• 대한기계학회논문집A
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• 제27권6호
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• pp.997-1006
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• 2003

LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.945-949
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• 2003

LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

• Current Optics and Photonics
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• 제3권5호
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• pp.401-407
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• 2019

Polymeric optical waveguide devices with Bragg gratings have been investigated, for implementing tunable lasers and wavelength filters used in wavelength-division-multiplexed optical communication systems. Owing to the excellent thermo-optic effect of these polymers, wavelength tuning is possible over a wide range, which is difficult to achieve using other optical materials. In this study the phase-mask technology, which has advantages over the conventional interferometeric method, was introduced to facilitate the fabrication of Bragg gratings in polymeric optical waveguide devices. An optical setup capable of fabricating multiple Bragg gratings simultaneously on a 4-inch silicon wafer was constructed, using a 442-nm laser and phase mask. During fabrication, some of the diffracted light in the phase mask was totally reflected inside the mask, which affected the quality of the Bragg grating adversely, so experiments were conducted to solve this issue. To verify grating uniformity, two types of wavelength-filtering devices were fabricated using the phase-mask lithography, and their reflection and transmission spectra were measured. From the results, we confirmed that the phase-mask method provides good uniformity, and may be applied for mass production of polymer Bragg-grating waveguide devices.

• Macromolecular Research
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• 제12권5호
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• pp.437-442
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• 2004

We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.

• 한국광학회:학술대회논문집
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• 한국광학회 1996년도 Advance Program of 13th optics andquantum Electronics conference, 1996제13 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.86-86
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• 1996

• 한국광학회지
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• 제32권4호
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• pp.180-186
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• 2021

불화폴리이미드는 우수한 광투과율과 광학적 굴절률이 높은 특징을 가지며 이를 이용하여 제작된 폴리머 광도파로 위상변조기는 광손실이 작고 저전력으로 안정적인 위상제어가 가능하게 된다. 본 논문에서는 고굴절률 불화폴리이미드를 이용하여 광도파로 위상변조기를 설계하고 제작하여 특성을 분석하였다. 광도파로를 제작하여 손실을 측정하기에 효율적인 새로운 방법을 제시하였고, 제작된 폴리이미드 광도파로의 전파손실은 0.9 dB/cm로 확인되었다. 위상변조기는 π 위상변화를 위해 9.1 mW의 전력을 필요로 하였으며, 기존 폴리머 위상변조기 대비 응답속도가 10배 정도 향상된 290 μs 정도의 응답시간을 가지는 것을 확인하였다.

• 마이크로전자및패키징학회지
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• 제22권3호
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• pp.73-77
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• 2015

본 논문에서는 저가로 쉽게 제작할 수 있는 구조를 지닌 단일칩 형태의 고분자 기반 평판형 분광모듈을 제안하였다. 제안된 분광모듈은 UV 임프린트 기법에 의해 제작되어진 비등간격 나노회절격자와 오목거울이 포함된 평판형 광도파로로 구성되어진다. 회절효율을 향상시키기 위해 나노회절격자의 구조는 $25^{\circ}$의 블레이징 각도와 100nm의 선폭을 가지도록 설계, 제작되었다. 평판형 분광모듈은 700 nm 대역폭과 10 nm 분해능을 가짐을 확인하였다. 이러한 집적형 고분자 분광모듈은 다양한 센서 시스템에 적용될 수 있을 것으로 기대된다.

• 한국광학회지
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• 제13권3호
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• pp.223-227
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• 2002

병렬 광접속용 다중모드 고분자 광도파로를 제작하였으며, 도파로 구조는 LIGA 공정에 의해 제작된 니켈 성형 마스터에 의해 hot embossing기술을 이용하여 성형하였다. 도파로 크기가 48$\times$47$\mu\textrm{m}$$^{2}$인 다중모드 광도파로를 단순 2단계 공정에 의해 제작하였으며, 0.85$\mu\textrm{m}$과 1.3$\mu\textrm{m}$ 파장대역에서 측정한 다중모드 광도파로의 도파손실은 각각 0.38dB/cm와 0.66dB/cm이었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.111-114
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• 2002

We propose and fabricate a vertically integrated waveguide thermo-optic switch. It controls the optical path between two vertically stacked waveguide. As a first step, we fabricate polymeric waveguides. The measured propagation loss is ranged from 0.3 db/cm to 0.4 dB/cm at the wavelength of 1.55 $\mu\textrm{m}$. We fabricate the proposed vertically integrated waveguide thermo-optic switch to demonstrate its preliminary feasibility. The measured crosstalk is better than -10 db. The power consumption is about 500 mW. Further effort is necessary to improve its performance.

• 한국고분자학회지:고분자과학과기술
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• 제18권2호
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• pp.167-172
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• 2007