• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2506-2511
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• 2007

The coupled simulation is performed to find out the interaction of arc plasmas with surrounding materials in a thermal puffer plasma chamber. In order to be more realistic, PTFE nozzle ablation and Cu electrode evaporation, which are caused by high temperature of arc plasmas, are considered together. Pressure rise and temperature inside the chamber generated during the whole arcing history are investigated with the applied currents. It is very important to define how thermal flow and mass transfer are processing between the arc plasma and surrounding materials for further understanding complex physics inside the chamber. It is concluded that the result might be very useful to understand the mechanism happened inside and to design thermal puffer plasma chambers, but further experimental studies are required to verify the results for the more practical applications.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.163-164
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• 2002

This paper describes a new carbon film that afford superlubricity (i.e, friction coefficients of 0.001- 0.005) and superlow wear rates (i.e., $10^{-11}-10^{-10}mm^3/N.m$) to sliding metallic and ceramic surfaces, when tested in inert test environments. The wear life of these films are more than 1000 km even under very high contact pressures (i.e., 1-3 GPa) and at a wide range of sliding velocities (i.e., 0.1 to 2 m/s). They are produced in a plasma enhanced chemical vapor deposition system at room temperature using highly hydrogenated gas discharge plasmas. Extensive research has shown that films grown in highly hydrogenated gas discharge plasmas (i.e., hydrogen-to-carbon ratio of 6 and above) provide superlow friction and wear coefficients. In full paper, specific conditions under which superlubricity can be achieved in carbon films will be discussed.and a mechanistic model will be proposed to explain the superlubricity of new carbon films.

• 한국표면공학회지
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• 제34권5호
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• pp.391-394
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• 2001

A new type plasma reactor is proposed to decompose CF4 diluted with N2 gas in atmospheric pressure. The arc plasmas is surrounded with a waterwall which acts as a source of water vapor, the solvent of HF, resultant product after decomposition, and conveyer to take away fluorine compound from exhaust gas. Abatement more than 99% is achieved by small size plasmas such as 1 cm in diameter, 25cm in length and 3.4KW of DC discharge power in such gas as the mixture of 100 sccm of CF4 and 15 slm of N2. Reactors of this type are to be expanded to such a system as Nitrogen flow of 50 slm with 200 sccm of CF4 and 7-8 KW discharge power.

• 한국결정성장학회지
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• 제14권5호
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• pp.220-225
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• 2004

Four different Fluorine-based gases ($SF_6/,NF_3, PF_5,\; and \; BF_3$) were examined for high rate Inductively Coupled Plasma etching of Si. Etch rates up to ~8$\mu\textrm{m}$/min were achieved with pure $SF_6$ discharges at high source power (1500 W) and pressure (35 mTorr). A direct comparison of the four feedstock gases under the same plasma conditions showed the Si etch rate to increase in the order $BF_3$ < $NF_3$< $PF_5$ < $SF_6$. This is in good correlation with the average bond energies of the gases, except for $NF_3$, which is the least strongly bound. Optical emission spectroscopy showed that the ICP source efficiently dissociated $NF_3$, but the etched Si surface morphologies were significantly worse with this gas than with the other 3 gases.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2011년도 한국우주과학회보 제20권1호
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• pp.29.2-29.2
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• 2011

Earth's bow shock is a transition layer across which properties of plasmas change irreversibly. Although some features of the bow shock are well described by continuities of fluxes of various macroscopic quantities, particle dynamics across the transition layer is very complicated. Observed phase space distributions show multiple ion beams and partially thermalized ions around the transition layer. In some cases, both hot magnetosheath ions and cold solar wind ions simultaneously exist in the magnetosheath. Electrons around the transition layer usually have flat-top distributions with temperature anisotropy. From the observed properties of the phase space distributions we will discuss thermalization processes that occur across the shock transition.

• 한국진공학회지
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• 제8권3B호
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• pp.353-360
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• 1999

The global balance model is applied to investigate the transient behavior of the electron density and temperature in helicon plasmas. The power absorption calculated from the solutions of the Maxwell equations is used in solving the power balance equation. A balance model for the neutral gas is also considered to fins its density self-consistently. It is turned out that the numerical results reasonably explain consequences of the ion pumping effect including the occurrence of two distinct modes of pulsed helicon discharge which have been observed experimentally. The behavior of the discharge parameters are fond to be primarily dependent on the power absorption and the gas flow rate, but the pressure controls the electron density and temperature of the final steady state as well as the transient state even with the same flow rate. Finally, it is shown that the electron density virtually the linear relationship between the density and the magnetic field is retained for a higher pressure when the effect of the ion pumping is negligible.

• 한국염색가공학회지
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• 제5권2호
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• pp.134-138
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• 1993

Wool, silk and nylon 6 fabrics were treated with low-temperature plasma under atmospheric pressure of acetone/argon or helium/argon for 30 and 180 sec, and then dyed with leveling type acid dye, C.I. Acid Red 18 and milling type acid dye, C.I. Acid Blue 83. In spite of short time of the plasma treatment for thirty seconds, the color depth of wool fabrics was increased remarkably with both of the plasma gases, aceton/argon or helium/argon and with the kinds of dyes i.e., levelin type or milling type. But the atmosperic low-temperature plasmas did not increase the depth of silk and nylon 6 fabrics dyed with both of the acid dyes regardless of the teated time and plasma gases. It seems that low-temperature plasma by atmospheric-pressure discharge is effective for improvement of dyeing of wools as is the same way with the low-temperature plasma by glow discharge. The kinds of plasma gases and treated time did not influnce the depth of wool fabric pretreted with the atmosperic low-temperature plasmas.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2002년도 제24회 KOSCO SYMPOSIUM 논문집
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• pp.179-184
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• 2002

Interaction between flames and non-thermal plasmas of DBD type has been experimentally investigated. Vigorous streamers were observed under flame conditions because of the increase of reduced field (electrical) at high temperature as well as the seeding of free electrons and ions generated inside the flame. Flame lengths were significantly shortened as the applied voltage increased on account of intense mixing by ionic winds and soot-induced flows. Flame luminosities severely decreased under plasma conditions, which means the reduction of soot, since the residence time was reduced because of the flame shortening. Temperature and major species concentrations measured by FTIR were not changed despite the plasma generation. which shows overall chemistries were not affected by non-thermal plasmas.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.519-524
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• 2005

A numerical process to simulate SiO2 dry etching with inductively coupled C2F6 plasmas has been constructed using a commercial CFD code as a first step to design a run-to-run control system. The simulator was tuned to reasonably predict the reactive ion etching behavior and used to investigate the effects of plasma operating variables on the etch rate and uniformity. The relationship between the operating variables and the etching characteristics was mathematically modeled through linear regression for future run-to-run control system design.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.32-32
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• 2010

Since the characteristics of plasmas depend strongly on the interactions between plasma particles such as electron, ions, and neutrals, a well-established atomic and molecular database is needed to understand and produce various types of plasma. Thus, National Fusion Research Institute (NFRI) started to establish the plasma property DB for fusion and industrial plasma from last 2002. Here we describe our recent data evaluation activities regarding to production of atomic and molecular data that are needed for modeling plasma in fusion tokamaks and also low temperature industrial plasmas.