• 한국산업융합학회 논문집
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• 제26권4_1호
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• pp.517-527
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• 2023

Many techniques have been proposed and investigated for microlens array manufacturing in three-dimensional (3D) structures. We present fabricating a microlens array using selective laser etching and a CO₂ laser. The femtosecond laser was employed to produce multiple micro-cracks that comprise the predesigned 3D structure. Subsequently, the wet etching process with a KOH solution was used to produce the primary microlens array structures. To polish the nonoptical surface to the optical surface, we performed reflow postprocessing using a CO₂ laser. We confirmed that the micro lens array can be manufactured in three primary shapes (cone, pyramid and hemisphere). Compared to our previous study, the processing time required for laser processing was reduced from approximately 1 hour to less than 30 seconds using the proposed processing method. Therefore, micro lens arrays can be manufactured using our processing method and can be applied to mass productionon large surface areas.

• 소성∙가공
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• 제33권2호
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• pp.118-122
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• 2024

Micro-electromechanical systems (MEMS) based in-situ heating holders have been developed to enable high resolution imaging of heat treatment analysis. However, unlike the standard 3 mm metal disk specimens used in the furnace-based heating holder and general transmission electron microscopy holder, the MEMS-based in-situ heating holder requires thin specimens that can be penetrated by electrons to be transferred onto the MEMS chip. Previously, focused ion beam milling was used to transfer metal specimens, but it has the disadvantage of being expensive and the risk of specimen damage due to gallium ions. Therefore, in this study, we devised a method of transferring metallic materials by ultrasonic treatment using a transmission electron microscopy specimen made by electro jet polishing. A 3mm electropolished metal disk was placed in an appropriate solution, ultrasonicated, and then drop casted. The transfer of the specimen was successful, but it was confirmed that dislocations were formed inside the specimen due to ultrasonic treatment. This study provides a novel method for transferring metallic materials onto MEMS chips, which is cost-effective and less gallium ion damaging to the specimen. The results of this study can be used to improve the efficiency of heat treatment analysis using MEMS-based in-situ heating holders.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.319-320
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• 2012

Large aperture optical modulator called optical shutter is a key component to realize time-of-flight (TOF) based three dimensional (3D) imaging systems [1-2]. The transmission type electro-absorption modulator (EAM) is a prime candidate for 3D imaging systems due to its advantages such as small size, high modulation performance [3], and ease of forming two dimensional (2D) array over large area [4]. In order to use the EAM for 3D imaging systems, it is crucial to remove GaAs substrate over large area so as to obtain high uniformity modulation performance at 850 nm. In this study, we propose and experimentally demonstrate techniques for backside etching of GaAs substrate over a large area having high uniformity. Various methods such as lapping and polishing, dry etching for anisotropic etching, and wet etching ([20%] C6H8O7 : H2O2 = 5:1) for high selectivity backside etching [5] are employed. A high transmittance of 80% over the large aperture area ($5{\times}5mm^2$) can be obtained with good uniformity through optimized backside etching method. These results reveal that the proposed methods for backside etching can etch the substrate over a large area with high uniformity, and the EAM fabricated by using backside etching method is an excellent candidate as optical shutter for 3D imaging systems.

• Tribology and Lubricants
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• 제32권2호
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• pp.44-49
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• 2016

Diamond mechanical polishing (DMP) is a crucial process in a sapphire wafering process to improve flatness and achieve the target thickness by using free abrasives. In a DMP process, material removal rate (MRR) is a key factor to reduce process time and cost. Controlling mechanical parameters, such as velocity and pressure, can increase the MRR in a DMP process. However, there are limitations of using high velocities and pressures for achieving a high MRR owing to their side effects. In this paper, we present the lapping characteristics and improvement of MRR by using a fixed abrasive plate through an experimental study. The change in MRR as a function of velocity and pressure follows Preston's equation. The surface roughness of a wafer decreases as the plate velocity and pressure increases. We observe a sharp decrease in MRR over the lapping time at a high velocity and pressure in the velocity and pressure test. An analysis of surface roughness (Rq and Rpk) indicates that wear of abrasives decreases the MRR sharply. In order to investigate the effect of abrasive wear on the MRR, we utilize a cutting fluid and a rough wafer. The cutting fluid delays the wear of abrasives resulting in improvement of MRR drop. The rough wafer maintains the MRR at a stable rate by self-dressing.

