. In this study, we design and develop a system that measures the respiratory rate of the wearer using an air pressure sensor in a respirator. Air pressure sensors are inexpensive and consume less power than the other sensors. In addition, since the amount of data required for calculation is small and the algorithm is simple, it is suitable for small-scale and low-power processing devices such as Arduino. We developed an algorithm to measure the respiratory rate of a respirator wearer by analysing air pressure change patterns. In addition, variables that can affect air pressure changes were selected, and experimental scenarios were designed according to the variables. According to the designed scenario, we collected air pressure data while the respirator wearer was breathing. The performance of the developed system was evaluated using the collected data.

• 한국컴퓨터정보학회논문지
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• 제25권3호
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• pp.155-162
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• 2020

현재 제4차 산업혁명 기술들 중에 사물인터넷과 센서를 이용한 헬스케어 관련 제품들이 개발되어지고 있다. 본 논문에서는 다채널 대면적 압력 센서들을 이용한 사용자의 서있는 자세 인식 기반의 상호 작용 시스템을 설계 및 개발하려고 한다. 이를 위해 먼저, 센서산업의 주요 센서 시장 및 기술 동향에 대해 조사하며 스마트 헬스케어의 현재와 미래에 대해 검토한다. 이를 기반으로 시스템의 핵심 부품인 다채널 대면적 압력 센서에 대해 국내외에서 개발된 사례들을 조사해 보고 비교 평가해 본다. 연구 개발된 시스템을 통해 사용자의 서있는 자세 상태를 인지하여 실제적으로 사용자 자세 교정에 얼마나 효과적인지를 실험해 보고 이를 기반으로 다양한 헬스케어 기기의 의료 분야에 연구 결과를 적용한다.

• 한국산학기술학회논문지
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• 제20권6호
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• pp.439-447
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• 2019

본 연구에서는 산사태 축소 모형 장치에 레이저 센서와 진동 센서를 설치하여 강우에 의한 사면 붕괴 시 토사의 미세 변위를 조기에 감지하여 붕괴 위험이 높은 사면에 대한 적절한 대책 마련과 사면 붕괴로 인한 피해를 최소화하기 위한 산사태 발생 시점을 예측하고자 실험을 실시하였다. 또한, 산사태 축소모형 실험을 통해 강우에 의한 토층의 거동 특성 및 간극수압과 수분과 같은 함수비 변화 특성을 분석하였다. 화강암의 풍화토로 인공사면을 조성한 다음 강우 조건을 200mm/hr와 400mm/hr로 달리하여 이에 따른 함수비(수압, 수분) 변화를 측정하고 지표 변위를 분석하기 위해 레이저 센서와 진동 센서를 적용하였으며, 영상분석을 위해 비디오 촬영을 하여 변위 발생시간을 상호 비교 분석하였다. 실험 결과 수분함량은 강우강도가 클수록 한계값 도달시간이 짧게 소요되는 것으로 나타났으며, 간극수압은 강우강도가 클수록 간극수압의 증가 시간이 짧은 것으로 나타났다. 산사태 모형실험은 현장 조건을 충분히 반영하지는 못하지만 진동 센서를 이용한 변위 발생 인지 시간을 측정한 결과 붕괴시점이 레이저 센서를 이용한 방법보다 보다 빠른 것으로 나타났다. 산사태 발생 시 센서를 이용한 지반변위 측정은 지속적인 연구를 수행할 경우 사면붕괴 예측 및 피해 저감 그리고 계측산업 활성화의 기초 자료로 활용이 가능할 것으로 판단된다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1989년도 한국자동제어학술회의논문집; Seoul, Korea; 27-28 Oct. 1989
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• pp.727-730
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• 1989

Tokyo dome is Japan's first air dome. The roof of the dome is supported by air pressure. The centralized control system (YOKOGAWA's DCS : CENTUM and YEWPACK) is applied to automatically regurate the air pressure. The control system acquires signals from sensors positioned throughout the stadium and operate 36 fans to blow air into the dome. Great emphasis is placed on the reliability and safety of the system.

• 한국의류산업학회지
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• 제16권1호
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• pp.145-152
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• 2014

The usage of textile-based sensors has increased due to their many advantages (compared to IT sensors) when applied to body assessment and comfort. Textile-based sensors have different detecting factors such as pressure, voltage, current and capacitance to investigate the characteristics. In this study, textile-based sensor fabrics with sheath-core type conductive yarns were produced and the relationship between capacitance changes and applied load was investigated. The physical and electric properties of textile-based sensor fabrics were also investigated under various laminating conditions. A textile based pressure sensor that uses a sheath-core conductive yarn to ensure the stability of the pressure sensor in the textile-based sensor (the physical structure of the reaction characteristic of the capacitance) is important for the stability of the initial value of the initial capacitance value outside the characteristic of the textile structural environment. In addition, a textile based sensor is displaced relative to the initial value of the capacitance change according to pressure changes in the capacitance value of the sensor due to the fineness of the high risk of noise generation. Changing the physical structure of the fabric through the sensor characteristic of the pressure sensor via the noise generating element of laminating (temperature, humidity, and static electricity) to cut off the voltage output element to improve the data reliability could be secured.

• Journal of Electrical Engineering and Technology
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• 제10권6호
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• pp.2434-2441
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• 2015

This paper proposes an exercise recommendation system for treating obesity that provides systematic recommendations for exercise and diet. Five body indices are considered as indicators for recommend exercise and diet. The system also informs users of prohibited foods using health data including blood pressure, blood sugar, and total cholesterol. To maximize the utility of the system, it displays recommendations for both indoor and outdoor activities. The system is equipped with multimode sensors, including a three-axis accelerometer, a laser, a pressure sensor, and a wrist-mounted sensor. To demonstrate the effectiveness of the system, field tests are carried out with three participants over 20 days, which show that the proposed system is effective in treating obesity.