• 센서학회지
• /
• 제4권2호
• /
• pp.58-63
• /
• 1995

$SiH_{4}$와 $NH_{3}$의 RF 글로우방전 분해에 의한 PECVD법으로 a-SiNx:H박막을 제조하고 기판온도, RF 전력, 그리고 $NH_{3}/SiH_{4}$ 유량비 등의 변화에 따른 a-SiNx:H 박막의 유전상수와 광학적 밴드갭 등을 조사하였다. a-SiNx:H막의 유전상수와 광학적 밴드갭은 기판온도, RF 전력 및 $NH_{3}/SiH_{4}$ 유량비 등의 증착변수에 따라 크게 변화하였다. 기판온도가 증가할수록 a-SiNx:H막의 유전상수는 증가하였으며 광학적 밴드갭은 감소하였다. 기판온도, RF 전력, 가스압력, $NH_{3}/SiH_{4}$ 유량비 및 두께를 각각 $250^{\circ}C$, 20 W, 500 mTorr, 10 및 $1500\;{\AA}$로 하였을 때 a-SiNx:H막의 유전상수, 절연파괴전장 및 광학적 밴드갭은 각각 4.3, 1 MV/cm 및 2.9 eV로 나타났다.

• 센서학회지
• /
• 제1권1호
• /
• pp.53-57
• /
• 1992

본 연구는 $CdS_{1-x}Se_{x}$의 박막을 제작하고 그 전기-광학적인 특성을 조사한 것이다. 전자선 가열증착법을 이용하여 $CdS_{1-x}Se_{x}$을 알루미나 기판위에 $1.5{\times}10^{-7}$ torr의 압력, 4kV의 전압, 2.5 mA의 전류 그리고 기판온도를 $300^{\circ}C$로 유지하여 증착하였다. 증착된 $CdS_{1-x}Se_{x}$ 박막은 X-ray 회절 실험을 통하여 볼 때, 육방정계의 결정구조를 가지며 성장되었다. $CdS_{1-x}Se_{x}$ 도전막은 특정분위기에서 $550^{\circ}C$, 30분간 열처리함으로써 높은 광전도성을 나타내게 되었다. 또한 Hall 효과, 광전류 스펙트럼, 감도, 최대 허용 전력과 응답시간 등을 조사하였다.

• 센서학회지
• /
• 제24권4호
• /
• pp.264-269
• /
• 2015

An infrared (IR) bolometer measures the change of resistance by absorbing incident IR radiation and generates a signal as a function of the radiation intensity. Since a bolometer requires temperature stabilization and light filtering except for the infrared rays, it is essential for the device to be packaged meeting conditions that above mentioned. Minimization of heat loss is needed in order to stabilize temperature of bolometer. Heat loss by conduction or convection requires a medium, so the heat loss will be minimized if the medium is a vacuum. Therefore, vacuum packaging for bolometer is necessary. Another important element in bolometer packaging is germanium (Ge) window, which transmits IR radiation to heat the bolometer. To ensure a complete transmittance of IR light, anti-reflection (AR) coatings are deposited on both sides of the window. Although the transmittance of Ge window is high for IR rays, it is difficult to use frequently in low-price IR bolometer because of its high price. In this paper, we fabricated IR window by utilizing silicon (Si) substrate instead of Ge in order to reduce the cost of bolometer packaging. To enhance the IR transmittance through Si substrate, it is textured using Reactive Ion Etching (RIE). The texturing process of Si substrate is performed along with the change of experimental conditions such as gas ratio, pressure, etching time and RF power.

• 센서학회지
• /
• 제29권1호
• /
• pp.27-32
• /
• 2020

This study proposes a pixel-patterning method for organic light-emitting diodes (OLEDs) based on thermal transfer. An infrared lamp was introduced as a heat source, and glass type donor element, which absorbs infrared and generates heat and then transfers the organic layer to the substrate, was designed to selectively sublimate the organic material. A 200 nm-thick layer of molybdenum (Mo) was used as the lightto-heat conversion (LTHC) layer, and a 300 nm-thick layer of patterned silicon dioxide (SiO₂), featuring a low heat-transfer coefficient, was formed on top of the LTHC layer to selectively block heat transfer. To prevent the thermal oxidation and diffusion of the LTHC material, a 100 nm-thick layer of silicon nitride (SiN_x) was coated on the material. The fabricated donor glass exhibited appropriate temperature-increment property until 249 ℃, which is enough to evaporate the organic materials. The alpha-step thickness profiler and X-ray reflection (XRR) analysis revealed that the thickness of the transferred film decreased with increase in film density. In the patterning test, we achieved a 100 ㎛-long line and dot pattern with a high transfer accuracy and a mean deviation of ± 4.49 ㎛. By using the thermal-transfer process, we also fabricated a red phosphorescent device to confirm that the emissive layer was transferred well without the separation of the host and the dopant owing to a difference in their evaporation temperatures. Consequently, its efficiency suffered a minor decline owing to the oxidation of the material caused by the poor vacuum pressure of the process chamber; however, it exhibited an identical color property.

