• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.27 no.6
• /
• pp.997-1006
• /
• 2003

LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.945-949
• /
• 2003

LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

• Current Optics and Photonics
• /
• v.3 no.5
• /
• pp.401-407
• /
• 2019

Polymeric optical waveguide devices with Bragg gratings have been investigated, for implementing tunable lasers and wavelength filters used in wavelength-division-multiplexed optical communication systems. Owing to the excellent thermo-optic effect of these polymers, wavelength tuning is possible over a wide range, which is difficult to achieve using other optical materials. In this study the phase-mask technology, which has advantages over the conventional interferometeric method, was introduced to facilitate the fabrication of Bragg gratings in polymeric optical waveguide devices. An optical setup capable of fabricating multiple Bragg gratings simultaneously on a 4-inch silicon wafer was constructed, using a 442-nm laser and phase mask. During fabrication, some of the diffracted light in the phase mask was totally reflected inside the mask, which affected the quality of the Bragg grating adversely, so experiments were conducted to solve this issue. To verify grating uniformity, two types of wavelength-filtering devices were fabricated using the phase-mask lithography, and their reflection and transmission spectra were measured. From the results, we confirmed that the phase-mask method provides good uniformity, and may be applied for mass production of polymer Bragg-grating waveguide devices.

• Macromolecular Research
• /
• v.12 no.5
• /
• pp.437-442
• /
• 2004

We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.

• Proceedings of the Optical Society of Korea Conference
• /
• 1996.09a
• /
• pp.86-86
• /
• 1996

• Korean Journal of Optics and Photonics
• /
• v.32 no.4
• /
• pp.180-186
• /
• 2021

Fluorinated polyimide has excellent light transmittance and a high optical refractive index, and is useful for producing optical-waveguide phase modulators with low optical loss and low electric power consumption. In this work, an optical-waveguide phase modulator is designed and fabricated based on a high-refractive-index fluorinated polyimide, and its characteristics are measured. An efficient protocol for characterizing the loss components of the optical waveguide is proposed, and the propagation loss of the fabricated polyimide optical waveguide is confirmed to be 0.9 dB/cm. The phase modulator requires 9.1 mW of power for phase change of π, and the response time is 290 μs, which is improved by tenfold compared to a previous demonstration of polymeric phase modulators.

• Journal of the Microelectronics and Packaging Society
• /
• v.22 no.3
• /
• pp.73-77
• /
• 2015

This paper presents integrated polymeric spectrometer module which offers compact size, easily-fabricated structure and low cost. The proposed spectrometer module includes the nano diffraction grating with non-uniform pitch and planar optical waveguide with concave mirror to be fabricated by UV imprint lithography. To increase the reflection efficiency, we designed the nano diffraction grating with triangular profiles. The polymeric planar spectrometer includes a spectral bandwidth of 700 nm, resolution of 10 nm and precision below 5 nm. This polymeric planar spectrometer is well-suited for sensor system.

• Korean Journal of Optics and Photonics
• /
• v.13 no.3
• /
• pp.223-227
• /
• 2002

Polymeric multi-mode optical waveguides were fabricated for parallel optical interconnection. Waveguide structures were molded by a Ni mold master using a hot embossing technique. The Ni mold master was manufactured by LIGA process. Multimode optical waveguides with a 48$\times$47 ${\mu}{\textrm}{m}$$^2$cross-section were produced by a simple two-step process. The propagation losses of the multimode waveguide measured at 0.85 ${\mu}{\textrm}{m}$ and 1.3 ${\mu}{\textrm}{m}$ wavelengths were 0.38 dB/cm and 0.66 dB/cm, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.111-114
• /
• 2002

We propose and fabricate a vertically integrated waveguide thermo-optic switch. It controls the optical path between two vertically stacked waveguide. As a first step, we fabricate polymeric waveguides. The measured propagation loss is ranged from 0.3 db/cm to 0.4 dB/cm at the wavelength of 1.55 $\mu\textrm{m}$. We fabricate the proposed vertically integrated waveguide thermo-optic switch to demonstrate its preliminary feasibility. The measured crosstalk is better than -10 db. The power consumption is about 500 mW. Further effort is necessary to improve its performance.

• Polymer Science and Technology
• /
• v.18 no.2
• /
• pp.167-172
• /
• 2007