• Title/Summary/Keyword: Post Chamber

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A Study on the double-layered dielectric films of tantalum oxide and silicon nitride formed by in situ process (연속 공정으로 형성된 탄탈륨 산화막 및 실리콘 질화막의 이중유전막에 관한 연구)

  • 송용진;박주욱;주승기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.1
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    • pp.44-50
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    • 1993
  • In an attempt to improve the electrical characteristics of tantalum pentoxide dielectric film, silicon substrate was reacted with a nitrogen plasma to form a silicon nitride of 50.angs. and then tantalum pentoxide thin films were formed by reactive sputtering in the same chamber. Breakdown field and leakage current density were measured to be 2.9 MV/cm and 9${\times}10^{8}\;A/cm^{2}$ respectively in these films whose thickness was about 180.angs.. With annealing at rectangular waveguides with a slant grid are investigated here. In particular, 900.deg. C in oxygen ambient for 100 minutes, breakdown field and leakage current density were improved to be 4.8 MV/cm and 1.61.6${\times}10^{8}\;A/cm^{2}$ respectively. It turned out that the electrical characteristics could also be improved by oxygen plasma post-treatment and the conduction mechanism at high electric field proved to be Schottky emission in these double-layered films.

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Mixing Characteristics of Kerosene-Lox in a Swirl Injector at 100 bar

  • Heo, Junyoung;Kang, Jeongseok;Sung, Hong-Gye
    • International Journal of Aerospace System Engineering
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    • v.3 no.1
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    • pp.30-38
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    • 2016
  • The The turbulent mixing characteristics of Kerosene-LOx in a coaxial swirl injector 100 bar have been numerically investigated. Turbulent model is based on large eddy simulation with real-fluid transport and thermodynamics. The effects of equation of state (EOS), chamber pressure are evaluated in a point of the mixing efficiency and pressure fluctuations. The dominant frequency is same as the hairpin vortex shedding frequency generated by film wave at the LOx post.

Etching characteristics of Al-Nd alloy thin films using magnetized inductively coupled plasma

  • Lee, Y.J.;Han, H.R.;Yeom, G.Y.
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 1999.10a
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    • pp.56-56
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    • 1999
  • For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

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Direct Numerical Simulation of Low Frequency Instability in a Hybrid Rocket with Equivalence Ratio Effects (하이브리드 로켓의 저주파불안정성에 미치는 당량비 영향 직접수치해석)

  • Choi, Hyosang;Lee, Changjin;Kang, Sang Hun
    • Journal of the Korean Society of Propulsion Engineers
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    • v.23 no.2
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    • pp.60-67
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    • 2019
  • To understand the low frequency instability(LFI) characteristics in hybrid rockets combustion, effects of equivalence ratio variations on the phase shift between pressure and heat release oscillations were investigated by using the direct numerical simulation. The change in the equivalence ratio of the main chamber was simulated by the temperature and composition variation of the combustion gas introduced into the post-combustion chamber. In the results, additional combustion appeared along with vortex generation at the backward step, and combustion pressure and heat release oscillations were observed as the vortex moved. In addition, the results confirmed that the phase difference between the pressure and heat release oscillation shifts because of the changes in the propagation velocity of pressure wave as the temperature of combustion gas changes.

The role of basolateral amygdala orexin 1 receptors on the modulation of pain and psychosocial deficits in nitroglycerin-induced migraine model in adult male rats

  • Askari-Zahabi, Khadijeh;Abbasnejad, Mehdi;Kooshki, Razieh;Raoof, Maryam;Esmaeili-Mahani, Saeed;Pourrahimi, Ali Mohammad;Zamyad, Mahnaz
    • The Korean Journal of Pain
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    • v.35 no.1
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    • pp.22-32
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    • 2022
  • Background: Migraine headaches have been associated with sensory hyperactivity and anomalies in social/emotional responses. The main objective of this study was to evaluate the potential involvement of orexin 1 receptors (Orx1R) within the basolateral amygdala (BLA) in the modulation of pain and psychosocial dysfunction in a nitroglycerin (NTG)-induced rat model of migraine. Methods: Adult male Wistar rats were injected with NTG (5 mg/kg, intraperitoneal) every second day over nine days to induce migraine. The experiments were done in the following six groups (6 rats per group): untreated control, NTG, NTG plus vehicle, and NTG groups that were post-treated with intra-BLA microinjection of Orx1R antagonist SB-334867 (10, 20, and 40 nM). Thermal hyperalgesia was assessed using the hot plate and tail-flick tests. Moreover, the elevated plus maze (EPM) and open field (OF) tests were used to assess anxiety-like behaviors. The animals' sociability was evaluated using the three-chamber social task. The NTG-induced photophobia was assessed using a light-dark box. Results: We observed no change in NTG-induced thermal hyperalgesia following administration of SB-334867 (10, 20, and 40 nM). However, SB-334867 (20 and 40 nM) aggravated the NTG-induced anxiogenic responses in both the EPM and OF tasks. The NTG-induced social impairment was overpowered by SB-334867 at all doses. Time spent in the dark chamber of light-dark box was significantly increased in rats treated with SB-334867 (20 and 40 nM/rat). Conclusions: The findings suggest a role for Orx1R within the BLA in control comorbid affective complaints with migraine in rats.