• 한국재료학회지
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• 제27권3호
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• pp.137-143
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• 2017

Boron-doped diamond (BDD) electrode has an extremely wide potential window in aqueous and non-aqueous electrolytes, very low and stable background current and high resistance to surface fouling due to weak adsorption. These features endow the BDD electrode with potentially wide electrochemical applications, in such areas as wastewater treatment, electrosynthesis and electrochemical sensors. In this study, the characteristics of the BDD electrode were examined by scanning electron microscopy (SEM) and evaluated by accelerated life test. The effects of manufacturing conditions on the BDD electrode were determined and remedies for negative effects were noted in order to improve the electrode lifetime in wastewater treatment. The lifetime of the BDD electrode was influenced by manufacturing conditions, such as surface roughness, seeding method and rate of introduction of gases into the reaction chamber. The results of this study showed that BDD electrodes manufactured using sanding media of different sizes resulted in the most effective electrode lifetime when the particle size of alumina used was from $75{\sim}106{\mu}m$ (#150). Ultrasonic treatment was found to be more effective than polishing treatment in the test of seeding processes. In addition to this, BDD electrodes manufactured by introducing gases at different rates resulted in the most effective electrode lifetime when the introduced gas had a composition of hydrogen gas 94.5 vol.% carbon source gas 1.6 vol.% and boron source gas 3.9 vol.%.

• Restorative Dentistry and Endodontics
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• 제23권2호
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• pp.597-606
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• 1998

The purpose of this study was to evaluate the shear bond strength of the Compoglass Carvifil bonded on the dentin surface according to etching or non-etching and two time application or three time application of single component. Human non-carious 60 extracted 3rd molar were used. The occlusal dentin surfaces of all teeth were exposed with Diamond Wheel Saw and polished with Lapping & Polishing machine(South Bay Technology Co., U.S.A). The teeth were then distributed randomly into four groups of 15 teeth each and dentin surface were conditioned as following. Control group : Non-etching, two times application of Syntac Single Component. (According to manufacture's instruction) Experimental group 1 : Non-etching, three times application of Syntac Single Component. Experimental group : 2 Etching, two times application of Syntac Single Component. Experimental group 3 : Etching, three times application of Syntac Single Component. Compoglass were bonded to exposed dentin surfaces and all samples were placed in distilled water for 7 days. The shear bond strengths were measured by universal testing machine (SHIMADAZU AUTOGRAPH, AGS-4D., Japan). The results were as follows : 1. Experimental group 3 revealed the highest value (30.75${\pm}$4.74 MPa) and control group revealed the lowest value(14.85${\pm}$2.69 MPa). There was significant difference of shear bond strength among four groups(P<0.01) 2. The acid-etching groups (experimental group 2, 3) had higher shear bond strengths than non etching groups(control group and experimental group 1). 3. The additional application of Syntac single component groups revealed a higher bond strength than two times application groups (control group and experimental group 2).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.523-524
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• 2007

This paper discusses the planarization process of thick copper film structure used for power supply device. Chemical mechanical polishing(CMP) has been used to remove a metal film and obtain a surface planarization which is essential for the semiconductor devices. For the thick metal removal, however, the long process time and other problems such as dishing, delamination and metal layer peeling are being issued, Compared to the traditional CMP process, Electro-chemical mechanical planarization(ECMP) is suggested to solve these problems. The two-step process composed of the ECMP and the conventional CMP is used for this experiment. The first step is the removal of several tens ${\mu}m$ of bulk copper on patterned wafer with ECMP process. The second step is the removal of residual copper layer aimed at a surface planarization. For more objective comparison, the traditional CMP was also performed. As an experimental result, total process time and process defects are extremely reduced by the two-step process.

• 대한소아치과학회지
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• 제27권1호
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• pp.54-61
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• 2000

아말감은 널리 사용되어 온 대표적 치과재료이지만 치질과의 접착성이 없어 와동의 형태에 의해 유지되는 단점을 가진다. 아말감 수복물은 산화물에 의한 변연봉쇄가 일어나기 전까지 초기에 큰 미세누출을 보이며 수복초기에 이를 적절하게 예방하지 않으면 타액이나 미생물이 와동내에 침투하게 되고 이로 인해 수복 후의 과민반응, 충전물의 용해 및 파괴, 변연 변색과 2차 우식이 유발되어, 결과적으로 수복물의 수명이 단축되며 치수 병변이 발생될 수도 있다. 최근 기존 아말감 수복의 장점을 그대로 유지하면서 치질삭제를 줄이고 변연을 봉쇄하며 소와열구에 예방적 처치를 함께 할 수 있는 수복법이 제안되었는데 이를 이른바 sealed amalgam이라 한다. 이 술식은 예방적 확대 없이 병소만을 제거한 뒤 수복물 변연과 인접 소와열구에 치면열구전색재를 도포함으로서 소와열구의 예방적 충전은 물론 수복물 변연과 치질사이의 틈을 봉쇄하여 미세누출을 감소시킬 수 있다고 하였다. 이에 저자는 아말감 수복후 수복물의 마무리 처리와 전색재 적용시점을 달리 하여 sealed amalgam 수복과 기존의 아말감 수복과의 미세누출의 차이를 비교하고자 30개의 상, 하악 소구치를 준비하여 V급 와동을 소구치의 협, 설측에 형성하고 통상적 아말감 수복을 시행한 후 다음의 각 군으로 나누어 처리하였다. 제 1 군 : 24시간 후 연마 (대조군) 제 2 군 : 연마하지 않음, 즉시 전색재 적용 제 3 군 : 연마하지 않음, 열순환(thermocycling) 500회 후 전색재 적용 위의 처리 후 각 군을 $5^{\circ}C$와 $55^{\circ}C$의 온도변화를 30초씩 번갈아 주며 총 500회의 열순환을 실시한 후 1% methylene blue 용액에 침윤시켜서 100% 습도가 유지된 $37^{\circ}C$ 항온기에 24시간 보관하였다. 치아를 레진에 매몰한 후 협설측으로 치아 장축에 평행하게 절단하여 stereomicroscope를 사용해 색소침투도를 관찰하여 다음과 같은 결론을 얻었다. 1. 평균 미세누출은 연마하지 않고 바로 치면열구전색재를 도포한 2군이 가장 낮았고, 연마만 시행한 1군이 가장 높았다. 2. 실험군간의 미세누출 비교에서 연마만 시행한 1군은 2군에 비해 미세누출이 켰으며 통계적으로 유의성 있는 차이를 보였다(p<0.05). 3군은 1군보다 평균미세누출이 작았으나 통계적으로 유의한 차이가 없었다(p>0.05). 2군은 3군보다 평균 미세누출이 작았으나 통계적으로 유의한 차이가 없었다(p>0.05).

