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Research on the Multi-electrode Plasma Discharge for the Large Area PECVD Processing

  • Lee, Yun-Seong;You, Dae-Ho;Seol, You-Bin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.478-478
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    • 2012
  • Recently, there are many researches in order to increase the deposition rate (D/R) and improve film uniformity and quality in the deposition of microcrystalline silicon thin film. These two factors are the most important issues in the fabrication of the thin film solar cell, and for the purpose of that, several process conditions, including the large area electrode (more than 1.1 X 1.3 (m2)), higher pressure (1 ~ 10 (Torr)), and very high frequency regime (VHF, 40 ~ 100 (MHz)), have been needed. But, in the case of large-area capacitively coupled discharges (CCP) driven at frequencies higher than the usual RF (13.56 (MHz)) frequency, the standing wave and skin effects should be the critical problems for obtaining the good plasma uniformity, and the ion damage on the thin film layer due to the high voltage between the substrate and the bulk plasma might cause the defects which degrade the film quality. In this study, we will propose the new concept of the large-area multi-electrode (a new multi-electrode concept for the large-area plasma source), which consists of a series of electrodes and grounds arranged by turns. The experimental results with this new electrode showed the processing performances of high D/R (1 ~ 2 (nm/sec)), controllable crystallinity (~70% and controllable), and good uniformity (less than 10%) at the conditions of the relatively high frequency of 40 MHz in the large-area electrode of 280 X 540 mm2. And, we also observed the SEM images of the deposited thin film at the conditions of peeling, normal microcrystalline, and powder formation, and discussed the mechanisms of the crystal formation and voids generation in the film in order to try the enhancement of the film quality compared to the cases of normal VHF capacitive discharges. Also, we will discuss the relation between the processing parameters (including gap length between electrode and substrate, operating pressure) and the processing results (D/R and crystallinity) with the process condition map for ${\mu}c$-Si:H formation at a fixed input power and gas flow rate. Finally, we will discuss the potential of the multi-electrode of the 3.5G-class large-area plasma processing (650 X 550 (mm2) to the possibility of the expansion of the new electrode concept to 8G class large-area plasma processing and the additional issues in order to improve the process efficiency.

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Development of Large-area Plasma Sources for Solar Cell and Display Panel Device Manufacturing

  • Seo, Sang-Hun;Lee, Yun-Seong;Jang, Hong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.148-148
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    • 2011
  • Recently, there have been many research activities to develop the large-area plasma source, which is able to generate the high-density plasma with relatively good uniformity, for the plasma processing in the thin-film solar cell and display panel industries. The large-area CCP sources have been applied to the PECVD process as well as the etching. Especially, the PECVD processes for the depositions of various films such as a-Si:H, ${\mu}c$-Si:H, Si3N4, and SiO2 take a significant portion of processes. In order to achieve higher deposition rate (DR), good uniformity in large-area reactor, and good film quality (low defect density, high film strength, etc.), the application of VHF (>40 MHz) CCP is indispensible. However, the electromagnetic wave effect in the VHF CCP becomes an issue to resolve for the achievement of good uniformity of plasma and film. Here, we propose a new electrode as part of a method to resolve the standing wave effect in the large-area VHF CCP. The electrode is split up a series of strip-type electrodes and the strip-type electrodes and the ground ones are arranged by turns. The standing wave effect in the longitudinal direction of the strip-type electrode is reduced by using the multi-feeding method of VHF power and the uniformity in the transverse direction of the electrodes is achieved by controlling the gas flow and the gap length between the powered electrodes and the substrate. Also, we provide the process results for the growths of the a-Si:H and the ${\mu}c$-Si:H films. The high DR (2.4 nm/s for a-Si:H film and 1.5 nm/s for the ${\mu}c$-Si:H film), the controllable crystallinity (~70%) for the ${\mu}c$-Si:H film, and the relatively good uniformity (1% for a-Si:H film and 7% for the ${\mu}c$-Si:H film) can be obtained at the high frequency of 40 MHz in the large-area discharge (280 mm${\times}$540 mm). Finally, we will discuss the issues in expanding the multi-electrode to the 8G class large-area plasma processing (2.2 m${\times}$2.4 m) and in improving the process efficiency.

