• 제목/요약/키워드: Post-chamber

검색결과 136건 처리시간 0.028초

연속 공정으로 형성된 탄탈륨 산화막 및 실리콘 질화막의 이중유전막에 관한 연구 (A Study on the double-layered dielectric films of tantalum oxide and silicon nitride formed by in situ process)

  • 송용진;박주욱;주승기
    • 전자공학회논문지A
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    • 제30A권1호
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    • pp.44-50
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    • 1993
  • In an attempt to improve the electrical characteristics of tantalum pentoxide dielectric film, silicon substrate was reacted with a nitrogen plasma to form a silicon nitride of 50.angs. and then tantalum pentoxide thin films were formed by reactive sputtering in the same chamber. Breakdown field and leakage current density were measured to be 2.9 MV/cm and 9${\times}10^{8}\;A/cm^{2}$ respectively in these films whose thickness was about 180.angs.. With annealing at rectangular waveguides with a slant grid are investigated here. In particular, 900.deg. C in oxygen ambient for 100 minutes, breakdown field and leakage current density were improved to be 4.8 MV/cm and 1.61.6${\times}10^{8}\;A/cm^{2}$ respectively. It turned out that the electrical characteristics could also be improved by oxygen plasma post-treatment and the conduction mechanism at high electric field proved to be Schottky emission in these double-layered films.

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Mixing Characteristics of Kerosene-Lox in a Swirl Injector at 100 bar

  • Heo, Junyoung;Kang, Jeongseok;Sung, Hong-Gye
    • International Journal of Aerospace System Engineering
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    • 제3권1호
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    • pp.30-38
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    • 2016
  • The The turbulent mixing characteristics of Kerosene-LOx in a coaxial swirl injector 100 bar have been numerically investigated. Turbulent model is based on large eddy simulation with real-fluid transport and thermodynamics. The effects of equation of state (EOS), chamber pressure are evaluated in a point of the mixing efficiency and pressure fluctuations. The dominant frequency is same as the hairpin vortex shedding frequency generated by film wave at the LOx post.

Etching characteristics of Al-Nd alloy thin films using magnetized inductively coupled plasma

  • Lee, Y.J.;Han, H.R.;Yeom, G.Y.
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 1999년도 추계학술발표회 초록집
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    • pp.56-56
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    • 1999
  • For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

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하이브리드 로켓의 저주파불안정성에 미치는 당량비 영향 직접수치해석 (Direct Numerical Simulation of Low Frequency Instability in a Hybrid Rocket with Equivalence Ratio Effects)

  • 최효상;이창진;강상훈
    • 한국추진공학회지
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    • 제23권2호
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    • pp.60-67
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    • 2019
  • 하이브리드로켓의 저주파수 연소불안정(LFI) 특성을 이해하기 위해, 주연소실의 연소 당량비 변화가 500 Hz대역의 압력 및 열방출 진동의 위상변화에 미치는 영향에 대해 직접수치해석을 수행하였다. 주연소실의 당량비 변화는 후연소실로 유입되는 연소가스의 온도 및 조성 변화로 모사하였다. 수치해석 결과, 후향 계단 하류에 와류 생성과 함께 추가적인 연소가 나타나며, 와류가 이동함에 따라 연소 압력 및 반응률의 진동이 관찰되었다. 또한, 유입유동의 온도가 변화하면 압력파의 전파속도도 함께 변화하므로 압력 및 반응률 진동 사이의 위상차가 천이하게 됨을 확인하였다.

