• Title/Summary/Keyword: Plasma process

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Characteristics of Micro EDM using Wire Electrical Discharge Grinding for Al2O3/CNTs Hybrid Materials (Al2O3/CNTs 하이브리드소재의 와이어 방전연삭을 이용한 마이크로 방전가공 특성)

  • Tak, Hyun-Seok;Kim, Jong-Hun;Lim, Han-Suk;Lee, Choon-Tae;Jeong, Young-Keun;Kang, Myung-Chang
    • Journal of Powder Materials
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    • v.17 no.4
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    • pp.319-325
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    • 2010
  • Electrical discharge machining (EDM) is an attractive machining technique but it requires electrically conductive ceramic materials. In this study, Alumina matrix composites reinforced with CNTs were fabricated through CNT purification, mixing, compaction and spark plasma sintering (SPS) processes. $Al_2O_3$ nanocomposites with the different CNT concentrations were synthesized. The mechanical and electrical characteristics of $Al_2O_3$/CNTs composites were examined in order to apply the materials to the EDM process. In addition, micro-EDM using wire electrical discharge grinding (WEDG) was conducted under the various EDM parameters to investigate the machining characteristics of machined hole by Field Emission Scanning Electron Microscope (FE-SEM). The results show that $Al_2O_3$/CNTs 10%Vol. was more suitable than the other materials because high conductivity and large discharge energy caused violent sparks resulting in bad machining accuracy and surface quality.

A Role of Unsaturated Fatty Acid in Animal Reproductive Cells and Biology

  • Hwangbo, Yong;Kim, Hwa-Young;Lee, Yu-Rim;Lee, Seung Tae;Lee, EunSong;Cheong, Hee-Tae;Yang, Boo-Keun;Park, Choon-Keun
    • Reproductive and Developmental Biology
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    • v.40 no.2
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    • pp.15-22
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    • 2016
  • As a one of unsaturated fatty acid, polyunsaturated fatty acids (PUFAs) have multiple actions: as precursor of prostaglandins (PGs), steroid hormone synthesis and energy production in animal reproduction. PUFAs, which include omega-3 (n-3) and omega-6 (n-6), are derived from the diet and changed by diet, species, breed and season. The plasma membrane of spermatozoa in mammals contain various PUFAs. These composition of PUFAs regulate the membrane fluidity and cause lipid peroxidation via generation of reactive oxygen species (ROS). Induced lipid peroxidation by ROS decreased viability and motility of spermatozoa, and it is reduced by addition of antioxidant and low concentration of PUFAs. Because oocytes of animal have a high lipid components, process of oocyte maturation and embryo development are influenced by PUFAs. In in vitro study, oocyte maturation, embryo development, intracellular cAMP and MAPK activity were increased by treatment of n-3 ${\alpha}$-linolenic acid (ALA) during maturation, whereas n-6 linoleic acid (LA) negatively influenced. Also, inhibition of fatty acid metabolism in oocyte influenced blastocyst formation of cattle. PGs are synthesized from PUFAs and various PUFAs influence PGs via regulation of PG-endoperoxide synthase (PTGS). Steroid hormone synthesis from cholesterol is regulated by expression of steroid acute regulator (StAR) protein and mRNA. Exogenous n-3 and n-6 PUFAs altered sex hormone in animal through stimulate or inhibit StAR activity. Because PUFAs altered PG and steroid hormone synthesis, follicular development was influenced by PUFAs. This effect of unsaturated fatty acid could provide information for improvement of reproductive ability in animals.

Development of Three D.O.F Alignment Stage for Vacuum Environment (진공용 3자유도 얼라인먼트 스테이지 개발)

  • Han, Sang-Jin;Park, Jong-Ho;Park, Hui-Jae
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.11
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    • pp.138-147
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    • 2001
  • Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.

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Radial uniformity problem in RFI ionized magnetron sputtering (RFI ionized magnetron sputtering에서 radial uniformity 문제)

  • 주정훈
    • Journal of the Korean Vacuum Society
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    • v.6 no.1
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    • pp.85-90
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    • 1997
  • A new ionized sputtering process was developed to fill small trench or via using additional ionizing mechanism of sputtered particles from 32cm $AlCu_x$(x=0.5%) cathode target with rotating magnet, then drawn toward substrate by small negative DC potential. The radial uniformity in RFI magnetron sputtering was studied by plasma diagnosis and appropriate RFI coil design to improve it. Optical emission intensities of excited species. $Ar^{\circ}, \;Ar^+;Al^+, \;Al^{\circ}$ are measured across the radial direction and showed close correlation with deposit's bottom to top thickness ratios in trenches and vias of submicron opening and 1.5 aspect ratio. After increase of the diameter of RF coil from 29 cm to 32 cm and improved the power leading feedthrough symmetry by removal of asymmetric single turn region, there was an increase of uniformity from 7.5% to 1.5% in bottom to top thickness ratio in 0.6 $\mu\textrm{m}$ vias.

