• 제목/요약/키워드: Plasma resistant

검색결과 147건 처리시간 0.026초

기계적 혼합에 의한 플라즈마 용사용 ZrO2-Y2O3 분말의 제조 및 특성 (Fabrication and Characteristic of ZrO2-8%Y2O3 Powder for Plasma Spray Coating Manufactured by Mechanical Mixing Method)

  • 한진원;곽찬원;우기도
    • 한국재료학회지
    • /
    • 제24권7호
    • /
    • pp.357-362
    • /
    • 2014
  • Thermal barrier coatings(TBCs) are being applied in many industrial fields such as thermal power generation, aviation and seasonal fields. $ZrO_2-Y_2O_3$(8%) thermal spray coating powders are commercially used as thermal-barrier coating materials to protect against oxidation and corrosion of heat-resistant alloys at elevated temperatures. Currently, $ZrO_2-Y_2O_3$(8%) thermal-spray powder is made using the industrial co-precipitation process, which is very complex and requires a lot of time. In this study, orthorhombic $ZrO_2$ and $Y_2O_3$ powders were fabricated by mechanical mixing, which is more economical than the co-precipitation process. A tetragonal, yttria-stabilized zirconia(YSZ) coating-layer was produced by plasma spraying, using orthorhombic $ZrO_2-Y_2O_3$(8%) powder. Our experimental results indicate that $ZrO_2-Y_2O_3$(8%) mixed powder can be used economically in industry because it is no longer necessary to make this powder by liquid and gas-phase methods.

비열 유전체장벽방전 플라즈마의 포도상구균 및 대장균 살균효과 (Bactericidal Efficacy of Non-thermal DBD Plasma on Staphylococcus aureus and Escherichia coli)

  • 김기영;백남원;김용희;유관호
    • 한국산업보건학회지
    • /
    • 제28권1호
    • /
    • pp.61-79
    • /
    • 2018
  • Objectives: The objective of this study was to examine the effect of non-thermal dielectric barrier discharge(DBD) plasma on decontamination of Staphylococcus aureus(S. aureus) and Escherichia coli(E. coli) as common pathogens. Methods: This experiment was carried out in a chamber($0.64m^3$)designed by the authors. The plasma was continuously generated by a non-thermal DBD plasma generator(Model TB-300, Shinyoung Air tech, Korea). Suspensions of S. aureus and E. coli of 0.5 McFarland standard($1.5{\times}10^8CFU/mL$) were prepared using a Densi-Check photometer(bio $M{\acute{e}}rieux$, France). The suspensions were diluted1:1000 in sterile PBS solutions(approximately$10^{4-5}CFU/mL$) and inoculated on tryptic soy agar(TSA) in Petri dishes. The Petri dishes(80mm internal diameter)were exposed to the non -thermal DBD plasma in the chamber. Results: The results showed that 95% of S. aureus colonies were killed after a six-hour exposure to the DBD plasma. In the case of E. coli, it took two hours to kill 100% of the colonies. The gram-negative E. coli had a greater reduction than the gram-positive S. aureus. This difference may be due to the structure of their cell membranes. The thickness of gram-positive bacteria is greater than that of gram-negative bacteria. The S. aureus is more resistant to DBD plasma exposures than is E. coli. It should be noted that average concentrations of ozone, a byproduct of the DBD plasma generator, were monitored throughout the experiment and the results were well below the criteria, 50 ppb, recommended by the Korean Ministry of the Environment. Thus, non-thermal DBD plasma is deemed safe for use in hospital and public facilities. Conclusions: There was evidence that non-thermal DBD plasma can effectively kill S. aureus and E. coli. The results indicate that DBD plasma technology can greatly contribute to the control of infections in hospitals and other public and private facilities.

High Temperature Oxidation and Sulfidation of Ni-15at.%W Coatings

  • Kim Chanwou;You Teayoul;Shapovalov Yuriy;Ko Jaehwang;Lee Dongbok;Lee Kyuhwan;Chang Doyon;Kim Dongsoo;Kwon Sikchol
    • 한국표면공학회지
    • /
    • 제38권1호
    • /
    • pp.1-6
    • /
    • 2005
  • Ni-15at.% W coatings with film thicknesses of 20-40 ㎛ were electroplated on a steel substrate, and their oxidation behavior was investigated at 700 and 800℃ in air. For comparison, a pure Ni coating and a bulk Ni were also oxidized. The Ni-15at.%W coating displayed the worst oxidation resistance, due to the formation of less-protective NiO, Fe₂O₃, NiFe₂O₄ and NiWO₄. The corrosion behavior Ni-15at.%W coatings electroplated on a steel substrate was similarly investigated at 700 and 800℃ in the Ar-l%SO₂ atmosphere. For comparison, the uncoated steel substrate was also corrosion-tested in the Ar-l %SO₂ atmosphere. Severe scale spallation and the internal corrosion of the steel that occurred in the uncoated substrate were not observed in the coated specimen. However, it seemed that the Ni-15at.%W coating cannot be a potential candidate as a sulfidation-resistant coating, due to the formation of less-protective NiO, NiS, WO₃ and NiWO₄.

