• Title/Summary/Keyword: Plasma resistance

Search Result 912, Processing Time 0.036 seconds

Fabrication process of embedded passive components in MCM-D (MCM-D 기판 내장형 수동소자 제조공정)

  • 주철원;이영민;이상복;현석봉;박성수;송민규
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.6 no.4
    • /
    • pp.1-7
    • /
    • 1999
  • We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

  • PDF

A Case of Autosomal Recessive Pseudohypoaldosteronism Type 1 with a Novel Mutation in the SCNN1A Gene (SCNN1A 유전자 변이로 발생한 상염색체 열성 가성 저 알도스테론증 1형 1례)

  • Kim, Su-Yon;Lee, Joo Hoon;Cheong, Hae Il;Park, Young Seo
    • Childhood Kidney Diseases
    • /
    • v.17 no.2
    • /
    • pp.137-142
    • /
    • 2013
  • Pseudohypoaldosteronism (PHA) is a condition characterized by renal salt wasting, hyperkalemia, and metabolic acidosis due to renal tubular resistance to aldosterone. Systemic PHA1 is a more severe condition caused by defective transepithelial sodium transport due to mutations in the genes encoding the ${\alpha}$ (SCNN1A), ${\beta}$ (SCNN1B), or ${\gamma}$ (SCNN1G) subunits of the epithelial sodium channel at the collecting duct, and involves the sweat glands, salivary glands, colon, and lung. Although systemic PHA1 is a rare disease, we believe that genetic studies should be performed in patients with normal renal function but with high plasma renin and aldosterone levels, without a history of potassium-sparing diuretic use or obstructive uropathy. In the present report, we describe a case of autosomal recessive PHA1 that was genetically diagnosed in a newborn after severe hyperkalemia was noted.

Improvement of Polycarbonate Properties by Coating of TiO2 and SiO2 Thin Film (TiO2/SiO2 박막 코팅에 의한 폴리카보네이트 특성 개선)

  • Won, Dong So;Lee, Won Gyu
    • Applied Chemistry for Engineering
    • /
    • v.25 no.1
    • /
    • pp.41-46
    • /
    • 2014
  • The property improvement of polycarbonate coated with a multilayer film composed of an inorganic $SiO_2$ film and a photocatalytic $TiO_2$ film was studied. The $SiO_2$ film as a binder had an excellent light transmission characteristic. After the treatment with atmospheric pressure plasma, the surface of $SiO_2$ film showed the hydrophilicity, which increased the film coating uniformity with a $TiO_2$-containing aqueous solution. When $TiO_2$ film was over 200 nm thick, the absorption effect of UV rays in the range of 180~400 nm suppressed the yellowing phenomena of polycarbonate substrate. The inorganic film improved the heat resistance of polycarbonate substrates. $TiO_2$ film in the outmost under the exposure of UV rays promotes the catalytic oxidation characteristics and yields the capability to the decomposition of organic contaminants, and also increases the self-cleaning properties due to the increase of hydrophilicity. Structural stability of the polycarbonate substrate coated with inorganic $TiO_2$ and $SiO_2$ film was shown. The role of $SiO_2$ film between $TiO_2$ and polycarbonate substrate suppressed the peeling of $TiO_2$ film by inhibiting the photocatalytic oxidation effect of $TiO_2$ film on the polycarbonate substrate.

Influence of the RF Power on the Optical and Electrical Properties of ITZO Thin Films Deposited on SiO2/PES Substrate (RF파워가 SiO2/PES 기판위에 증착한 ITZO 박막의 광학적 및 전기적 특성에 미치는 효과)

  • Choi, Byeong-Kyun;Joung, Yang-Hee;Kang, Seong-Jun
    • The Journal of the Korea institute of electronic communication sciences
    • /
    • v.16 no.3
    • /
    • pp.443-450
    • /
    • 2021
  • After selecting a PES substrate with excellent thermal stability and optical properties among plastic substrates, a SiO2 thin film was deposited as a buffer layer to a thickness of 20nm by plasma-enhanced chemical vapor deposition to compensate for the high moisture absorption. Then, the ITZO thin film was deposited by a RF magnetron sputtering method to investigate electrical and optical properties according to RF power. The ITZO thin film deposited at 50W showed the best electrical properties such as a resistivity of 8.02×10-4 Ω-cm and a sheet resistance of 50.13Ω/sq.. The average transmittance of the ITZO thin film in the visible light region(400-800nm) was relatively high as 80% or more when the RF power was 40 and 50W. Figure of Merits (ΦTC and FOM) showed the largest values of 23.90×10-4-1 and 5883 Ω-1cm-1, respectively, in the ITZO thin film deposited at 50W.