The Status of 3D Printing Industry and Researches on Exposure to Hazards When Using Metal Materials (3D프린팅 산업 및 금속소재 사용시 유해인자 노출 연구 현황)

  • Hae Dong Park;Leejun HUH
    • Journal of the Korea Safety Management & Science
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    • v.25 no.1
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    • pp.7-14
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    • 2023
  • We attempted to provide an overview of the laws and current state of the 3D printing industry in South Korea and around the world, using the annual industry surveys and the Wohler report. Additionally, we reviewed articles relating to the potential exposure to hazards associated with 3D printing using metal materials. In South Korea, there were 406 3D printing-related businesses, employing 2,365 workers, and the market size was estimated at 455.9 billion won in 2021. Globally, the average growth rate of the 3D printing industry market over the past 10 years was 27.4%, and the market size was estimated at $11.8 billion in 2019. The United States had the highest cumulative installation ratio of industrial 3D printers, followed by China, Japan, Germany, and South Korea. A total of 6,168 patents related to 3D printing were registered in the US between 2010 and 2019. Harmful factors during metal 3D printing was mainly evaluated in the powder bed fusion and direct energy deposition printing types, and there is a case of material extrusion type with metal additive filaments. The number, mass, size distribution, and chemical composition of particles were mainly evaluated. Particle concentration increases during the opening of the chamber or post-processing. However, operating the 3D printer in a ventilated chamber can reduce particle concentration to the background level. In order to have a safe and healthy environment for 3D printing, it is necessary to accumulate and apply knowledge through various studies.

THE EFFECT OF CONCENTRATION AND APPLICATION TIME OF HYDROGEN PEROXIDE ON THE MICROTENSILE BOND STRENGTH OF RESIN RESTORATIONS TO THE DENTIN AT DIFFERENT DEPTHS (과산화수소의 농도와 적용시간이 상아질의 깊이에 따라 레진 수복물의 미세인장결합강도에 미치는 영향)

  • Son, Jeong-Lyong;Lee, Gye-Young;Kang, Yu-Mi;Oh, Young-Taek;Lee, Kwang-Won;Kim, Tae-Gun
    • Restorative Dentistry and Endodontics
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    • v.34 no.5
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    • pp.406-414
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    • 2009
  • The purpose of this study was to examine the effect of hydrogen peroxide at different application time and concentrations on the microtensile bond strength of resin restorations to the deep and the pulp chamber dentin. A conventional endodontic access cavity was prepared in each tooth, and then the teeth were randomly divided into 1 control group and 4 experimental groups as follows: Group 1, non treated; Group 2, with 20% Hydrogen peroxide ($H_2O_2$); Group 3, with 10% $H_2O_2$; Group 4, with 5% $H_2O_2$; Group 5, with 2.5% $H_2O_2$; the teeth of all groups except group 1 were treated for 20, 10, and 5min. The treated teeth were filled using a Superbond C&B (Sun medical Co., Shiga, Japan). Thereafter, the specimens were stored in distilled water at $37^{\circ}C$ for 24-hours and then sectioned into the deep and the chamber dentin. The microtensile bond strength values of each group were analyzed by 3-way ANOVA and Tukey post hoc test(p < 0.05). In this study, the microtensile bond strength of the deep dentin (D1) was significantly greater than that of the pulp chamber dentin (D2) in the all groups tested. The average of microtensile bond strength was decreased as the concentration and the application time of $H_2O_2$ were increased. Analysis showed significant correlation effect not only between the depth of the dentin and the concentration of $H_2O_2$ but also between the concentration of H202 and the application time(p < 0.05), while no significant difference existed among these three variables(p > 0.05). The higher $H_2O_2$ concentration, the more opened dentinal tubules under a scanning electron microscope(SEM) examination.