플라즈마 질화처리된 중탄소합금강의 내마모특성에 관한 연구 (Study on the Wear Resistant Characteristics of Medium Carbon Alloy Steel Plasma-Nitrided)

  • 조효석;노용식;신호강;이상윤
    • 열처리공학회지
    • /
    • 제5권4호
    • /
    • pp.215-223
    • /
    • 1992
  • This study has been performed to investigate into some effects of temperature, gas mixing ratio and time on the optical microstructure, hardness and wear characteristics of medium carbon alloy steel treated by plasma nitriding. The results obtained from the experiment are summarized as follows: (1) Optical micrographs of AISI 4140 steel plasma-nitrided by the double stage technique have revealed that the nitrided layer is composed of the compound layer and the diffusion layer. The variation in temperature at the first stage gives effects, on the formation of compound layer and the growth rate is shown to be relatively fast at $460^{\circ}C$. (2) The thickness of compound layer has been found to increase with increasing nitrogen percentage in the gas mixture and the holding time. It is therefore recommended that a shorter holding time and a lower nitrogen percentage are more effective to produce a tougher compound layer and a diffusion layer only. (3) X-ray diffraction analysis for AISI 4140 steel has shown that the compound layer consist of ${\gamma}^{\prime}-Fe_4N$ and ${\alpha}-Fe$ and that tough compound layer diffustion layer only can be obtained by the double stage plasmanitriding process. (4) There is also a tendency that the total hardened layer depth increases with increasing temperature, time and nitrogen percentage in the first stage during the double stage plasma nitriding. (5) The wear resistance of plasma nitrided specimens has been found thobe considerably increased compared to the untreated specimens and the amount of increment has appeared to increase further with increasing nitriding temperature, holding time and notrogen percentage of gas mixture in the first stage treatment.

  • PDF

Industrial application of WC-TiAlN nanocomposite films synthesized by cathodic arc ion plating system on PCB drill

  • Lee, Ho. Y.;Kyung. H. Nam;Joo. S. Yoon;Jeon. G. Han;Young. H. Jun
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2001년도 춘계학술발표회 초록집
    • /
    • pp.3-3
    • /
    • 2001
  • Recently TiN, TiAlN, CrN hardcoatings have adapted many industrial application such as die, mold and cutting tools because of good wear resistant and thermal stability. However, in terms of high speed process, general hard coatings have been limited by oxidation and thermal hardness drop. Especially in the case of PCB drill, high speed cutting and without lubricant process condition have not adapted these coatings until now. Therefore more recently, superhard nanocomposite coating which have superhard and good thermal stability have developed. In previous works, WC-TiAlN new nanocomposite film was investigated by cathodic arc ion plating system. Control of AI concentration, WC-TiAlN multi layer composite coating with controlled microstructure was carried out and provides additional enhancement of mechanical properties as well as oxidation resistance at elevated temperature. It is noted that microhardness ofWC-TiA1N multi layer composite coating increased up to 50 Gpa and got thermal stability about $900^{\circ}C$. In this study WC-TiAlN nanocomposite coating was deposited on PCB drill for enhancement of life time. The parameter was A1 concentration and plasma cleaning time for edge sharpness maintaining. The characteristic of WC-TiAlN film formation and wear behaviors are discussed with data from AlES, XRD, EDS and SEM analysis. Through field test, enhancement of life time for PCB drill was measured.