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A study on the establishment of domestic criteria through analysis of shield TBM requirements in overseas ITB (Invitation to Bid) (해외 쉴드TBM 입찰안내서 분석을 통한 국내 발주 기준 정립에 관한 연구)

  • Kim, Ki-Hwan;Kim, Hyouk;Mun, Cheol-Hwa;Kim, Young-Hyu;Kim, Dong-Ho;Lee, Jae-Yong
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.19 no.6
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    • pp.985-997
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    • 2017
  • In many countries, most of the tunneling works have been ordered by the shield TBM, and also Korean companies are actively bidding and execute in this project. In case of Korea, refurbished machines are mainly using in power cable, gas pipelines, and water and sewage tunnel. Also in metro projects, shield TBM of over diameter 7m is required mainly by using brand new machine. Since the shield TBM is not easy to change once it is produced, it is necessary for the client to provide sufficient information on the production conditions so as to satisfy various characteristics of the construction. In this study, to manufacturing optimal shield TBM, the Client's TBM requirements of tunnel construction in Hong Kong and UK was analyzed and compared with the domestic requirements. The results are expected to provide as client's guidelines for bidding stage and manufacturing for shield TBM tunneling in Korea in the future.

Flow Analysis indoor Coal Storage Shed due to Wind Velocity and Wind Direction of Ambient Air (외기의 풍속 및 풍향에 따른 옥내저탄장 내부 유동 해석)

  • Kim, Tae-Kwon;Cho, Mok-Lyang;Bae, Young-Wan;Kim, Ji-Won
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.21 no.1
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    • pp.538-545
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    • 2020
  • The outdoor coal storage sheds of thermal power plants are being converted to indoor coal storage sheds worldwide because of the environmental pollution problems in the surrounding areas. On the other hand, indoor coal storage sheds are causing problems, such as indoor coal scattering and harmful gas generation. In this study, the ventilation method of indoor coal storage sheds was analyzed in terms of the internal flow characteristics and ventilation according to the outside wind velocity and direction. CFD analysis was performed based on the actual flow measurement information inside the indoor coal storage sheds. A comparison of the wind speed of 6 m/s and 2 m/s when the outside wind direction was easterly showed that the stream velocity to the monitor louver was faster and the recirculation area was clearer at 6 m/s than at 2 m/s. In addition, the trend of a westerly wind was similar to that of the easterly wind. The ventilation rate according to the wind speed was 13.1 times and 4.4 times for a wind speed of 6 m/s and 2 m/s, respectively. If the wind speed is 2 m/s, the situation does not meet the required number of ventilations per hour in a general plant, and needs to be improved.

Experimental investigation on valve rattle noise of automotive electronic-wastegate turbochargers (차량용 전자식 웨이스트 게이트 터보차져의 밸브 떨림음에 대한 실험적 고찰)

  • Park, Hoil;Eom, Sangbong;Kim, Youngkang;Hwang, Junyoung
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2013.10a
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    • pp.686-686
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    • 2013
  • Automotive turbochargers have become common in gasoline engines as well as diesel engines. They are excellent devices to effectively increase fuel efficiency and power of the engines, but they unfortunately cause several noise problems. The noises are classified into mechanical noises induced from movement of a rotating shaft and aerodynamic noises by air flow in turbochargers. In addition to, there is a mechanical noise caused from movement of an actuator, electronically controlling a wastegate valve. It is called as valve rattle noise. The actuator is connected to a valve through a linkage. The noise occurs only if the valve is open, where the linkage is freely contact to neighbor structures without being constrained by any external forces. This condition allows impacts by the pulsation of exhaust gas, and the vibration from the impacts spreads out through turbine housing, causing the rattle noise. The noise is not in mechanical operating wastegate turbochargers because the linkage of an actuator is strongly connected by actuating force. For the electronic wastegate turbocharger, this paper proposed a test device to show the noise generating mechanism with a small vibration motor having an unbalanced shaft. It also shows how to reduce the noise - reduction of linkage clearances, inserting wave washers into a connection, and applying loose fitting in bushing embracing a valve lever to turbine housing.

