• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.48 no.11
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• pp.625-631
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• 1999

In this paper, an accurate position control using new estimator which estimates the instantaneous speed and accurate position with a low precision shaft encoder is proposed. The overall performance of position control system is strongly depend on the accuracy of the position information and the performance of the speed controller in low speed range. In this paper the position and speed of the motor are obtained from Kalman filter which is an optimal full order estimator. This estimator has good performance even in very low speed range include standstill. The simulation and experimental results confirm the validity of the proposed estimation and control scheme.

• Journal of Electrical Engineering and Technology
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• v.11 no.4
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• pp.931-938
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• 2016

Application of vector control scheme for consumer products is enlarging to improve control performance. For the field-oriented control, accurate position detection is essential and generally requires expensive sensors. On the other hand, cost-reduction is important in home appliances, so that binary-type Hall-effect sensors are commonly used rather than using an expensive sensor such as an encoder. The control performance is directly influenced by the accuracy of the position information, and there exist non-uniformities related to Hall sensors in electrical and mechanical aspects, which result in distorted position information. Therefore, to get high-precision position information from low-resolution Hall sensors, this paper proposes a new position estimator consisting of a Kalman filter and feedforward compensation scheme, which generates a linearly changing position signal. The efficacy of the proposed scheme is verified by simulation and experimental results carried out with a 48-pole permanent magnet motor.

• KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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• v.11B no.2
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• pp.28-33
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• 2001

The subject of this study is to improve the position performance of the linear motion for hybrid type Linear Pulse Motor (HLPM). Generally, there are two applicable methods to ensure precise position control ; a good processing method. This paper is suggested an electrical 125 microstep driving method so as to achieves the excellent control performance, besides the small mechanical manufacture of teeth pitch. The compensation method of digital PI control is apply to step response of stable position control, step error, vibration suppression and the approach to high stability, and the Ziegler-Nichols tuning method is applied to the proper design of control parameter. The proposed control method has been verified by simulation results of the suitable gain and phase margin of bode plot, and from experiment result of step response.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.530-535
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• 2002

Pneumatic control system has been applied to build many industrial automation systems. But most of them are sequence control type because of their low costs, safety, reliability, etc. Pneumatic servo system is rarely applied to real industrial fields because accurate position control is very difficult due to its nonlinearity and compressibility of air. In pneumatic servo control system, a pneumatic servo valve can be applied, But it is very expensive and has no advantage of low cost compared with a common pneumatic system. This paper is concerned with the accurate position control of a rodless pneumatic cylinder using on/off solenoid valve. A novel Intelligent Modified Pulse Width Modulation(MPWM) is newly proposed. The control performance of this pneumatic cylinder depends on the external loads. To overcome this problem, switching of control parameter using artificial neural network is newly proposed, which estimates external loads on rodless pneumatic cylinder using this training neural network. As an underlying controller, a state feedback controller using position, velocity and acceleration is applied in the switching control the system. The effectiveness of the proposed control algorithms are demonstrated through experiments nth various loads.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.209-218
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• 2001

Ultrasonic motors are newly developed motors which are expected to be useful as actuators in many practical systems such as robot arms or manipulators because of several advantages against the electromagnetic motors. However, the precise control of the ultrasonic motor is generally difficult due to the absence of appropriate and rigorous mathematical model. Furthermore, owing to heavy nonlinearity, the position control of a pendulum system driven by the ultrasonic motor has a problem that control method using multiple neural network controllers based on a fuzzy inference system that can determine the initial position of the pendulum in the beginning of control operation. In addition, and appropriate neural network controller that has been learned to operate well at the corresponding initial position is adopted by switching schemes. The effectiveness of the proposed method was verified and evaluated from real experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1866-1870
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• 2005

Typical small desktop robots have limied application due to their intrinsic feaures like friction, backlash, etc. However, a newly developed small gantry desktop robot needs smaller footprint and shows better performance in position accuracy, velocity, and acceleration. In order to achieve such results, synchronization control of two axes, position compensation methods in plane are suggested.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.10
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• pp.970-977
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• 2007

Absolute position detector which is one of the major equipment in the field of factory automation, not only perceives the absolute position of the rotary machine but also outputs switch data according to the given angle. Absolute position detector is composed of sensor module and its controller. In this paper, a sensor driver is implemented using FPGA with VHDL. This chip has a less form factor than conventional circuit. A test shows reliable precision within THD(total harmonic distortion) of 0.2% which can be applicable commercially. Also, FPGA-based phase error compensation methods were newly discussed. In the future, more research will be conducted to enhance the precision by the introduction of 3-phase transformer.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.1
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• pp.43-48
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• 2003

A linear laser-vision sensor called ‘Perception TriCam Contour' is mounted on an industrial robot and often used for various application of the robot such as the position correction and the inspection of a part. In this paper, a sensor center position calibration is presented for the most accurate use of the robot-Perceptron system. The obtained algorithm is suitable for on-site calibration in an industrial application environment. The calibration algorithm requires the joint sensor readings, and the Perceptron sensor measurements on a specially devised jig which is essential for this calibration process. The algorithm is implemented on the Hyundai 7602 AP robot, and Perceptron's measurement accuracy is increased up to less than 1.4mm.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.161-167
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• 2001

In this study, the control of mounting system for MLGA package was developed using machine vision for the control of rotation position compensation and mounting position of X-Y table. Two types of materials, polymer and alumina, were used for the dielectric insulator of the MLGA. The illumination system and the algorithm of position compensation which is suitable for these materials was developed. We found that the mounting accuracy enough to the degree of${\pm}10{\mu}m$ when MLGA was mounted on the PCB.