  • PDF

PEMOCVD of Ti(C,N) Thin Films on D2 Steel and Si(100) Substrates at Low Growth Temperatures

  • Kim, Myung-Chan;Heo, Cheol-Ho;Boo, Jin-Hyo;Cho,Yong-Ki;Han, Jeon-Geon
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
    • /
    • pp.211-211
    • /
    • 1999
  • Titanium nitride (TiN) thin films have useful properties including high hardness, good electrical conductivity, high melting point, and chemical inertness. The applications have included wear-resistant hard coatings on machine tools and bearings, decorative coating making use of the golden color, thermal control coatings for widows, and erosion resistant coatings for spacecraft plasma probes. For all these applications as feature sizes shrink and aspect ratios grow, the issue of good step coverage becomes increasingly important. It is therefore essential to manufacture conformal coatings of TiN. The growth of TiN thin films by chemical vapor deposition (CVD) is of great interest for achieving conformal deposition. The most widely used precursor for TiN is TiCl4 and NH3. However, chlorine impurity in the as-grown films and relatively high deposition temperature (>$600^{\circ}C$) are considered major drawbacks from actual device fabrication. To overcome these problems, recently, MOCVD processes including plasma assisted have been suggested. In this study, therefore, we have doposited Ti(C, N) thin films on Si(100) and D2 steel substrates in the temperature range of 150-30$0^{\circ}C$ using tetrakis diethylamido titanium (TDEAT) and titanium isopropoxide (TIP) by pulsed DC plamsa enhanced metal-organic chemical vapor deposition (PEMOCVD) method. Polycrystalline Ti(C, N) thin films were successfully grown on either D2 steel or Si(100) surfaces at temperature as low as 15$0^{\circ}C$. Compositions of the as-grown films were determined with XPS and RBS. From XPS analysis, thin films of Ti(C, N) with low oxygen concentration were obtained. RBS data were also confirmed the changes of stoichiometry and microhardness of our films. Radical formation and ionization behaviors in plasma are analyzed by optical emission spectroscopy (OES) at various pulsed bias and gases conditions. H2 and He+H2 gases are used as carrier gases to compare plasma parameter and the effect of N2 and NH3 gases as reactive gas is also evaluated in reduction of C content of the films. In this study, we fond that He and H2 mixture gas is very effective in enhancing ionization of radicals, especially N resulting is high hardness. The higher hardness of film is obtained to be ca. 1700 HK 0.01 but it depends on gas species and bias voltage. The proper process is evident for H and N2 gas atmosphere and bias voltage of 600V. However, NH3 gas highly reduces formation of CN radical, thereby decreasing C content of Ti(C, N) thin films in a great deal. Compared to PVD TiN films, the Ti(C, N) film grown by PEMOCVD has very good conformability; the step coverage exceeds 85% with an aspect ratio of more than 3.

  • PDF

Y2O3-카본 복합체의 전기전도성에 미치는 소결온도의 영향 (Effects of Sintering Temperature on the Electrical Conductivities of the Y2O3-Carbon Composites)

  • 최관영;오윤석;김성원;김형순;박종훈;이성민
    • 한국세라믹학회지
    • /
    • 제49권2호
    • /
    • pp.173-178
    • /
    • 2012
  • The $Y_2O_3$ ceramics have been widely used as plasma resistant materials in the semiconductor industry. In this study, composites made of plasma resistant $Y_2O_3$ and electrically conductive carbon have been produced. The electrical properties of this composite were measured with respect to the size, volume fraction of the conductive carbon phase, and sintering temperature. When micro-sized carbon was used, the composites were insulating up to 5 wt% addition of the carbon. However, when nano-sized carbon of around 60 ~100 nm was used, the composites became conductive over threshold volume fraction of carbon, which increased with increasing sintering temperature. This behavior of electrical conductivity of the composites was discussed in terms of the percolation theory. The percolation threshold of the conductivity seemed to be affected by the grain growth and coalescences of dispersed conductive carbon phases with grain growth of matrix $Y_2O_3$.

Dry-Heat Treatment Process for Enhancing Viral Safety of an Antihemophilic Factor VIII Concentrate Prepared from Human Plasma