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A Study on Remote CO2 Laser Welding for the Development of Automobive Parts (차체부품 개발을 위한 원격 CO2 레이저 용접에 관한 연구)

  • Song, Mun-Jong;Lee, Gyu-Hyun;Lee, Mun-Yong;Kim, Sok-Won
    • Journal of Welding and Joining
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    • v.28 no.5
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    • pp.75-79
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    • 2010
  • The Remote welding system(RWS) using $CO_2$ laser equipment has focusable distance of laser beam longer than 800 mm from workpiece and can deflect the laser beam by the scanner mirrors very rapidly. In the case of normal welding system based on robot, there is a limit to move the shortest path in short time and this causes interference between robot and workpiece. On the other hand, RWS is the optimized equipment to get big merits with advanced sequence of welding and short cycle time. However, there is still a pending task such as the control of plasma in the welding process of thick sheets therefore, it requires high power laser beam because of the absence of assist gas equipment in itself. In this study, high-tensile steel plates were overlap welded with $CO_2$ RWS for the production of car body and the influence of penetration depth according to the existence of assist gas was analyzed. Excellent tensile strength with enough width of molten zone independent to penetration depth was observed under welding condition with 3.6 kW laser power and 2.8 m/min welding speed without assist gas. Finally, the proto-type automotive parts were produced by applying the deduced optimal welding condition.

Development of low deformation ATIG welding process for high penetration aspect ratio in thick stainless steel welding (후판 스테인리스 용접에서 높은 용입형상비의 저변형 ATIG용접 공정 개발)

  • Ham, Hyo-Sik;Seo, Ji-Seok;Ha, Jong-Moon;Im, Sung-Bin;Oh, Dong-Soo;Cho, Sang-Myung
    • Proceedings of the KWS Conference
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    • 2009.11a
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    • pp.7-7
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    • 2009
  • TIG 용접에서는 후판 용접의 경우 용입의 한계 때문에 깊고 넓은 그루브 가공을 하여 다층 용접을 한다. 이 때, 그루브를 채우는 용착금속에 의한 응고 수축과 과대한 입열로 인한 변형이 문제시 되고 있다. 변형을 줄이기 위해서는 용착금속의 양과 입열량을 줄여야 한다. 이러한 문제를 해결하기 위해 그루브의 루트패이스를 두껍게 하고 그루브각을 줄여서 용착량을 줄인다. 이때, 좁은 그루브에서 두꺼운 루트패이스를 완전 용입할 수 있는 용접 프로세스가 필요하다. 비드가 좁고 깊은 용입 특성을 가지는 Plasma welding(PAW) 경우에는 좁은 그루브 속에 토치가 접근하기 어려워 적용하기 어렵다. 따라서 접근성이 용이한 TIG 용접에서 높은 용입형상비를 가지는 용접공정 개발이 필요하다. 선행연구로 높은 용입 형상비를 가지는 Active flux Tungsten Inert Gas(ATIG) 용접이 연구되었다. ATIG의 용입 증가 메커니즘으로는 Marangoni effect, 음이온들로 인한 아크 수축 효과, 절연 플럭스에 의한 아크 수축효과 등으로 알려져 있다. 또한 선행연구에서 ATIG에서 Ar가스에 He 또는 $H_2$ 가스를 첨가하면 용입이 더욱 증가하는 것을 확인하였다. 본 연구에서는 A-TIG에 He 가스를 적용하고 아크길이 0.5mm, 1.0mm, 2.0mm와 전극 선단각 30도, 60도, 90도에 따른 용입 형상비와 변형량을 검토하기 위해 실험을 하였다. 실험 결과는 아크길이가 감소할수록 전극 선단각이 증가할수록 용입 형상비는 증가하였고, 변형량은 감소하였다.

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Purification of Si using Catalytic CVD

  • Jo, Chul-Gi;Lee, Kyeong-Seop;Song, Min-Wu;Kim, Young-Soon;Shin, Hyung-Shik
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.11a
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    • pp.383-383
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    • 2009
  • Silicon is commercially prepared by the reaction of high-purity silica with wood, charcoal, and coal, in an electric arc furnace using carbon electrodes, so called the metallurgical refining process, which produces ~98% pure Si (MG-Si). This can be further purified to solar grade silicon (SoG-Si) by various techniques. The most problematic impurity elements are B and P because of their high segregation coefficients. In this study, we explored the possibility of the using Cat-CVD for Si purification. The existing hot-wire CVD was modified to accommodate the catalyzer and the heating source. Mo boat (1.5 cm ${\times}$ 1 cm ${\times}$ 0.2 cm) was used as a heating source. Commercially available Si was purchased from Nilaco corporation (~99% pure). This powder was kept in the Mo-boat and heated to the purification temperature. In addition to the purification by cat-CVD technique, other methods such as thermal CVD, plasma enhanced CVD, vacuum annealing was also tried. It is found that the impurities are reduced to a great extent when treated with cat-CVD method.

