Electrochemical Etching of Silicon in Porous Silicon Layer Transfer Process for Thin Film Solar Cell Fabrication (초박형 태양전지의 Porous Si Layer Transfer 기술 적용을 위한 전기화학적 실리콘 에칭)
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- Journal of the Microelectronics and Packaging Society
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- v.16 no.4
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- pp.55-60
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- 2009