• 한국정밀공학회지
• /
• 제29권11호
• /
• pp.1199-1206
• /
• 2012

Recently, technologies to help the elderly or disabled people who have difficulty in walking are being developed. In order to develop these technologies, it is necessary to construct a system that gathers the gait data of people and analysis of these data is also important. In this research, we constructed the development of sensor system which consists of pressure sensor, three-axis accelerometer and two-axis gyro sensor. We used k-means clustering algorithm to classify the data for characterization, and then calculated the symmetry index with histogram which was produced from each cluster. We collected gait data from sensors attached on two subjects. The experiment was conducted for two kinds of gait status. One is walking with normal gait; the other is walking with abnormal gait (abnormal gait means that the subject walks by dragging the right leg intentionally). With the result from the analysis of acceleration component, we were able to confirm that the analysis technique of this data could be used to determine gait symmetry. In addition, by adding gyro components in the analysis, we could find that the symmetry index was appropriate to express symmetry better.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2010년도 제39회 하계학술대회 초록집
• /
• pp.175-175
• /
• 2010

Transparent conducting oxide (TCO) films are widely used as transparent conducting thin film material for application in various fields such as solar cells, optoelectronic devices, heat mirrors and gas sensors, etc. Recently the increased utilization of many transparent electrodes has accelerated the development of inexpensive TCO materials. Indium tin oxide (ITO) film is well-known for TCO materials because of its low resistivity, but there is disadvantage that it is too expensive. ZnO film is cheaper than ITO but it shows thermally poor stability. On the contrary, antimony-doped tin oxide films (ATO) are more stable than TCO films such as Al-doped zinc oxide (AZO) and ITO. Moreover, SnO2 film shows the best thermal and chemical stability, low cost and mechanical durability except the poor conductivity. However, annealing is proved to improve the conductivity of ATO film. Therefore, in this work, antimony (6 wt%) doped tin oxide films to improve the conductivity were deposited on 7059 corning glass by RF magnetron sputtering method for the application to transparent electrodes. In general, of all TCO films, glass is the most commonly selected substrate. However, for future development in flexible devices, glass is limited by its intrinsic inflexibility. In this study, we report the growth and properties of antimony doped tin oxide (ATO) films deposited on PES flexible substrate by using RF magnetron sputtering. The optimization process was performed varying the sputtering parameters, such as RF power and working pressure, and parameter effect on the structural, electrical and optical properties of the ATO films were investigated.

• 한국정보통신학회:학술대회논문집
• /
• 한국정보통신학회 2012년도 추계학술대회
• /
• pp.435-438
• /
• 2012

요즘 모든 분야에서 실세계의 상황정보 인지를 통해 전자공간과 물리공간을 결합할 수 있는 유비쿼터스 컴퓨팅의 기반 기술을 사용하여 센서와 무선 통신 기술을 결합한 무선 센서 네트워크에 대한 연구가 활발히 이루어지고 있는 추세이다. 또한 선박에서도 유무선 기술을 융합하여 지능형 선박에 적합한 Ship Area Network(SAN) 연구가 진행되고 있으나, 다양한 유무선 네트워크 연동 SAN-브릿지 기술, 이종 센서, 제어기기를 자율적으로 구성관리하거나 상호연동, 원격제어 하는 자율 SAN 구성관리 기술 등의 필요성이 제기되고 있는 실정이다. 선박에서의 모니터링 분야인 구조적 안전과 화물 관리를 위한 모니터링 외에도 선원을 포함한 모든 주변 환경을 안전하게 유지하는 것이다. 이에 본 논문에서는 기후 변화에 대한 감지나 여러 구조물에 대한 온도, 압력 등의 모니터링 시스템을 효율적으로 설계하기 위해 무선 센서 네트워크에서의 에너지 효율을 이용한 라우팅 및 데이터 병합을 위한 기술 동향을 파악하고 자기 구성 클러스터링 방법을 분석하여 선내의 무선 센서 네트워크 구성에 대해 연구하였다.

