• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.739-740
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.741-742
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.413-414
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.773-774
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.345-346
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• 2007

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.50-57
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• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.1 s.178
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• pp.129-135
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• 2006

In this study, a two-axis ultra-precision stage driven by piezoelectric elements is presented. The stage has a flexure-type parallel linear guide mechanism consisting of quad-symmetric simple parallel linear springs and quad-symmetric double compound linear springs. While the simple parallel linear springs guide the linear motion of a moving plate in the stage, the double compound linear springs follow the motion of the simple parallel linear spring as well as compensate the parasitic motions caused by the simple parallel linear springs. The linear springs are designed by rectangular beam type flexures that are deformed by bending deflection rather than axial extension, because the axial extension is smaller than the bending deflection at the same force. The designed guide mechanism is analyzed by finite element method(FEM). Then two-axis parallel linear stage is implemented by the linear guide mechanism combined with piezoelectric elements and capacitance type displacement sensors. It is shown that the manufactured ultra-precision stage achieves 3 nm of resolution in x- and y-axis within 30 ${\mu}m$ of operating range.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.1
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.