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Optimization of anode and electrolyte microstructure for Solid Oxide Fuel Cells (고체산화물 연료전지 연료극 및 전해질 미세구조 최적화)

  • Noh, Jong Hyeok;Myung, Jae-ha
    • Korean Chemical Engineering Research
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    • v.57 no.4
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    • pp.525-530
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    • 2019
  • The performance and stability of solid oxide fuel cells (SOFCs) depend on the microstructure of the electrode and electrolyte. In anode, porosity and pore distribution affect the active site and fuel gas transfer. In an electrolyte, density and thickness determine the ohmic resistance. To optimizing these conditions, using costly method cannot be a suitable research plan for aiming at commercialization. To solve these drawbacks, we made high performance unit cells with low cost and highly efficient ceramic processes. We selected the NiO-YSZ cermet that is a commercial anode material and used facile methods like die pressing and dip coating process. The porosity of anode was controlled by the amount of carbon black (CB) pore former from 10 wt% to 20 wt% and final sintering temperature from $1350^{\circ}C$ to $1450^{\circ}C$. To achieve a dense thin film electrolyte, the thickness and microstructure of electrolyte were controlled by changing the YSZ loading (vol%) of the slurry from 1 vol% to 5 vol. From results, we achieved the 40% porosity that is well known as an optimum value in Ni-YSZ anode, by adding 15wt% of CB and sintering at $1350^{\circ}C$. YSZ electrolyte thickness was controllable from $2{\mu}m$ to $28{\mu}m$ and dense microstructure is formed at 3vol% of YSZ loading via dip coating process. Finally, a unit cell composed of Ni-YSZ anode with 40% porosity, YSZ electrolyte with a $22{\mu}m$ thickness and LSM-YSZ cathode had a maximum power density of $1.426Wcm^{-2}$ at $800^{\circ}C$.

An Optimization Study on a Low-temperature De-NOx Catalyst Coated on Metallic Monolith for Steel Plant Applications (제철소 적용을 위한 저온형 금속지지체 탈질 코팅촉매 최적화 연구)

  • Lee, Chul-Ho;Choi, Jae Hyung;Kim, Myeong Soo;Seo, Byeong Han;Kang, Cheul Hui;Lim, Dong-Ha
    • Clean Technology
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    • v.27 no.4
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    • pp.332-340
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    • 2021
  • With the recent reinforcement of emission standards, it is necessary to make efforts to reduce NOx from air pollutant-emitting workplaces. The NOx reduction method mainly used in industrial facilities is selective catalytic reduction (SCR), and the most commercial SCR catalyst is the ceramic honeycomb catalyst. This study was carried out to reduce the NOx emitted from steel plants by applying De-NOx catalyst coated on metallic monolith. The De-NOx catalyst was synthesized through the optimized coating technique, and the coated catalyst was uniformly and strongly adhered onto the surface of the metallic monolith according to the air jet erosion and bending test. Due to the good thermal conductivity of metallic monolith, the De-NOx catalyst coated on metallic monolith showed good De-NOx efficiency at low temperatures (200 ~ 250 ℃). In addition, the optimal amount of catalyst coating on the metallic monolith surface was confirmed for the design of an economical catalyst. Based on these results, the De-NOx catalyst of commercial grade size was tested in a semi-pilot De-NOx performance facility under a simulated gas similar to the exhaust gas emitted from a steel plant. Even at a low temperature (200 ℃), it showed excellent performance satisfying the emission standard (less than 60 ppm). Therefore, the De-NOx catalyst coated metallic monolith has good physical and chemical properties and showed a good De-NOx efficiency even with the minimum amount of catalyst. Additionally, it was possible to compact and downsize the SCR reactor through the application of a high-density cell. Therefore, we suggest that the proposed De-NOx catalyst coated metallic monolith may be a good alternative De-NOx catalyst for industrial uses such as steel plants, thermal power plants, incineration plants ships, and construction machinery.

S-FDS : a Smart Fire Detection System based on the Integration of Fuzzy Logic and Deep Learning (S-FDS : 퍼지로직과 딥러닝 통합 기반의 스마트 화재감지 시스템)

  • Jang, Jun-Yeong;Lee, Kang-Woon;Kim, Young-Jin;Kim, Won-Tae
    • Journal of the Institute of Electronics and Information Engineers
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    • v.54 no.4
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    • pp.50-58
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    • 2017
  • Recently, some methods of converging heterogeneous fire sensor data have been proposed for effective fire detection, but the rule-based methods have low adaptability and accuracy, and the fuzzy inference methods suffer from detection speed and accuracy by lack of consideration for images. In addition, a few image-based deep learning methods were researched, but it was too difficult to rapidly recognize the fire event in absence of cameras or out of scope of a camera in practical situations. In this paper, we propose a novel fire detection system combining a deep learning algorithm based on CNN and fuzzy inference engine based on heterogeneous fire sensor data including temperature, humidity, gas, and smoke density. we show it is possible for the proposed system to rapidly detect fire by utilizing images and to decide fire in a reliable way by utilizing multi-sensor data. Also, we apply distributed computing architecture to fire detection algorithm in order to avoid concentration of computing power on a server and to enhance scalability as a result. Finally, we prove the performance of the system through two experiments by means of NIST's fire dynamics simulator in both cases of an explosively spreading fire and a gradually growing fire.

