• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.302-305
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• 1995

ITO(indium tin oxide) that is both conductive in electricity and transparent to the visible ray is called transparent conducting thin film. Nowaday, according to the development of flat panel display such as LCD(Liquid Crystal display, EL(electolumine- scence display), PDP(plasma display panel), ECD(electrocromic display), the higher quality in the low temperature process has been asked to reduce the production cost and to have a good uniformity on a large substrate. In this study, we prepared indium tin oxide(ITO) by a cylindrical DC magnetron sputtering with Indium-tin (9:1) alloy target instead of indium-tin oxide target. To reduce the defact in ITO, the effect on ITO by varing the magnetic field intensity and the applied voltage ares studied. the resistivity of the film deposited in oxygen partial pressure of 5% and substrate temperature of 140$^{\circ}C$. is 1.6${\times}$10$\^$-1/$\Omega$$.$cm with 85% optical transmission in viaible ray.

• Proceedings of the Korean Vacuum Society Conference
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• 2001.02a
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• pp.130-130
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• 2001

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.167-168
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• 2006

• The Optical Journal
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• s.108
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• pp.27-36
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• 2007

PDP는 우수한 화질과 단순한 패널구조의 장점을 가지고 있으며 50inch 이상 대화면 및 Full HD 구현에 대한 가격 경쟁력도 가지고 있어 다른 여타의 디스플레이 디바이스보다 발전가능성이 매우 크다. 그러나 Full HD를 지원하기 위해서는 방전 셀의 낮은 효율을 얼마나 극복할 수 있는지가 PDP 업계 최대의 문제로 지적되고 있고 현재 연구주제가 되고 있다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2005.11a
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• pp.177-177
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2001.07a
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• pp.172-172
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• 2001

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.161.2-161
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• 2003

• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.40.2-40
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• 2003

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.11a
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• pp.40-40
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• 2002

• Journal of the Korean Society for Precision Engineering
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• v.18 no.5
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• pp.171-176
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• 2001

Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. Mold for forming barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing process such as screen printing, sand-blasting and photosensitive glass methods. Mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper, Stripes of grooves of which width 48${\mu}{\textrm}{m}$ and 270${\mu}{\textrm}{m}$, depth 124${\mu}{\textrm}{m}$, pitch 274${\mu}{\textrm}{m}$ was acquired by machining hard and brittle materials of WC, Silicon, Alumina with dicing saw blade. Maximum roughness of the bottom and sidewall of the grooves was respectively 120nm, 287nm in grooving WC. Maximum tilt angle caused by difference between upper-most width and lower-most width was 2$^{\circ}$. Maximum Radius of bottom curvatures was 7.75${\mu}{\textrm}{m}$. This results satisfies the specification for barrier ribs of 50 inch XGA PDP if the groove form of mold was fully transferred to the barrier ribs. Barrier ribs were formed with Silicone rubber mold, which is transferred from grooved hard materials. Silicone rubber mold has elasticity accommodating the waveness of lower glass plate of PDP.