• 한국건설관리학회논문집
• /
• 제5권3호
• /
• pp.71-78
• /
• 2004

In conventional method of supporting soil shuttering wall during excavation a system of struts and wales to provide cross-lot bracing is common in trench excavations and other excavations of limited width. This method, however, becomes difficult and costly to be adopted for large excavations since heavily braced structural systems are required. Another expensive and unsafe situations are expected when temporary struts must be removed for the construction of underground structures. This paper introduces innovative strut systems which can be used as permanent underground structures after its role as brace system to resist earth pressure during excavation phase. Underground structural system suggested from architect is checked against the soil lated pressures before the analysis of stresses developed from gravity loads. In this technology, named SPS(Struts as Permanent System), retaining wall is installed first and excavation proceeds until the first level of bracing is reached. Braces used as struts during excavation will serve as permanent girders when buildings are in operation. Simultaneous construction of underground and superstructure can proceeds when excavation ends with the last level of braces being installed. In this paper, construction sequence and the calculation concept are explained in detail with some photo illustrations. SPS technology was applied to three selected buildings. One of them was completed and two others are being constructed Many sensors were installed to monitor the behavior of retaining wall, braces as column in terms of stress change and displacement. Adjacent ground movement was also obtained. These projects demonstrate that SPS technology contributes to the speed as well as the economy involved in construction.

• Journal of Biosystems Engineering
• /
• 제42권1호
• /
• pp.23-43
• /
• 2017

Purpose: As application-specific wireless sensor networks are gaining popularity, this paper discusses the development and field performance of the GHAN, a greenhouse area network system to monitor, control, and access greenhouse microenvironments. GHAN, which is an upgraded system, has many new functions. It is an intelligent wireless sensor and actuator network (WSAN) system for next-generation greenhouses, which enhances the state of the art of greenhouse automation systems and helps growers by providing them valuable information not available otherwise. Apart from providing online spatial and temporal monitoring of the greenhouse microclimate, GHAN has a modified vapor pressure deficit (VPD) fuzzy controller with an adaptive-selective mechanism that provides better control of the greenhouse crop VPD with energy optimization. Using the latest soil-matrix potential sensors, the GHAN system also ascertains when, where, and how much to irrigate and spatially manages the irrigation schedule within the greenhouse grids. Further, given the need to understand the microclimate control dynamics of a greenhouse during the crop season or a specific time, a statistical assessment tool to estimate the degree of optimality and spatial variability is proposed and implemented. Methods: Apart from the development work, the system was field-tested in a commercial greenhouse situated in the region of Punjab, India, under different outside weather conditions for a long period of time. Conclusions: Day results of the greenhouse microclimate control dynamics were recorded and analyzed, and they proved the successful operation of the system in keeping the greenhouse climate optimal and uniform most of the time, with high control performance.

• 센서학회지
• /
• 제18권4호
• /
• pp.294-300
• /
• 2009

Cardiopulmonary resuscitation(CPR) is performed by artificial ventilation and thoracic compression for the patient under emergent situation to maintain at least the minimum level of respiration and blood circulation for life survival. Quality of the pre-hospital CPR not only significantly affects the patient's survival rate but also minimizes side effects caused by CPR. Good quality CPR requires monitoring respiration, however, traditional respiratory air flow transducers cannot be used because the transducer elements are located on the flow axis. The present study developed a new technique with no physical object on the flow stream but enabling the air flow measurement and easily incorporated with the CPR devices. A turbulence chamber was formed in the middle of the respiratory tube by locally enlarging the cross-sectional area where the flow related turbulence was generated inducing energy loss which was in turn converted into pressure difference. The turbulence chamber was simply an empty enlarged air space, thus no physical object was placed on the flow stream, but still the flow rate could be evaluated. Both inspiratory and expiratory flows were obtained with symmetric measurement characteristics. Quadratic curve fitting provided excellent calibration formula with a correlation coefficient>0.999 (P<0.0001) and the mean relative error<1 %. The present results can be usefully applied to accurately monitor the air flow rate during CPR.