A study on the development of simulation program for the small naturally aspirated four-stroke diesel engine (소형 4행정사이클 무과급 디이젤 기관의 성능 시뮤레이션 전산프로그램의 개발에 관한 연구)

  • 백태주;전효중
    • Journal of Advanced Marine Engineering and Technology
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    • v.8 no.1
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    • pp.17-36
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    • 1984
  • Since 1973, the competition on the development of fuel saving type internal combustion engines has become severe by the two times oil shock, and new type engines are reported every several months. Whenever these new type engines are developed, new designs are required and they will be offered in the market after performing the endurance test for a long time. But the engine market is faced with a heavy burden of finance, as the developing of a new engine requires tremendous expenses. For this reason, the computer simulation method has been lately developed to cope with it. The computer simulation method can be available to perform the reasonable research works by the theoretical analysis before carrying out practical experiments. With these processes, the developing expenses are cut down and the period of development is curtailed. The object of this study is the development of simulation computer program for the small naturally aspirated four-stroke diesel engine which is intended to product by the original design of our country. The process of simulation is firstly investigated for the ideal engine cycle, and secondly for the real engine cycle. In the ideal engine cycle, each step of the cycle is simulated by the energy balance according to the first law of thermodynamics, and then the engine performance is calculated. In the real cycle imulation program, the injection rate, the preparation rate and the combustion rate of fuel and the heat transfer through the wall of combustion chamber are considered. In this case, the injection rate is supposed as constant through the crank angle interval of injection and the combustion rate is calculated by the Whitehouse-Way equation and the heat transfer is calculated by the Annand's equation. The simulated values are compared with measured values of the YANMAR NS90(C) engine and Mitsubishi 4D30 engine, and the following conclusions are drawn. 1. The heat loss by the exhaust gas is well agree with each other in the lower load, but the measured value is greater than the calculated value in the higher load. The maximum error rate is about 15% in the full load. 2. The calculated quantity of heat transfer to the cooling water is greater than the measured value. The maximum error rate is about 11.8%. 3. The mean effective pressure, the fuel consumption, the power and the torque are well agree with each other. The maximum error is occurred in the fuel consumption, and its error rate is about 7%. From the above remarks, it may be concluded that the prediction of the engine performance is possibly by using the developed program, although the program needs to reform by adding the simulation of intake and exhaust process and assumping more reliable mechanical efficiency, volumetric efficiency, preparation rate and combustion rate.

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Field Cooling Tests of Paddy Stored in Steel Bins with a Grain Cooler (곡물냉각기를 이용한 철제 원형빈에서 벼 냉각)

  • 김의웅;김동철
    • Food Science and Preservation
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    • v.11 no.2
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    • pp.263-268
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    • 2004
  • Two field cooling tests were conducted to evaluate the cooling characteristic of paddy with a prototype grain cooler. The first test was carried out during summer season in a steel bin with 180.3ton of paddy at Sunchon. And the second test was carried out during harvesting season in a steel bin with 272.2ton of paddy at Ulsan. At the first test, initial paddy temperature of 23.6$^{\circ}C$ was dropped to 14$^{\circ}C$, and initial moisture content of 19.9% was dropped to 19.3% after 52.5 hours of cooling. At the second test, initial paddy temperature of 16.1$^{\circ}C$ dropped to 5.5$^{\circ}C$ after 78.0 hours of cooling. And, at the first test, the average air flow rates of chilled air leaving the grain cooler and penetrating the grain layer were 77.5 ㎥/min and 42.5 ㎥/min, respectively. To prevent leakage of chilled air from plenum chamber of steel bin, which was about 45% of the average air flow rates of chilled air leaving the grain cooler, a proper method was required. The average total power consumption at the first test during summer was 22.1 ㎾ with control of fan damper. At the second test, it was 17.4 ㎾ due to controlling the capacity of compressor with unloading solenoid valve and changing the flow rates of hot refrigerant gas flowing into evaporator and reheater from compressor, resulting in 27% reduction of energy consumption.