The role of basolateral amygdala orexin 1 receptors on the modulation of pain and psychosocial deficits in nitroglycerin-induced migraine model in adult male rats

  • Askari-Zahabi, Khadijeh;Abbasnejad, Mehdi;Kooshki, Razieh;Raoof, Maryam;Esmaeili-Mahani, Saeed;Pourrahimi, Ali Mohammad;Zamyad, Mahnaz
    • The Korean Journal of Pain
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    • 제35권1호
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    • pp.22-32
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    • 2022
  • Background: Migraine headaches have been associated with sensory hyperactivity and anomalies in social/emotional responses. The main objective of this study was to evaluate the potential involvement of orexin 1 receptors (Orx1R) within the basolateral amygdala (BLA) in the modulation of pain and psychosocial dysfunction in a nitroglycerin (NTG)-induced rat model of migraine. Methods: Adult male Wistar rats were injected with NTG (5 mg/kg, intraperitoneal) every second day over nine days to induce migraine. The experiments were done in the following six groups (6 rats per group): untreated control, NTG, NTG plus vehicle, and NTG groups that were post-treated with intra-BLA microinjection of Orx1R antagonist SB-334867 (10, 20, and 40 nM). Thermal hyperalgesia was assessed using the hot plate and tail-flick tests. Moreover, the elevated plus maze (EPM) and open field (OF) tests were used to assess anxiety-like behaviors. The animals' sociability was evaluated using the three-chamber social task. The NTG-induced photophobia was assessed using a light-dark box. Results: We observed no change in NTG-induced thermal hyperalgesia following administration of SB-334867 (10, 20, and 40 nM). However, SB-334867 (20 and 40 nM) aggravated the NTG-induced anxiogenic responses in both the EPM and OF tasks. The NTG-induced social impairment was overpowered by SB-334867 at all doses. Time spent in the dark chamber of light-dark box was significantly increased in rats treated with SB-334867 (20 and 40 nM/rat). Conclusions: The findings suggest a role for Orx1R within the BLA in control comorbid affective complaints with migraine in rats.

3D프린팅 산업 및 금속소재 사용시 유해인자 노출 연구 현황 (The Status of 3D Printing Industry and Researches on Exposure to Hazards When Using Metal Materials)

  • 박해동;허이준
    • 대한안전경영과학회지
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    • 제25권1호
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    • pp.7-14
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    • 2023
  • We attempted to provide an overview of the laws and current state of the 3D printing industry in South Korea and around the world, using the annual industry surveys and the Wohler report. Additionally, we reviewed articles relating to the potential exposure to hazards associated with 3D printing using metal materials. In South Korea, there were 406 3D printing-related businesses, employing 2,365 workers, and the market size was estimated at 455.9 billion won in 2021. Globally, the average growth rate of the 3D printing industry market over the past 10 years was 27.4%, and the market size was estimated at $11.8 billion in 2019. The United States had the highest cumulative installation ratio of industrial 3D printers, followed by China, Japan, Germany, and South Korea. A total of 6,168 patents related to 3D printing were registered in the US between 2010 and 2019. Harmful factors during metal 3D printing was mainly evaluated in the powder bed fusion and direct energy deposition printing types, and there is a case of material extrusion type with metal additive filaments. The number, mass, size distribution, and chemical composition of particles were mainly evaluated. Particle concentration increases during the opening of the chamber or post-processing. However, operating the 3D printer in a ventilated chamber can reduce particle concentration to the background level. In order to have a safe and healthy environment for 3D printing, it is necessary to accumulate and apply knowledge through various studies.

과산화수소의 농도와 적용시간이 상아질의 깊이에 따라 레진 수복물의 미세인장결합강도에 미치는 영향 (THE EFFECT OF CONCENTRATION AND APPLICATION TIME OF HYDROGEN PEROXIDE ON THE MICROTENSILE BOND STRENGTH OF RESIN RESTORATIONS TO THE DENTIN AT DIFFERENT DEPTHS)