A Study on the Removal Efficiency of Harmful Pollutants in the Cooking Chamber (조리실내의 유해오염물질 제거율에 관한 연구)

  • Kwon, Woo-Taeg;Lee, Woo-Sik
    • Culinary science and hospitality research
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    • v.22 no.8
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    • pp.149-156
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    • 2016
  • The purpose of this study is to reduce the contaminants (total volatile organic compounds (TVOCs), fine particle, odor and total airborne bacteria) during cooking process in cooking chamber, and to decrease the health damage in indoor space that has bad work environment. In order to solve the shortcomings of existing air purifiers and remove all kinds of pollutants effectively, this study focused on the development of indoor air purifiers which are made of bar type. Bio-ceramics filter which combines activated carbon and loess. The air cleaners developed with 4 measuring items including TVOCs, particulate matter, complex odor and total airborne bacteria were measured comparing their pre-service test to their post-service test after a period of time. The measured results showed higher removal efficiency of 91.02% as the concentration of TVOCs was reduced from $2,500{\mu}g/m^3$ to $223{\mu}g/m^3$. Second, the particulate matter removal ratio was 97.51% efficient with average concentration of $26.68{\mu}g/m^3$. Third, the odor showed 95.20% reduction as air dilution ratio averaged out at 144. Last, total airborne bacteria was eliminated by over 94% showing the changeable concentration from $787{\sim}814CFU/m^3$ to $47{\sim}40CFU/m^3$. In addition, the removal rate of harmful pollutants is excellent, and it is expected that the environment of the existing poor cooking room will be greatly improved by using the developed air purifier in combination with the ventilation device and the stove hood.

A Study on the Annealing Effect of SnO Nanostructures with High Surface Area (높은 표면적을 갖는 SnO 나노구조물의 열처리 효과에 관한 연구)

  • Kim, Jong-Il;Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.9
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    • pp.536-542
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    • 2018
  • Tin dioxide, $SnO_2$, is a well-known n-type semiconductor that shows change in resistance in the presence of gas molecules, such as $H_2$, CO, and $CO_2$. Considerable research has been done on $SnO_2$ semiconductors for gas sensor applications due to their noble property. The nanomaterials exhibit a high surface to volume ratio, which means it has an advantage in the sensing of gas molecules. In this study, SnO nanoplatelets were grown densely on Si substrates using a thermal CVD process. The SnO nanostructures grown by the vapor transport method were post annealed to a $SnO_2$ phase by thermal CVD in an oxygen atmosphere at $830^{\circ}C$ and $1030^{\circ}C$. The pressure of the furnace chamber was maintained at 4.2 Torr. The crystallographic properties of the post-annealed SnO nanostructures were investigated by Raman spectroscopy and XRD. The change in morphology was confirmed by scanning electron microscopy. As a result, the SnO nanostructures were transformed to a $SnO_2$ phase by a post-annealing process.

Effect of Water Temperature on Ammonia Excretion of Juvenile Dark-banded Rockfish Sebastes inermis (볼락 Sebastes inermis 치어의 암모니아 배설에 미치는 수온의 영향)

  • Oh, Sung-Yong;Choi, Sang-Jun
    • Ocean and Polar Research
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    • v.31 no.3
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    • pp.231-238
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    • 2009
  • A study was carried out to investigate the effect of water temperature on daily pattern and rate of total ammonia nitrogen (TAN) excretion in juvenile dark-banded rockfish Sebastes inermis (mean body weight: $14.8{\pm}0.3g$) under fasting and feeding conditions. Fish were acclimated over 10 days under three different water temperatures (15, 20 and $25^{\circ}C$). After 72 hours of starvation, fasting TAN excretion was measured at each temperature. To investigate post-prandial TAN excretion, fish were hand-fed with a commercial diet containing 47.7% crude protein for 7 days, two times daily at 09:00 and 17:00 hr. Water was sampled from both the inlet and outlet of each chamber every 2 hrs over a 24 hr period. Both fasting and post-prandial TAN excretion increased with increase in water temperature (P<0.05). Mean fasting TAN excretion rates at 15, 20 and $25^{\circ}C$ were 8.1, 9.0 and 9.2 mg TAN kg $fish^{-1}h^{-1}$, respectively. The value of $15^{\circ}C$ was lower than those of 20 and $25^{\circ}C$ (P<0.05), but there was no significant difference between $20^{\circ}C$ and $25^{\circ}C$ (P>0.05). Mean post-prandial TAN excretion rates at 15, 20 and $25^{\circ}C$ were 20.1, 22.9 and 23.4 mg TAN kg $fish^{-1}h^{-1}$, respectively. A peak post-prandial TAN excretion rate occurred after 12 hrs from the first feeding at $15^{\circ}C$ (mean 28.7 mg TAN kg $fish^{-1}h^{-1}$), $20^{\circ}C$ (33.7 mg TAN kg $fish^{-1}h{-1}$) and $25^{\circ}C$ (36.8 mg TAN kg $fish^{-1}h{-1}$), respectively. The TAN loss for ingested nitrogen at $15^{\circ}C$ (36.2%) was lower than that of $20^{\circ}C$ (40.8%) and $25^{\circ}C$ (41.7%). Based on overall results, water temperature exerts a profound influence on the nitrogen metabolism of juvenile dark-banded rockfish.