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Non-linear optical properties of PECVD nanocrystal-Si nanosecond excitation (PECVD로 제조된 나노결정실리콘 비선형 광학적특성)

  • Yang, Hyeon-Hun;Kim, Han-Wool;Kim, Joo Hoe;Kim, Chul Joong;Lee, Chang Gwon
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.60.2-60.2
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    • 2011
  • A study of the non-linear optical properties of nanocrystal-Si embedded in SiO2 has been performed by using the z-scan method in the nanosecond and femtosecond ranges. Substoichiometric SiOx films were grown by plasma-enhanced chemical-vapor deposition(PECVD) on silica substrates for Si excesses up to 24 at/%. An annealing at $1250^{\circ}C$ for 1 hour was performed in order to precipitate nanocrystal-Si, as shown by EFTEM images. Z-scan results have shown that, by using 5-ns pulses, the non-linear process is ruled by thermal effects and only a negative contribution can be observed in the non-linear refractive index, with typical values around $-10-10cm^2/W$. On the other hand, femtosecond excitation has revealed a pure electronic contribution to the nonlinear refractive index, obtaining values in the order of 10-12 cm2/W. Simulations of heat propagation have shown that the onset of the temperature rise is delayed more than half pulse-width respect to the starting edge of the excitation. A maximum temperature increase of ${\Delta}T=123.1^{\circ}C$ has been found after 3.5ns of the laser pulse maximum. In order to minimize the thermal contribution to the z-scan transmittance and extract the electronic part, the sample response has been analyzed during the first few nanoseconds. By this method we found a reduction of 20% in the thermal effects. So that, shorter pulses have to be used obtain just pure electronic nonlinearities.

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Metal-induced Crystallization of Amorphous Semiconductor on Glass Synthesized by Combination of PIII&D and HiPIMS Process

  • Jeon, Jun-Hong;Choi, Jin-Young;Park, Won-Woong;Moon, Sun-Woo;Lim, Sang-Ho;Han, Seung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.286-286
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    • 2011
  • 최근 폴리머를 기판으로 하는 Flexible TFT (thin film transistor)나 3D-ULSI (three dimensional ultra large-scale integrated circuit)에서 높은 에너지 소비효율과, 빠른 반응 속도를 실현 시키기 위해 낮은 비저항(resistivity)을 가지며, 높은 홀 속도(carrier hall mobility)를 가지는 다결정 반도체 박막(poly-crystalline thin film)을 만들고자 하고 있다. 이를 실현 시키기 위해서는 높은 온도에서 장시간의 열처리가 필요하며, 이는 폴리머 기판의 문제점을 야기시킬 뿐 아니라 공정시간이 길다는 단점이 있었다. 이에 반도체 박막의 재결정화 온도를 낮춰주는 metal (Al, Ni, Co, Cu, Ag, Pd etc.,)을 이용하여 결정화 시키는 방법이 많이 연구 되어지고 있지만, 이 또한 재결정화가 이루어진 반도체 박막 안에 잔여 금속(residual metal)이 존재하게 되어 비저항을 높이고, 홀 속도를 감소시키는 단점이 있다. 이에 본 실험은 HiPIMS (High power impulse magnetron sputtering)와 PIII and D (plasma immersion ion implantation and deposition) 공정을 복합시킨 프로세스로 적은양의 금속이온주입을 통하여 재결정화 온도를 낮췄을 뿐 아니라, 잔여 하는 금속의 양도 매우 적은 다결정 반도체 박막을 만들 수 있었다. 분석 장비로는 박막의 결정화도를 측정하기 위해 GAXRD (glancing angle X-ray diffractometer)를 사용하였고, 잔여 하는 금속의 양과 화학적 결합 상태를 알아보기 위해 XPS를 통해 분석을 하였다. 마지막으로 홀 속도와 비저항을 측정하기 위해 Hall measurement와 Four-point prove를 사용하였다.

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Study on Availability about the Dielectric Constant of SiOC Thin Film (SiOC 박막의 허용 가능한 유전상수 설정에 대한 연구)

  • Oh, Teresa
    • Journal of the Korean Vacuum Society
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    • v.19 no.5
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    • pp.347-352
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    • 2010
  • To research the reduction of the dielectric constant depending on the ionic and electronic effects, the dielectric constant of SiOC film was obtained by C-V measurement using the structure of metal/SiOC film/Si, and $n^2$ calculated by the refractive index. The dielectric constant of SiOC film consists with dipole, ions and electrons. However, the dipole moment is ignored in the effect of dielectric constant in SiOC film. THe SiOC film was deposited by the plasma energy, and the gas precursor was dissociated and recombined. Therefore, the dielectric constant of the deposited film consisted of the polarity with ions. THe dielectric constant decreased after annealing process, because of the evaporation of OH hydroxyl group with polarity. The ideal SiOC film as low-k materials was annealed film with lowering the polarity, which is suitable for physical-chemical and electrical properties as an inter layer dielectric materials.