  • Kim, In-Seop;Choi, Yong-Woon;Kang, Yong;Sung, Hark-Mo;Shin, Jeong-Sup
    • Journal of Microbiology and Biotechnology
    • /
    • 제18권5호
    • /
    • pp.997-1003
    • /
    • 2008
  • Viral safety is a prerequisite for manufacturing clinical antihemophilic factor VIII concentrates from human plasma. With particular regard to the hepatitis A virus (HAV), a terminal dry-heat treatment ($100^{\circ}C$ for 30 min) process, following lyophilization, was developed to improve the virus safety of a solvent/detergent-treated antihemophilic factor VIII concentrate. The loss of factor VIII activity during dry-heat treatment was of about 5%. No substantial changes were observed in the physical and biochemical characteristics of the dry-heat-treated factor VIII compared with those of the factor VIII before dry-heat treatment. The dry-heat-treated factor VIII was stable for up to 24 months at $4^{\circ}C$. The dry-heat treatment after lyophilization was an effective process for inactivating viruses. The HAV, murine encephalomyocarditis virus (EMCV), and human immunodeficiency virus (HIV) were completely inactivated to below detectable levels within 10 min of the dry-heat treatment. Bovine herpes virus (BHV) and bovine viral diarrhea virus (BVDV) were potentially sensitive to the treatment. However porcine parvovirus (PPV) was slightly resistant to the treatment. The log reduction factors achieved during lyophilization and dry-heat treatment were ${\geq}5.55$ for HAV, ${\geq}5.87$ for EMCV, ${\geq}5.15$ for HIV, 6.13 for BHV, 4.46 for BVDV, and 1.90 for PPV. These results indicate that dry-heat treatment improves the virus safety of factor VIII concentrates, without destroying the activity. Moreover, the treatment represents an effective measure for the inactivation of non-lipid-enveloped viruses, in particular HAV, which is resistant to solvent/detergent treatment.

플라즈마-스프레이법에 의해 코팅한 옥시불화이트륨(YOF) 증착층의 플라즈마 내식성에 미치는 불화알루미늄(AlF3) 첨가 효과 (Effect of AlF3 addition to the plasma resistance behavior of YOF coating deposited by plasma-spraying method)

  • 김영주;박제홍;유시범;정승원;김강민;유정호
    • 한국결정성장학회지
    • /
    • 제33권4호
    • /
    • pp.153-157
    • /
    • 2023
  • 반도체 회로를 제조하기 위해서 에칭, 세척, 증착 등의 공정들이 반복적으로 진행된다. 따라서 이러한 공정이 진행되면 진공장비 내부는 부식성이 높은 가혹한 플라즈마 환경에 노출되게 된다. 따라서 반도체 공정 장비의 내부를 플라즈마 노출에 강한 재료를 사용하여 코팅층의 에칭과 오염 입자의 생성을 최소화하여야 한다. 본 연구에서는 고상합성법에 의해 합성된 옥시불화이트륨 (YOF)를 이용한 증착층의 플라즈마 식각 특성을 향상시키기 위하여 YOF 분말에 AlF3 분말을 혼합하여 플라즈마 스프레이 공정으로 Al 금속위에 증착시키고 그 특성을 분석하였다. AlF3 혼합비율의 증가에 따른 증착층의 결정구조, 미세구조 및 화학조성 변화를 조사하고 증착된 코팅층의 플라즈마 식각율을 측정하여 AlF3 혼합비율과의 상관관계를 분석하였다.

Effects of Vitamin A on the Antioxidant Systems of the Growing Chicken

  • Surai, P.F.;Kuklenko, T.V.
    • Asian-Australasian Journal of Animal Sciences
    • /
    • 제13권9호
    • /
    • pp.1290-1295
    • /
    • 2000
  • The present study was conducted to evaluate effects of the increased dietary vitamin A supplementation on the vitamin A, vitamin E and ascorbic acid concentrations in the plasma and liver and activities of some enzymes in the liver of the growing chicken. One hundred and twenty female chickens at 4 weeks of age were divided in 6 equal groups in accordance with their body weight. They were housed in cages and fed on standard wheat-barley-based broiler diet balanced in the major nutrients. Vitamin A was supplemented in the form of retinyl acetate. Control diet was supplemented with 10 IU/g and experimental feeds were supplemented with 50, 100, 500, 1000 and 2000 IU/g. At days 42 and 56 of the development 8 chickens from each group were killed, plasma and liver were collected for vitamin and enzyme analyses. The increased vitamin A supplementation was associated with its increased accumulation in the liver and with a reduction of ${\alpha}-tocopherol$ concentrations in the plasma and liver. The blood plasma was more resistant to vitamin A concentration changes and the retinol level was elevated only when the vitamin A dose exceeded 100 IU/g feed. Ascorbic acid concentration in the liver was elevated when moderately high vitamin A supplementation was used but significantly decreased at the highest vitamin A dose. Similar changes were observed with glycogen concentration in the liver. Activities of hexokinase, glucose-6-phosphatase and lactate dehydrogenase in the chicken liver were also dependent on vitamin A supplementation, decreasing with highest vitamin A doses. Therefore the observations showed that the vitamin A excess compromises antioxidant system of the growing chickens suggesting that prooxidant activity may be responsible for at least part of the toxicity of vitamin A.