Numerical studied on consequenses of the ion pumping effect in helicon plasmas

헬리콘 플라즈마에서 이온 펌핑 효과의 영향에 대한 수치적 해석 연구

The global balance model is applied to investigate the transient behavior of the electron density and temperature in helicon plasmas. The power absorption calculated from the solutions of the Maxwell equations is used in solving the power balance equation. A balance model for the neutral gas is also considered to fins its density self-consistently. It is turned out that the numerical results reasonably explain consequences of the ion pumping effect including the occurrence of two distinct modes of pulsed helicon discharge which have been observed experimentally. The behavior of the discharge parameters are fond to be primarily dependent on the power absorption and the gas flow rate, but the pressure controls the electron density and temperature of the final steady state as well as the transient state even with the same flow rate. Finally, it is shown that the electron density virtually the linear relationship between the density and the magnetic field is retained for a higher pressure when the effect of the ion pumping is negligible.