• Progress in Medical Physics
• /
• v.32 no.4
• /
• pp.153-158
• /
• 2021

Purpose: This study evaluated the features of a pressure mapping system for patient motion monitoring in radiation therapy. Methods: The pressure mapping system includes an MS 9802 force sensing resistor (FSR) sensor with 2,304 force sensing nodes using 48 columns and 48 rows, controller, and control PC (personal computer). Radiation beam attenuation caused by pressure mapping sensor and signal perturbation by 6 and 10 mega voltage (MV) photon beam was evaluated. The maximum relative pressure value (mRPV), average relative pressure value (aRPV), the center of pressure (COP), and area of pressure distribution were obtained with/without radiation using the upper body of an anthropomorphic phantom for 30 minutes with 15 MV. Results: It was confirmed that the differences in attenuation induced by the FSR sensor for 6 and 10 MV photon beams were small. The differences in mRPV, aRPV, area of pressure distribution with/without radiation are about 0.6%, 1.2%, and 0.5%, respectively. The COP values with/without radiation were also similar. Conclusions: The characteristics of a pressure mapping system during radiation treatment were evaluated on the basis of attenuation and signal perturbation using radiation. The pressure distribution measured using the FSR sensor with little attenuation and signal perturbation by the MV photon beam would be helpful for patient motion monitoring.

• Journal of Sensor Science and Technology
• /
• v.5 no.2
• /
• pp.1-8
• /
• 1996

In this paper, We have designed silicon pressure sensor with center-bossed diaphragm which improving sensitivity and linearity by reducing diaphragm deflection. Designed center-bossed pressure sensor showed maximum deflection of $0.125{\mu}m$, maximum stress of $2.24{\times}10^7 Pa$ and sensitivity of 27.67 mV/V.psii. As a result, diaphragm deflection was reduced to 1/160 that of diaphragm thickness and 1/35 that of square diaphragm. Also, sensitivity was increased 19 times compared to square diaphragm.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2006.10a
• /
• pp.10-13
• /
• 2006

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-Sic/SOI pressure sensor presents a high-sensitivity and excel lent temperature stability.

• Transactions on Electrical and Electronic Materials
• /
• v.7 no.4
• /
• pp.184-188
• /
• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• The Journal of Korea Robotics Society
• /
• v.17 no.2
• /
• pp.152-158
• /
• 2022

As various mobile robots and manipulator robots have been commercialized, robots that can be used by individuals in their daily life have begun to appear. With the development of robots that support daily life, the interaction between robots and humans is becoming more important. Manipulator robots that support daily life must perform tasks such as pressing buttons or picking up objects safely. In many cases, this requires expensive multi-axis force/torque sensors to measure the interaction. In this study, we introduce a low-cost two-axis pressure sensor that can be applied to manipulators for education or research. The proposed system used three force sensitive resistor (FSR) sensors and the structure was fabricated by 3D printing. An experimental device using a load cell was constructed to measure the biaxial pressure. The manufactured prototype was able to distinguish the +-x-axis and the +-y-axis pressures.

• Journal of Sensor Science and Technology
• /
• v.6 no.3
• /
• pp.180-187
• /
• 1997

We demonstrate the improvement of sensitivity and analysis of operating characteristics of the piezoelectric pressure sensor using ZnO piezoelectric thin film and FET(field effect transistor) for sensing applied pressure and transforming the pressure into electrical signals, respectively. The sensitivity of the PSFET(pressure sensitive field effect transistor) was improved by using highly-oriented ZnO film perpendicular to the substrate surface and the operating characteristics was investigated by monitoring output voltage with time in various static pressure levels.

• Proceedings of the Korean Society For Composite Materials Conference
• /
• 2005.04a
• /
• pp.33-36
• /
• 2005

In this research, for the smart health monitoring of the hydrogen storage high pressure composite vessel, the feasibility study of an embedded fiber Bragg grating(FBG) sensor is carried out. To verify strain measurement in various temperature environment which is needed for the hydrogen pressure vessel, tensile test of a composite specimen with both an embedded FBG sensor and a strain gauge is made in low temperature. Before we try a real-size hydrogen storage pressure vessel, a small & cheap composite pressure vessel having the same structure is fabricated with embedded FBG sensors and tested. In the case of an aluminum liner inside the vessel, survivability of FBG sensors at the interface is lower than the other areas.

• Proceedings of the KOSOMBE Conference
• /
• v.1994 no.05
• /
• pp.88-91
• /
• 1994

We develope a assistant system of foot pressure distribution for improvement gait Pattern, adapted working speed, and minimitation of muscle fatigue of the sensory feedback type FES system(SEFES). This measurement system consist of mat type pressure sensor with piezo electric films. The pressure data signal multiflexed input scanning method processed A/D conversion after two step amplify and integrate. Matrix sensor interface to PC for pseudo color display by level of Pressure distribution data. This measurement system clinically evaluated in hemiplegic patients. It has produced acceptable results with optimal location of the food sensor's pressure point and avoid the muscle fatigue.

• Journal of the Korea Society of Computer and Information
• /
• v.17 no.8
• /
• pp.107-114
• /
• 2012

We have developed a textile capacitive pressure sensor for smart gait analysis. The proposed system can convert sensor signal into step counts and pressure levels by different posture. To evaluate the performance of insole type textile capacitive sensor, we measured capacitance change by increment of weights from 10 kg to 100 kg with 10 kg increment using M1 class rectangular weights (four 20 kg weights and two 10 kg weights) which have ${\pm}10%$ tolerance. The result showed non-linearity characteristic of a general capacitive pressure sensor. The test was performed according to a test protocol for four different postures (sitting, standing, standing on a left leg and standing on a right leg) and different walking speeds (1 km/h and 4 km/h). Five healthy male subjects were participated in each test. As we expected, the pressure level was changed by pressure distribution according to posture. Also, developed textile pressure sensor showed higher recognition rate (average 98.06 %) than commercial pedometer at all walking speed. Therefore, the proposed step counts and posture monitoring system using conductive textile capacitive pressure sensor proved to be a reliable and useful tool for monitoring gait parameters.

• Proceedings of the Korean Society of Marine Engineers Conference
• /
• 2005.11a
• /
• pp.202-203
• /
• 2005

we present a pressure sensor based on the mechanically formed long-period fiber gratings. The attenuation properties of an output power as a function of an external pressure is able to apply to the in-line fiber pressure sensors for the vessels.