• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.314-317
• /
• 2005

As demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. The ultra precision stage wasn't yet applied in the optical alignment and the optical element alignment was taken too many times. In this paper, the optical element alignment of ultra precision positioning stage was studied. The alignment algorithm is comprised of field search and peak search algorithms. The procedure of the alignment algorithms applied to the ultra precision positioning stage are developed by LabView programming.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.12 s.177
• /
• pp.175-183
• /
• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.

• Journal of Institute of Control, Robotics and Systems
• /
• v.15 no.9
• /
• pp.909-915
• /
• 2009

This work is to develop a vision system for high precision alignment between upper and lower plates required at the imprinting process of the large LCD flat panel. We compose a gantry-stage that has highly repeated accuracy for high precision alignment and achieves analysis about thermal transformations of stage itself. Position error in the stage is corrected by feedback control from the analysis. This system can confirm alignment mark of upper and lower plates by using two cameras at a time for the alignment of two plates. Pattern matching that uses geometric feature is proposed to consider the recognition problem for alignment mark of two plates. It is algorithm to correct central point and angle for the alignment from the recognized mark of upper and lower plates based on the special characteristics. At the alignment process, revision for error position is performed through Look and Move techniques.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.06a
• /
• pp.263-264
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.06a
• /
• pp.537-538
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1190-1193
• /
• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the optical alignment characteristics of multi-axis ultra precision stage were studied. The alignment algorithms were studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Two kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, and 1 ch. input vs. 8 ch. output PLC stacks were performed for investigating the alignment characteristics.

• Journal of the Korean Society for Precision Engineering
• /
• v.11 no.1
• /
• pp.150-156
• /
• 1994

To meet the process requirement of semiconductor device manufacturing, it is necessary to improve the alignment accuracy in exposure equipments. We developed the excimer laser stepper and will describe the methodology for alignment measurement and experimental results. Our wafer alignment system consists of off-axis optics, TTL(Through The Lens) optics and high precision stage. Off-axis alignment utilizes the image processing and /or diffraction from thealign marks of off-centered chip area. On the other hand, TTL alignment can be used for the die-by-die alignment using dual beam interferometry. When only off-axis alignment was used, the experimental alignment error(lml+3 .sigma. ) was 0.26-0.29 .mu. m, and will be reduced down to 0.15 .mu. m by adding TTL alignment.

• 제어로봇시스템학회:학술대회논문집
• /
• 1991.10b
• /
• pp.1961-1965
• /
• 1991

This paper deals with an automatic and precision alignment technique for proximity printing in x-ray lithography, using two pairs of moire gratings, with moire signals from each pair being 180.deg. out of phase with each other. We constructed an automatic and precision alignment experimental system which could measure both transmitted moire signals and reflected moire signals at the same time. The automatic alignment was achieved using transmitted moire signals and also reflected moire signals as a control signal for a stage driver. The alignment position of the system was monitored not only by a control signal but also by a non-control signal. The effect of transmitted and reflected moire signals upon alignment accuracy was discussed. We concluded that the technique using diffracted moire signals is a viable automatic and precision alignment technique.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.6 no.3
• /
• pp.53-57
• /
• 2007

This paper presents a geometrical error compensation of tool alignment for B axis controlled machine. In precision machining, tool alignment is crucial parameter for machined surface. To decrease tool alignment error, plus tilted tool from B axis center is touched to reference work piece and checked the deviation from original position. Same process is performed in minus tilt. Comparing these 2 touch positions, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct tool alignment.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.10a
• /
• pp.100-100
• /
• 2003