  • 손정룡;이계영;강유미;오영택;이광원;김태균
    • Restorative Dentistry and Endodontics
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    • 제34권5호
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    • pp.406-414
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    • 2009
  • 본 연구의 목적은 심부 상아질과 치수실 상아질에 $H_2O_2$를 각기 다른 적용시간과 농도로 적용하였을 때, 레진수복물과의 미세인장결합강도에 미치는 영향을 평가하는 것이다. 준비된 각각의 치아에 전형적인 근관와동을 형성하고 다음과 같이 무작위로 1개의 대조군과, 4개의 실험군으로 나누었다: 1군, 전처리를 시행하지 않았다; 2군, 20% $H_2O_2$를 20분, 10분, 5분간 적용하였다; 3군, 10% $H_2O_2$를 20분, 10분, 5분간 적용하였다; 4군 5% $H_2O_2$를 20분, 10분, 5분간 적용하였다; 5군, 2.5% $H_2O_2$를 20분, 10분, 5분간 적용하였다. 위와 같이 처리한 후 와동 내를 Superbond C&B(Sunmedical, Co., Shiga, Japan)로 충전하였다. 각 치아는 $37^{\circ}C$ 증류수에 24시간 저장한 뒤 심부 상아질과 치수실 상아질로 잘라 미세인장결합강도 시험을 시행하였다. 각 군에서 측정된 미세인장결합강도를 3-way ANOVA와 Tukey post hoc test로 통계 처리하였다(p < 0.05). 실험 결과 모든 군에서 심부 상아질(D1)의 미세인장 결합강도가 치수실 상아질(D2)보다 높게 나타났다. 평균 결합강도는 $H_2O_2$의 농도와 적용 시간이 증가할수록 감소하였다. 통계분석에서 상아질의 깊이, $H_2O_2$ 농도와 적용 시간이라는 세 가지 변수간의 교호작용 효과는 없으나(p > 0.05). 상아질의 깊이와 $H_2O_2$ 농도 사이, $H_2O_2$ 농도와 적용 시간 사이에서는 교호작용 효과가 있었다(p < 0.05). SEM 관찰에서는 $H_2O_2$의 농도가 증가할수록 상아세관이 좀 더 개방된 양상을 보였다.

조리실내의 유해오염물질 제거율에 관한 연구 (A Study on the Removal Efficiency of Harmful Pollutants in the Cooking Chamber)

  • 권우택;이우식
    • 한국조리학회지
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    • 제22권8호
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    • pp.149-156
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    • 2016
  • 본 연구의 목적은 조리과정에서 발생한 총휘발성 유기화합물질, 미세먼지, 악취, 총부유세균 등의 오염물질들이 조리실내로 분산되어 실내공간이나 조리업 종사자에게는 나쁜 냄새나 작업환경 및 건강피해를 감소하고자 하는 것이다. 이를 위해 기존 공기청정기의 단점을 보완하고, 반영구적이며, 각종 오염물질을 효율적으로 제거하기 위하여 활성탄과 황토를 결합한 바이오세라믹 필터를 bar type으로 제작한 실내용 소형 공기청정기 개발에 중점을 두었다. 측정항목은 총휘발성 유기화합물, 미세먼지, 복합악취, 총부유세균 등 모두 4가지 항목으로 개발된 공기청정기 가동 전과 일정시간 가동 후를 비교하여 측정하였다. 측정결과, 총휘발성 유기화합물의 농도는 평균 $2,500{\mu}g/m^3$에서 $223{\mu}g/m^3$으로 약 91.02%의 높은 제거효율을 보였으며, 미세먼지의 제거율은 평균 농도가 $26.68{\mu}g/m^3$로서 97.51%의 우수한 제거효과가 나타났으며, 복합악취의 희석배수를 측정한 결과 평균 144로 평균 95.20% 감소하였다. 또 총부유세균은 초기 농도가 $787{\sim}814CFU/m^3$에서 $47{\sim}40CFU/m^3$로 약 94% 이상 제거되는 것을 확인하였다. 결론적으로 개발되어진 공기청정기의 바이오세라믹 필터는 오염물질을 제거하는데 우수한 제거효과를 나타냈다. 따라서 공기청정기를 조리실내에서 환기장치와 렌지후드를 병행하여 사용하면 기존의 열악한 조리실 내의 환경이 크게 개선되어질 것으로 사료된다.