Changes in Inflammatory Mediators, Immunocompetent Cells and Bone Merrow Progenitor Cells by the Magnitude of Muscle Damage and Type of the Muscle Contraction in the Elderly (고령자의 근육수축양식 및 손상정도에 따른 염증물질, 면역적격세포 및 골수유래 전구세포의 변화)

  • Song, Sang-Hyup;Lee, Ho-Seong
    • 한국체육학회지인문사회과학편
    • /
    • v.54 no.5
    • /
    • pp.769-780
    • /
    • 2015
  • This study investigated the changes in inflammatory mediators, immunocompetent cells and bone merrow progenitor cells by the magnitude of muscle damage and type of the muscle contraction in the elderly. Twenty older adults who had not been involved in a resistance-training program at least 6 months prior to the present study were assigned to eccentric exercise group (ECC, n=10) and concentric exercise group (CON, n=10). All subjects performed 10 sets of 6 maximal isokinetic eccentric (ECC 1) or concentric (CON) contractions with the non-dominant arm in a randomized, with 4 wk between bouts (ECC 2). Skeletal muscle damage index (ROM, VAS, Plasma CK), inflammation mediators (TNF-α, IL-1, IL-6), immunocomperent cells (CD3+, CD4+, CD8+, CD19+), bone merrow progenitor cell (CD34+) and leukocytes were measured before, immediately after, 2, 24, 48, 72, and 96 h after exercise. Changes in ROM and VAS were greater (P<.05) after ECC 1 than CON and ECC 2. Increases in TNF-α and IL-6 were greater (P<.05) 24, 48 and 72 h after ECC 1 than CON and ECC 2. Increases in neutrophils were greater (P<.05) 2 h after ECC 1 than CON and ECC 2. It was confirmed that muscle damage was greater following eccentric than concentric contractions as well as first bout than second bout in the elderly, and suggested that TNF-α, IL-6 and neutrophils should closely correlate with magnitude of muscle damage.

Reliability of Cu Interconnect under Compressive Fatigue Deformation Varying Interfacial Adhesion Treatment (유연소자용 기판과의 접착 특성에 따른 구리 배선의 압축 피로 거동 및 신뢰성)

  • Min Ju Kim;Jeong A Heo;Jun Hyeok Hyun;So-Yeon Lee
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.30 no.4
    • /
    • pp.105-111
    • /
    • 2023
  • Electronic devices have been evolved to be mechanically flexible that can be endured repetitive deformation. This evolution emphasizes the importance of long-term reliability in metal wiring connecting electronic components, especially under bending fatigue in compressed environments. This study investigated methods to enhance adhesion between copper (Cu) and polyimide (PI) substrates, aiming to improve the reliability of copper wiring under such conditions. We applied oxygen plasma treatment and introduced a chromium (Cr) adhesion layer to the polyimide substrate. Our findings revealed that these adhesion enhancement methods significantly affect compression fatigue behavior. Notably, the chromium adhesion layer, while showing weaker fatigue characteristics at 1.5% strain, demonstrated superior performance at 2.0% strain with no delamination, outperforming other methods. These results offer valuable insights for improving the reliability of flexible electronic devices, including reducing crack occurrence and enhancing fatigue resistance in their typical usage environments.

Research of Diffusion Bonding of Tungsten/Copper and Their Properties under High Heat Flux

