• 한국결정성장학회지
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• 제33권4호
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• pp.153-157
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• 2023

반도체 회로를 제조하기 위해서 에칭, 세척, 증착 등의 공정들이 반복적으로 진행된다. 따라서 이러한 공정이 진행되면 진공장비 내부는 부식성이 높은 가혹한 플라즈마 환경에 노출되게 된다. 따라서 반도체 공정 장비의 내부를 플라즈마 노출에 강한 재료를 사용하여 코팅층의 에칭과 오염 입자의 생성을 최소화하여야 한다. 본 연구에서는 고상합성법에 의해 합성된 옥시불화이트륨 (YOF)를 이용한 증착층의 플라즈마 식각 특성을 향상시키기 위하여 YOF 분말에 AlF₃ 분말을 혼합하여 플라즈마 스프레이 공정으로 Al 금속위에 증착시키고 그 특성을 분석하였다. AlF₃ 혼합비율의 증가에 따른 증착층의 결정구조, 미세구조 및 화학조성 변화를 조사하고 증착된 코팅층의 플라즈마 식각율을 측정하여 AlF₃ 혼합비율과의 상관관계를 분석하였다.

• Journal of Welding and Joining
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• 제21권4호
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• pp.39-45
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• 2003

Nano-TiO$_2$ photocatalytic coatings were deposited on the stainless steel 304(50$\times$70$\times$3mm) by the APS(Atmospheric Plasma Spraying). Photocatlytic reaction was tested in MB(methylene blue) aqueous solution. For applying nano-TiO$_2$ powders by thermal spray, the starting nano-TiO$_2$ powder with 100% anatase crystalline was agglomerated by spray drying. Plasma second gas(H$_2$) flow rate and spraying distance were used as principal process parameters which are known to control heat enthalpy(heat input). The relationship between process parameters and the characteristics of microstructure such as the anatase phase fraction and grain size of the TiO$_2$ coatings were investigated. The photo-decomposition efficiency of TiO$_2$ coatings was evaluated by the kinetics of MB aqueous solution decomposition. It was found that the TiO$_2$ coating with a lower heat input condition had a higher anatase fraction, smaller anatase grain size and a better photo-decomposition efficiency.

• 한국건축시공학회지
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• 제21권6호
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• pp.539-550
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• 2021

일반 전기 아크에 의한 금속용사공법에 비해 시공속도와 효율성능이 우수한 플라즈마 아크 용사장비를 개발하여 이 플라즈마 용사장비에 의한 코팅의 부식특성 평가가 요구되었다. 본 연구에서는 일반 탄소강에 Zn 및 Zn-15Al을 플라즈마 아크 금속 용사법으로 코팅한 후 해수 환경과 유사한 3.5wt.% NaCl 용액에 침지하여 내식성을 평가하였다. SEM 및 XRD에 의한 표면 형상 분석 시험 결과, Zn 코팅이 다공성이고 침상 형태로 되어 있어 용액의 침투가 용이하여 부식 속도가 빠른 것을 알 수 있었다. 반면, Zn-15Al 코팅은 균일하고 조밀한 형태를 보여 부식을 억제하는 것으로 나타났다.

• 한국진공학회지
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• 제7권s1호
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• pp.179-182
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• 1998

Boron carbide coating has some very attractive properties for nuclear and semiconductor industry. The potential of atmosheric plasma spray as manufacturing methods for $B_4C$ coating was discussed. In this work, the boron carbide coating with low porosity, high microhardness and good life of thermal shock resistance was deposited by the control of spraying distance. The relationship between the properties of $B_4C$ coatings and their spraying distance was studied.

• 한국진공학회지
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• 제6권S1호
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• pp.160-165
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• 1997

Yttria stabilized zirconia coating is an attractive material for several engineering applications. In order to produce coatings with consistent and reliable performance it is important to understand the influence of spraying parameters on the coating properties and optimize the spraying parameters. In this paper the low pressure plasma spray(LPPS) deposition of as-received zirconia powder has been investigated using simple one-factor-at-a-time approach. The deposition efficiency was chosen to evaluate the melting characteristics of the as-received zirconia powder. The results obtained indicated that the deposition efficiency of zirconia powder is very sensitive to the spraying parameters such as plasma gas flow rate and ranges from 24% to 57% The microstructure and the phase composition of zirconia coating deposited with the different plasma spraying parameters were also examined by SEM and XRD respectively. The relationship between deposition efficiency and the microstructure of zirconia coating was discussed.

