• ETRI Journal
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• 제26권3호
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• pp.281-284
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• 2004

We demonstrate a new fabrication method for adjusting the temperature dependence of a polymeric arrayed-waveguide grating (AWG) on a Si substrate. A temperature-dependent wavelength shift of-0.1nm/$^{\circ}C$ in a polymeric AWG on a Si substrate is reduced of+0.1nm/$^{\circ}C$ by detaching part of the polymer film, including the grating channel region of the AWG, from the Si substrate while the other parts remain fixed on the substrate.

• Macromolecular Research
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• 제12권5호
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• pp.437-442
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• 2004

We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.

• 대한기계학회논문집A
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• 제27권6호
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• pp.997-1006
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• 2003

LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

• ETRI Journal
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• 제18권4호
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• pp.287-299
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• 1997

Integrated-optic polarization controlling devices such as polarizers, polarization splitters, and polarization converters, are proposed and demonstrated in nonlinear optic polymers. Poling-induced birefringence in electro-optic polymers is exploited to fabricate the devices. The polymeric waveguide polarizers show low excess losses, and extinction ratios of 20.7 dB and 17.1 dB for TM-pass and TE-pass polarizers, respectively. The polymeric waveguide polarization splitters exhibit TE-TM mode splittings with crosstalk of 14.2 dB and 10.1 dB for TM and TE mode splittings, respectively. The polymeric waveguide polarization converters show successful TE/TM polarization mode conversion with conversion efficiencies of higher than 30 dB. The device employs poling-induced waveguides which have slowly rotating azimuth angle of optic axis along the light propagation direction. The novel polarization converter is insensitive to wavelength and easier to fabricate than the other polarization converters containing periodic structures.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.945-949
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• 2003

LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

• Current Optics and Photonics
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• 제3권5호
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• pp.401-407
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• 2019

Polymeric optical waveguide devices with Bragg gratings have been investigated, for implementing tunable lasers and wavelength filters used in wavelength-division-multiplexed optical communication systems. Owing to the excellent thermo-optic effect of these polymers, wavelength tuning is possible over a wide range, which is difficult to achieve using other optical materials. In this study the phase-mask technology, which has advantages over the conventional interferometeric method, was introduced to facilitate the fabrication of Bragg gratings in polymeric optical waveguide devices. An optical setup capable of fabricating multiple Bragg gratings simultaneously on a 4-inch silicon wafer was constructed, using a 442-nm laser and phase mask. During fabrication, some of the diffracted light in the phase mask was totally reflected inside the mask, which affected the quality of the Bragg grating adversely, so experiments were conducted to solve this issue. To verify grating uniformity, two types of wavelength-filtering devices were fabricated using the phase-mask lithography, and their reflection and transmission spectra were measured. From the results, we confirmed that the phase-mask method provides good uniformity, and may be applied for mass production of polymer Bragg-grating waveguide devices.

• 마이크로전자및패키징학회지
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• 제22권3호
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• pp.73-77
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• 2015

본 논문에서는 저가로 쉽게 제작할 수 있는 구조를 지닌 단일칩 형태의 고분자 기반 평판형 분광모듈을 제안하였다. 제안된 분광모듈은 UV 임프린트 기법에 의해 제작되어진 비등간격 나노회절격자와 오목거울이 포함된 평판형 광도파로로 구성되어진다. 회절효율을 향상시키기 위해 나노회절격자의 구조는 $25^{\circ}$의 블레이징 각도와 100nm의 선폭을 가지도록 설계, 제작되었다. 평판형 분광모듈은 700 nm 대역폭과 10 nm 분해능을 가짐을 확인하였다. 이러한 집적형 고분자 분광모듈은 다양한 센서 시스템에 적용될 수 있을 것으로 기대된다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.247-251
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• 1998

This work presents the analysis of $1\times2$ polymer waveguide thermo-optic switch using asymmetric Y-splitter at the wavelength of 1300nm. Because of the high thermo-optic coefficient of polymeric materials the design of efficient switches were feasible. For the numerical simulation of these switches the finite difference beam propagation method has been employed. Design rules for a $1\times2$ polymeric switch have been defined by using the numerical techniques.

• 한국광학회:학술대회논문집
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• 한국광학회 1996년도 Advance Program of 13th optics andquantum Electronics conference, 1996제13 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.86-86
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• 1996

• 한국광학회지
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• 제17권1호
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• pp.54-59
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• 2006

본 논문에서는 집적 광학 광도파로 소자 기술을 적용하여 생화학 물질의 성분을 정밀하게 측정 가능한 광소자로서 폴리머 광도파로와 브래그 격자를 이용하는 구조를 최초로 제안하였다. 유효굴절률법과 전송행렬법을 이용하여 최적의 감도를 가지는 브래그 격자 광도파로를 설계하였으며 코아와 하부 클래딩의 굴절률이 각각 1.540, 1.430인 폴리머를 이용하여 코아 두께가 $3{\mu}m$ 인 구조의 반전립 광도파로를 제작하였다. 코아 층까지 완성된 도파로 위에 레이저 빔 간섭계와 플라즈마 에칭을 이용하여 격자를 형성한 뒤 격자표면에 20 nm 두께의 Au층을 증착하고 칼릭사린(calixarene) 단분자층을 만들어 바이오센서를 제작하였다. 제작된 광센서를 이용하여 PBS(phosphate bufferedsaline) 용액에 함유된 $K^+$의 농도에 따라 브래그 반사픽이 단파장으로 이동하는 것을 관찰할 수 있었다.