  • Li, Jun;Yang, Jianfeng
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2011.05a
    • /
    • pp.14-14
    • /
    • 2011
  • W (tungsten)-alloys will be the most promising plasma facing armor materials in highly loaded plasma interactive components of the next step fusion reactors due to its high melting point, high sputtering resistance and low deuterium/tritium retention. The bonding technology of tungsten to Cu alloy was one of the key issues. In this paper, W/CuCrZr diffusion bonding has been performed successfully by inserting pure metal interlay. The joint microstructure, interfacial elements migration and phase composition were analyzed by SEM, EDS, XRD, and the joint shear strength and micro-hardness were investigated. The mock-ups were fabricated successfully with diffusion bonding and the cladding technology respectively, and the high heat flux test and thermal fatigue test were carried out under actively cooling condition. When Ni foil was used for the bonding of tungsten to CuCrZr, two reaction layers, Ni4W and Ni(W) layer, appeared between the tungsten and Ni interlayer with the optimized condition. Even though Ni4W is hard and brittle, and the strength of the joint was oppositely increased (217 MPa) due primarily to extremely small thicknesses (2~3 ${\mu}m$). When Ti foil was selected as the interlayer, the Ti foil diffused quickly with Cu and was transformed into liquid phase at $1,000^{\circ}C$. Almost all of the liquid was extruded out of the interface zone under bonding pressure, and an extremely thin residual layer (1~2 ${\mu}m$) of the liquid phase was retained between the tungsten and CuCrZr, which shear strength exceeded 160 MPa. When Ni/Ti/Ni multiple interlayers were used for bonding of tungsten to CuCrZr, a large number of intermetallic compound ($Ni_4W/NiTi_2/NiTi/Ni_3T$) were formed for the interdiffusion among W, Ni and Ti. Therefore, the shear strength of the joint was low and just about 85 MPa. The residual stresses in the clad samples with flat, arc, rectangle and trapezoid interface were estimated by Finite Element Analysis. The simulation results show that the flat clad sample was subjected maximum residual stress at the edge of the interface, which could be cracked at the edge and propagated along the interface. As for the rectangle and trapezoid interface, the residual stresses of the interface were lower than that of the flat interface, and the interface of the arc clad sample have lowest residual stress and all of the residual stress with arc interface were divided into different grooved zones, so the probabilities of cracking and propagation were lower than other interfaces. The residual stresses of the mock-ups under high heat flux of 10 $MW/m^2$ were estimated by Finite Element Analysis. The tungsten of the flat interfaces was subjected to tensile stresses (positive $S_x$), and the CuCrZr was subjected to compressive stresses (negative $S_x$). If the interface have a little microcrack, the tungsten of joint was more liable to propagate than the CuCrZr due to the brittle of the tungsten. However, when the flat interface was substituted by arc interfaces, the periodical residual stresses in the joining region were either released or formed a stress field prohibiting the growth or nucleation of the interfacial cracks. Thermal fatigue tests were performed on the mock-ups of flat and arc interface under the heat flux of 10 $MW/m^2$ with the cooling water velocity of 10 m/s. After thermal cycle experiments, a large number of microcracks appeared at the tungsten substrate due to large radial tensile stress on the flat mock-up. The defects would largely affect the heat transfer capability and the structure reliability of the mock-up. As for the arc mock-up, even though some microcracks were found at the interface of the regions, all microcracks with arc interface were divided into different arc-grooved zones, so the propagation of microcracks is difficult.

  • PDF

Effects of Unripened Cheese Supplements on Lipid and Antioxidant Status in Hypercholesterolemic SD Rats (고콜레스테롤혈증 흰쥐에서 비숙성치즈의 보충섭취가 지질 및 항산화 체계에 미치는 영향)

  • Seo, Bo-Young;Spengler, Bernhard;Rompp, Andreas;Schober, Yvonne;Yoon, Yoe-Chang;Park, Eun-Ju
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.41 no.1
    • /
    • pp.65-72
    • /
    • 2012
  • The aim of this study was to evaluate the effects of unripened cheese supplements on lipid metabolism and antioxidant status in hypercholesterolemic SD rats. Rats were induced to have hypercholesterolemia by feeding them high cholesterol diet (0.5% cholesterol and 0.2% sodium cholate) for 4 weeks and then divided into 2 groups. One group was fed a high cholesterol diet with 5% unripened cheese (URC) daily for 6 weeks, and the other one was fed a high cholesterol diet without 5% unripened cheese (URC) daily for 6 weeks. Significantly-increased plasma total cholesterol (TC), triglycerides (TG), and AST activity because of the high-cholesterol diet were reduced 18.8%, 40.5%, and 33%, respectively, by URC supplementation. Also, URC lowered hepatic total lipids, TCs, and TGs, whereas fecal lipid profiles were not changed by URC. The supplementation of URC resulted in an increase of plasma retinol and ${\alpha}$-tocopherol by 40.5% and 39.2% and leukoytic DNA resistance to oxidative stress by 52.3% compared to hypercholesterolemic control. These results suggest that unripened cheese supplements could exert significant health benefits to those with hypercholesterolemia through ameliorating lipid profiles and antioxidant effects.