높은 표면적을 갖는 SnO 나노구조물의 열처리 효과에 관한 연구 (A Study on the Annealing Effect of SnO Nanostructures with High Surface Area)

  • 김종일;김기출
    • 한국산학기술학회논문지
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    • 제19권9호
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    • pp.536-542
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    • 2018
  • 이산화주석은 Rutile 구조를 갖는 Oxygen-Deficient n-type 반도체 물질로서, $H_2$, CO, $CO_2$ 등의 가스 분자가 표면에 흡착되면 전기저항이 변하는 특성을 가지고 있고, 이러한 성질을 활용하면 다양한 가스의 감지가 가능하기 때문에 가스센서로 연구가 활발히 이루어지고 있다. 나노구조물의 경우 Bulk 상태보다 체적 대비 표면적비가 높기 때문에 기체의 흡착이 유리하고, 가스 센서의 성능이 향상될 수 있다. 본 연구에서는 Thermal CVD 공정을 이용하여 SnO Nanoplatelet을 Si 기판위에 Dense하게 성장시켰다. 기상 수송 방법(Vapor Transport Method)으로 성장된 SnO 나노구조물을 Thermal CVD System을 이용하여 산소분위기에서 $830^{\circ}C$$1030^{\circ}C$에서 열처리(Post-Annealing)하여 $SnO_2$ 상(Phase)을 갖도록 하였다. 열처리 과정동안 쳄버의 압력을 4.2 Torr로 일정하게 유지시켰다. 열처리 된 SnO 나노구조물의 결정학적 특성을 Raman Spectroscopy 및 XRD 분석을 통하여 확인하였고, 형태학적 변화를 주사전사현미경(Scanning Electron Microscopy)을 통하여 확인하였다. 분석결과 SnO 나노구조물은 열처리 과정을 통하여 $SnO_2$ 나노구조물로 상변환 되었다.

볼락 Sebastes inermis 치어의 암모니아 배설에 미치는 수온의 영향 (Effect of Water Temperature on Ammonia Excretion of Juvenile Dark-banded Rockfish Sebastes inermis)

  • 오승용;최상준
    • Ocean and Polar Research
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    • 제31권3호
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    • pp.231-238
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    • 2009
  • A study was carried out to investigate the effect of water temperature on daily pattern and rate of total ammonia nitrogen (TAN) excretion in juvenile dark-banded rockfish Sebastes inermis (mean body weight: $14.8{\pm}0.3g$) under fasting and feeding conditions. Fish were acclimated over 10 days under three different water temperatures (15, 20 and $25^{\circ}C$). After 72 hours of starvation, fasting TAN excretion was measured at each temperature. To investigate post-prandial TAN excretion, fish were hand-fed with a commercial diet containing 47.7% crude protein for 7 days, two times daily at 09:00 and 17:00 hr. Water was sampled from both the inlet and outlet of each chamber every 2 hrs over a 24 hr period. Both fasting and post-prandial TAN excretion increased with increase in water temperature (P<0.05). Mean fasting TAN excretion rates at 15, 20 and $25^{\circ}C$ were 8.1, 9.0 and 9.2 mg TAN kg $fish^{-1}h^{-1}$, respectively. The value of $15^{\circ}C$ was lower than those of 20 and $25^{\circ}C$ (P<0.05), but there was no significant difference between $20^{\circ}C$ and $25^{\circ}C$ (P>0.05). Mean post-prandial TAN excretion rates at 15, 20 and $25^{\circ}C$ were 20.1, 22.9 and 23.4 mg TAN kg $fish^{-1}h^{-1}$, respectively. A peak post-prandial TAN excretion rate occurred after 12 hrs from the first feeding at $15^{\circ}C$ (mean 28.7 mg TAN kg $fish^{-1}h^{-1}$), $20^{\circ}C$ (33.7 mg TAN kg $fish^{-1}h{-1}$) and $25^{\circ}C$ (36.8 mg TAN kg $fish^{-1}h{-1}$), respectively. The TAN loss for ingested nitrogen at $15^{\circ}C$ (36.2%) was lower than that of $20^{\circ}C$ (40.8%) and $25^{\circ}C$ (41.7%). Based on overall results, water temperature exerts a profound influence on the nitrogen metabolism of juvenile dark-banded rockfish.