• Journal of the Korean Society for Precision Engineering
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• v.12 no.7
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• pp.92-98
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• 1995

In the cluster tool, it is necessary to precisely control the vacuum pressure for the wafer transportation between transport module and cassette or process modules with the range of 1*10$^{-4}$ to 5*10$^{-5}$ torr. So we have designed the pressure control system for the transport module of the cluster tool and have evaluated its performance. Digital PID is utilized with the weighted sum of both three previous errors and one current error. The feedback signal is put into the nitrogen mass flow controller using the transport module controller. This pressure control system can prevent the transport module from the particle generation and backstreaming of hazardous process gases of the process chamber.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.6
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• pp.86-95
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• 2002

This paper suggests the new technology to control metal flow in order to reduce the number of preforming and the machining for the cold forged product with complex geometry. This technology is the combined forming that consists of bulk and sheet forming with double action dies. To analyze the process, finite element simulation has been performed. The proposed technology is applied to hub model that is part of air conditioner clutch. The purpose of this study is to investigate the material now of hub through the relative-velocity control of punch and mandrel using the flow control forming technique.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.203-208
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• 2001

In this paper, a novel dual-type positioning mechanism using a voice coil motor(VCM) and a piezoelectric actuator is proposed for optical disk drive or near-field recording type drive. The VCM is used for a coarse motion actuator and the piezoelectric actuator, "S" configuration deflection motion when voltage applied, is used for a fine motion actuator with self-sensing technique, which allows it to sense and actuate simultaneously in a closed loop frame work. When the VCM rotates and stops, a position feedback control algorithm is adopted to further control residu vibration. The performance of the control scheme is confirmed through simulations and experiments.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.2
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• pp.221-228
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• 2008

This paper presents a new method for world wide network motor controlled system. It uses disturbance observer to present high precision position control algorithm to disturbance change, and to apply this to induction motors. It shows that proposed algorithm is strong in induction motor precision control for disturbance change. This system with disturbance observer used deadbeat control, which have high benefit, is good for quick disturbance compensation. To show these effectiveness the whole process is simulated by simulink, and also experimented by DSP6416 with TCP-IP network board.

• Journal of the Institute of Convergence Signal Processing
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• v.14 no.2
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• pp.130-135
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• 2013

Recently, the needs of system performances such as working speed and processing accuracy in machine tools have been increased. Especially, the working speed increment generates harmful heat at both moving part of the machine tools and handicrafts. The heat is a main drawback to progress accuracy of the processing. Hence, a oil cooler to control temperature is inevitable for the machine tools. In general, two representative control schemes, hot-gas bypass and variable speed control of a compressor, have been adopted in the oil cooler system. In this paper, the compressor's speed are controlled to keep reference value of temperature at oil outlet. The precision processing of a machine tool is required for an oil cooler guaranteeing ${\pm}0.1^{\circ}C$ temperature control. But the oil cooler with precision temperature control is expensive. Therefore in this paper, instead of a on/off(relay) control method, a PID and phase angle electric power control method is proposed for the precision control of an oil cooler. The proposed controller is implemented and tested at the temperature of $23^{\circ}C$, $24^{\circ}C$ and $25^{\circ}C$.

• The Transactions of the Korean Institute of Power Electronics
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• v.4 no.2
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• pp.138-143
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• 1999

A new control method for the precision robust position control of a brushless DC(BLDC) motor for direct drive m motor(BLDDM) system using the asymptotically stable adaptive load torque observer is presented. A precision position c control is obtained for the BLDD motor system appro성mately linearized using the fieldlongrightarroworientation method. Many of t these motor systems have BLDD motor to obtain no backlashes. On the other hand, it has disadvantages such as the h high cost and more complex controller caused by the nonlinear characteristics. And the load torque disturbance is d directly affected to a motor shaft. To r밍ect this problem, stability analysis is calTied out using Lyapunov stability t theorem. Using this results, the stability is proved and load disturbance detected by the asymptotically stable adaptive observer is compensated by feedforwarding the equivalent CUlTent having the fast response.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.10a
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• pp.68-74
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• 2001

This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. We make a study of precision apparatus that is used in the various industrial machine. The study was carried out to develope a precision positioning apparatus, consisting of servo motor and piezoelectric actuator. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometer. In this study, design method and control system with ultra precision position apparatus are researched. As the first step, we have estimated for control performance and system stability before an actual apparatus is manufactured by MATLAB with SIMULINK including various functions those are composed of pre-design and system modeling.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.27-32
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• 2007

Gears, crucial components in modern precision machinery for power transmission mechanisms, are required to have low contacting noise with high torque transmission, which makes the use of gear-tooth profile modifications and gear-tooth surface crowning extremely efficient and valuable. Due to the shortcomings of current techniques, such as manual rectification, mechanical modification, and numerically controlled rectification, we propose a novel electrochemical gear-tooth profile modification method based on an artificial neural network control technique. The fundamentals of electrochemical tooth-profile modifications based on real-time control and a mathematical model of the process are discussed in detail. Due to the complex and uncertain relationships among the machining parameters of electrochemical tooth-profile modification processes, we used an artificial neural network to determine the required processing electric current as the tooth-profile modification requirements were supplied. The system was implemented and a practical example was used to demonstrate that this technology is feasible and has potential applications in the production of precision machinery.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.543-544
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• 2006