• 한국분말재료학회지
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• 제7권2호
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• pp.63-70
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• 2000

Thermal spray coating process has proven to be effective at producing hard, dense, wear resistance coatings on the relatively mild substrates. Among several spraying techniques, HVOF (High Velocity Oxygen Fuel) and plasma coating processes, which are preferentially used for the wear resistance application such as capstans, have been applied in this study. The effects of pre-treatment, it-process and post-treatment parameters on the wear and mechanical properties of WC+12%Co, Cr3C2 and Al2O3 powder coatings have been investigated and correlated with the microstructures. The results indicated that the carbide coating was more preferable to the oxide coatings and the post-treatments consisting of vacuum annealing and sealing on carbide coatings led to significant improvements in wear resistance, adhesive strength and coating phase stabilization over the other processing techniques in this application.

• 한국재료학회지
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• 제15권6호
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• pp.375-381
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• 2005

High temperature oxidation behavior of thermal barrier coating (TBC) system (IN738 substrate + NiCoCrAlY or NiAl bond coat with or without Pt + yttria stabilized zirconia) prepared by air plasma spray (APS) process has been studied in order to understand the effect of Pt addition to bond coat on the stability of TBC system. Specimens were oxidized in thermal cycling and isothermal oxidation test at $1100^{\circ}C$. The Pt addition in TBC system with NiCoCrAlY bond coat showed a longer life time compared to that without addition of Pt. Pt addition to TBC system is believed to help the formation of more stable thermally grown oxide, $Al_2O_3$, at the TBC/bond coat interface, leading to a longer lifetime of TBC system.

• 한국정밀공학회지
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• 제26권4호
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• pp.114-119
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• 2009

In this research, heat-acupuncture needle was coated with $Al_2O_3$ by applying a plasma spray coating method to prevent a skin burn. $Al_2O_3$, which is one of the representative bioceramics, does not have an influence on the chemical change in the body system. The ceramic coating thickness was about $100{\mu}m$. The experiments of heat conduction were performed for uncoated needle and coated needle. The results showed that the surface temperature of needle decreased as the needle was coated with $Al_2O_3$. The surface temperature of uncoated needle was about $48^{\circ}C$, while that of needle coated with $Al_2O_3$ was about $39^{\circ}C$.

• Corrosion Science and Technology
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• 제19권2호
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• pp.51-56
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• 2020

The objective of this study was to improve properties of plasma sprayed HAp layer to titanium substrate by introducing an intermediate layer with two different methods. Before applying Zn doped HAp coating on titanium substrate, an intermediate layer was introduced by titanium plasma spray or titanium anodization. Heat treatments were conducted for some samples after titanium intermediate layer was formed. Zn doped HAp top layer was applied by plasma spraying. Three-point bending test and pull-off adhesion test were performed to determine the adhesion of Zn doped HAp coatings to substrates. Long-term credibility of Zn doped HAp plasma sprayed coatings on titanium was assessed by electrochemical impedance measurements in Hanks' solution. It was found that both titanium plasma sprayed and titanium anodized intermediate layer had excellent credibility. Strong adhesion to the titanium substrate was confirmed after 12 weeks of immersion for coating samples with titanium plasma sprayed intermediate layer. Samples with titanium anodized intermediate layer showed good bending strength. However, they showed relatively poor resistance against pulling off. The thickness of titanium anodized intermediate layer can be controlled much more precisely than that of plasma sprayed one, which is important for practical application.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.53-54
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• 2006

Ti-Zr-Ni coatings deposited by low vacuum plasma spray technique consisted of nanometer-sized $W-Ti_{50}Zr_{35}Ni_{15}$ 1/1 cubic approximant and TiZrNi Laves phases as well as a low volume fraction of $ZrO_2$ phase. The shift of composition during deposition of the quasicrystalline powders and the presence of $ZrO_2$ phases are believed to be responsible for the reduced corrosion performances evaluated by means of electrochemical tests in a Hanks' Balance Salt Solution at $37^{\circ}C$.