• 한국임상수의학회지
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• 제10권2호
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• pp.221-226
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• 1993

To study effective dossage and administration route for scaling, ketamine HCl/propionyl promazine HCl(ketamine) combination and tiletamine HCl/zolazepam HCl(zoletil) were administered in one hundred six dogs. The dogs were toy poodle, Yorkshire Terrier, Pekingese and Chihuahua. Scaling and polishing time, possible treatment time after the first injection of anesthetics, the number of anethesia added, presence of tongue movement during anesthesia, the presence of swaying sign during recovery and respiration were evaluated. The possible treatment time after the first Injection of anesthetic in toy poodle were 26.3${\pm}$3.0 minutes with intravenous(IM) treatment of ketamine 10mg/kg, and 21.4${\pm}$6.6 minutes with intramuscula(IM) treatment of zoletil 8mg/kg, In Yorkshire Terrier were 19.51: 1.7 minutes with IV treatment of ketamine 10mg/kg. 19.0${\pm}$5.2 minutes IM and 20.8${\pm}$6.1 minutes with IM treatment of zoletil 5mg/kg,24.8${\pm}$3,5 minutes with IM treatment of zoletil 8mg/kg. In pekingese were 27.5${\pm}$2.1 minutes with IM treatment of ketamine 10mg/kg,28.0${\pm}$4.2 minutes with IM treatment of zoletil 8mg/kg. In Chihuahua were 19.5${\pm}$1.9 minutes with IV treatment of ketamine 7mg/kg, 17.5${\pm}$1.7 minutes with IM treatment of ketamine 10mg/kg and 20.3${\pm}$3.8 minutes with IM treatment of zoletil 5mg/kg, 21.2${\pm}$5.5 minutes with IM treatment of zoletil 8mg/kg. Swaying sign was observed in all group during recovery time, espically, in toy poodle and Yorkshire Terrier which administered zoletil 8mg/kg IM showed more severe swaying sign. The present results suggested that injection of zoletil 8mg/kg IM might be relatively effective for scaling in Chihuahua Within 20 minutes treatment for scaling in Yorkshire Terrier and Chihuahua, IM treatment of ketamine 7 to 10mg/kg is recommended.

• 대한치과보철학회지
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• 제38권3호
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• pp.336-347
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• 2000

Statement of problem. Luster loss in esthetic anterior ceromer restoration can occur and can be related with rough surface texture. Understanding durability of surface finishing methods like polishing and surface coating have critical importance. Purpose. This study evaluated the effect of tooth brushing and thermal cycling on surface luster of 3 ceromer systems (Artglass, Targis, Sculpture) treated with different surface finishing methods. Material and methods. Seventy-two samples were prepared: 12 for control group Z100, 12 for Artglass, 24 for Targis, and 24 for Sculpture. Half of the Targis and Sculpture were polished according to the manufacturer's recommendation. The rest of the samples were coated with staining and glazing solution for Targis and Sculpture, respectively. All specimens were subjected to 10,000 cycles between $5^{\circ}C\;and\;55^{\circ}C$ with 30 seconds dwell time. Tooth brushing abrasion tests were performed in a customized tooth brushing machine with 500g back and forth for 20,000 cycle. Luster comparisons were based on grading after direct observation, and light reflection area was measured with Image analysis software. Results. All materials showed an decrease in luster grade after thermal cycling and tooth brushing. The post-tooth brushing results revealed that the glazed Sculpture had greater mean luster grade than did any other groups. While, the stained Targis group showed greatest changes after tooth brushing (p < 0.05), polished Targis and Sculpture did not show significant changes. However, glazed Sculpture showed discretely fallen out glaze resin. Conclusion. From the results of this study, all of the ceromer specimens were much glossy than control composite group after tooth brushing. coatings used for Targis and Sculpture had not durability for long term use.