• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.530-536
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• 2004

In this paper a servo-system is developed to improve straightness of linear motor stages. When a linear motor stage is used for high-precision linear motion systems, high precision straightness accuracy is necessary to meet the required position accuracy. In such cases, machining and assembling cost increases to improve the straightness accuracy. An electro-magnetic actuator which is relatively cost effective than any other conventional servo-systems is suggested to compensate the fixed straightness error. To overcome the compensation error due to the friction, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performance are illustrated along with some experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.748-754
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• 1994

This paper deals with a geometric error simulator, measurement and inspection of workpiece errors on the machine tools, and identification and compensation methodology of thermal errors in machining centers. In order to raise the machining accuracy of workpieces a measurement and inspection system on the machine tool is developed. By using MPPGT module Manual and CNC type CMMs are realized on the machining centers. To compensate for geometric and thermal deformation errors of machining centers, a real time and an off line geometric adaptive control system were developed on the machining centers. A vertical and a horizontal machining center equipped with FANUC 0MC were used for experiments. Performance of the systems were confirmed with a large amount of experiment.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.10
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• pp.50-57
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• 1997

A fast tool servo (FTS) for diamond turning improves machining accuracy by quickly compensating relative position errors between the cutter and the workpiece. Therefore, the FTS needs to have large band-width with good tracking performance. Serious hysteresis nonlinearity of PZT actuators used in the FTS, however, deteriorates fast tracking performance. Several types of feedforward hysteresis compensators and feedback controllers are tested to improve tracking performance. Through simulations and experiments, control structure which yields the smallest tracking error is selected. The maximum peak to peak error in tracking a sinusoidal waveform is reduced by one fifth compared to that of a regular PID controller.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.209-215
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• 2000

Precision forging technology that can control flow velocity of workpiece have been developed to minimize the amounts of machining. To get the uniform rib length, flow velocity distribution is needed to be estimated and controlled. Computer-aided design is known for very effective to estimate the deformation behavior and design the die for controlling the flow velocity. In this study, die design to control the deformation velocity are investigated using the DEFORM-2D about rib-web shape parts. Also we can get uniform rib length by enforcing the back pressure at end section of rib. The applied load of back pressure farming is lower than that of conventional forging. These results are analysed and confirmed by the experiment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.45-46
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.555-556
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.739-740
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.469-470
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• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.773-774
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• 2007

• International Journal of Control, Automation, and Systems
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• v.1 no.1
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• pp.1-10
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• 2003

This paper presents a high-precision magnetically levitated (maglev) stage to meet demanding motion specifications in the next-generation precision manufacturing and nanotechnology. Characterization of dynamic behaviors of such a motion stage is a crucial task. In this paper, we address the issues related to the stochastic modeling of the stage including transfer function identification, and noise/disturbance analysis and prediction. Provided are test results on precision dynamics, such as fine settling, effect of optical table oscillation, and position ripple. To deal with the dynamic coupling in the platen, we designed and implemented a multivariable linear quadratic regulator, and performed time-optimal control. We demonstrated how the performance of the current maglev stage can be improved with these analyses and experimental results. The maglev stage operates with positioning noise of 5 nm rms in $\chi$ and y, acceleration capabilities in excess of 2g(20 $m/s^2$), and closed-loop crossover frequency of 100 Hz.