Effects of Exercise Training and Selenium on MCT1 and MCT4 Protein Levels in Skeletal Muscles of Diabetic Goto-Kakizaki Rats (지구성 운동과 셀레니움 투여가 당뇨 Goto-kakizaki 쥐의 골격근의 MCT1과 MCT4단백질 발현수준에 미치는 효과)

  • Kim, Seung-Seok;Kang, Eun-Bum;Eum, Hyun-Sub;Kim, Bum-Su;Lim, Yea-Hyun;Park, Joon-Young;Cho, In-Ho;Oh, Yoo-Sung;Kwak, Yi-Sub;Cho, Joon-Yong
    • Journal of Life Science
    • /
    • v.18 no.1
    • /
    • pp.1-8
    • /
    • 2008
  • The purpose of this study was to determine the possible additive effects of endurance exercise training (EXER) and selenium (SELE) on the improvements of glucose and lactate transport capacities in diabetic Goto-kakizaki rats. Animals either remained sedentary control (SED) or performed EXER or received SELE [$5{\mu}mol$ kg body wt (-1) day (-1)], or underwent both EXER and SELE (COMBI), which lasted for 6 wk. Compared with sedentary control, EXER alone or the SELE alone group, or the combined treatment group had significant reduction in glucose response measured at 90 min and 120 min during an intraperitoneal glucose tolerance test (IPGTT) and body weight after 6week treatment. EXER alone, or combined group individually had significantly higher glycogen contents in liver compared with SED or SELE groups. EXER alone increased glycogen content in soleus and plantaris compared with SED, and this parameter was increased to greatest extent in the combined treatment groups compared with SED or SELE groups. EXER alone, SELE alone or COMBI, caused significant decreases in the plasma lactates, serum glucose, insulin, total cholesterol and HOMA-IR along with a significant increase in high-density lipoprotein cholesterol compared with SED. In addition, EXER or COMBI individually had significantly lower serum triacylglycerol compared with SED or SELE. With respect to protein expression related to glucose and lactate transport capacities, EXER alone, SELE alone, or COMBI increased in MCT1 and MCT4 protein level in soleus and plantaris. Furthermore, EXER alone, SELE alone or COMBI caused significant increases in mt MCT1 protein level in soleus and plantaris. The findings of the current study suggest that endurance exercise training and selenium treatment may provide therapeutic values to type II diabetic patients with peripheral insulin resistance and hyperlactatecemia by improving glucose and lactate transport capacities, leading to improvements in plasma lactate, serum glucose, insulin and lipid profiles (TC, TG, HDL).

Lipase-Inhibitory and Anti-Oxidative Activity of the Methanol Extract and the Powder of Phellinus linteus (상황버섯 자실체 메탄올 추출물과 분말의 지방소화효소 억제 및 항산화 활성)

  • Kim, Ji-Hyun;Son, In-Suk;Kim, Jong-Sang;Kim, Ki-Hoon;Kwon, Chong-Suk
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.37 no.2
    • /
    • pp.154-161
    • /
    • 2008
  • Phellinus linteus (PL) has been known to exhibit potent biological activity. The present study was designed to investigate lipase-inhibitory and anti-oxidative activity of the methanol extract and the powder of PL fruiting body. The methanol extract of PL appeared to have the inhibitory activity against pancreatic lipase with an $IC_{50}$ value of $36.3\;{\mu}g/mL$, and the scavenging activity of DPPH radical with an $IC_{50}$ value of $20.1\;{\mu}g/mL$, which was similar to that of vitamin C ($IC_{50}\;18.3\;{\mu}g/mL$). To investigate the lipase-inhibitory and anti-oxidative effect of PL on animal, Sprague-Dawley rats were fed with high-fat diet supplemented with either 2% or 5% PL powder for 8 weeks. Total food intake was significantly increased, but body weight was not changed by PL powder supplementation. However, fecal fat excretion of the experimental groups fed with the PL powder were higher than that of the control group. PL powder showed a decrease in the plasma total cholesterol, LDL-cholesterol, and the hepatic total cholesterol levels. The anti-oxidative enzyme activities were also affected by PL supplementation. Glutathione peroxidase (GSH-Px) in the plasma and liver were significantly increased by 98% and 46% in the 2% PL group, and 99% and 32% in the 5% PL group, respectively. Total superoxide dismutase (T-SOD) activity was not affected by PL supplementation. DNA damage was measured by the comet assay in the lymphocytes collected after 2 weeks, 4 weeks, and 8 weeks of feeding PL supplemented diet. Lymphocyte DNA damage was decreased in the PL supplemented group. Furthermore, PL feeding enhanced the resistance to lymphocyte DNA damage caused by an oxidant challenge with $H_2O_2$.