• Proceedings of the Korean Institute of Surface Engineering Conference
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• 한국표면공학회 2007년도 추계학술대회 논문집
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• pp.159-160
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• 2007

저온 플라즈마 침탄 처리 후 연속적인 공정으로 저온 플라즈마 질화를 실시하여 내식성과 표면경도를 향상시키는 처리에서 질화처리 시 Ar 가스가 표면특성에 미치는 영향을 조사 하였다. 모든 시편의 경도가 미처리재 보다 약4배 증가하였으며, Ar가스의 양이 증가할수록 N의 침투깊이가 깊어졌다. 전체 경화증의 두께는 거의 일정하였고, 경화층은 모재보다 내식성이 증가되어 단면조직사진에서 밝게 나타났다.

• Journal of Surface Science and Engineering
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• 제50권4호
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• pp.272-276
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• 2017

The response of AISI 310 type austenitic stainless steel to the novel low temperature plasma carburizing process has been investigated in this work. This grade of stainless steel shows better corrosion resistance and high temperature oxidation resistance due to its high chromium and nickel content. In this experiment, plasma carburizing was performed on AISI 310 stainless steel in a D.C. pulsed plasma ion nitriding system at different temperatures in $H_2-Ar-CH_4$ gas mixtures. The working pressure was 4 Torr (533Pa approx.) and the applied voltage was 600 V during the plasma carburizing treatment. The hardness of the samples was measured by using a Vickers micro hardness tester with the load of 100 g. The phase of carburized layer formed on the surface was confirmed by X-ray diffraction. The resultant carburized layer was found to be precipitation free and resulted in significantly improved hardness and corrosion resistance.

• Journal of Surface Science and Engineering
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• 제43권3호
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• pp.154-158
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• 2010

Numerical analysis is done to investigate the effects of pulse bias on the plasma processing characteristics like ion doping and ion nitriding by using fluid dynamic code with a 2D axi-symmetric model. For 10 mTorr of Ar plasma, -1 kV of pulse bias was simulated. Maximum sheath thickness was around 20 mm based on the electric potential profile. The peak electron temperature was about 20 eV, but did not affect the averaged plasma characteristics of the whole chamber. Maximum ion current density incident on the substrate was 200 $A/m^2$ at the center, but was decreased down to 1/10th at radius 100 mm, giving poor radial uniformity.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.220.2-220.2
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• 2014

플라즈마 질화 기술은 기존의 침탄 혹은 고주파 표면 경화 기술 대비 낮은 온도에서 열처리 공정이 진행됨에 따라 열 변형을 최소화 시킬 수 있으며, 후 가공을 간소화 시킬 수 있다는 장점으로 인해 자동차 부품 및 기타 응용 산업 분야에 있어 큰 관심을 받고 있다. 그러나 공정 진행에 장시간이 소요되고 복잡한 형상 및 홀 가공에 의한 기능부, 특히 내경부에 대한 균일 질화 처리가 어려워 실제 응용분야 확장에 큰 제약이 따르고 있다. 이를 해결하기 위해 본 연구에서는 일반 글로우 방전 대비 플라즈마 밀도가 10배 이상 높은 공공 음극 방전(Hollow Cathode Discharge, 이하 HCD) 현상을 이용하여 고속 고균일 질화공정을 개발하고자 하였으며, 상용화 적용을 위한 연구를 함께 진행하였다. 사용된 시료로는 실제 자동차 부품으로 사용되는 SCM415 소재의 ring gear와 slip yoke pipe를 사용하였으며, HCD 형성을 위해 특화된 플라즈마 질화장비를 활용, 공정 압력 및 인가 전력 등을 변수로 실험을 진행 하였다. 그 결과 질화 처리 속도에 있어 기존 글로우 방전 플라즈마 질화 대비 1/4 이하 수준으로 그 소요 시간을 단축시킬 수 있었으며, 다량 장입된 시료의 내경 기능부에 있어서도 높은 균일도를 갖는 질화표면이 형성됨을 확인할 수 있었다. 또한 기능부 표면에 형성된 HCD 현상을 열원으로 사용함으로써 외부가열 장치를 사용하지 않으면서도 기존의 hot wall 방식보다 높은 질화 균일도 구현이 가능하였으며, 소요 자원 및 전력 사용 측면에 있어서도 공정 시간 단축 및 외부 가열 공정 제거에 의한 높은 수준의 에너지 절약이 가능하였다.

• Korean Journal of Materials Research
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• 제12권1호
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• pp.44-47
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• 2002

DV(Discrete Variation)-X${\alpha}$ cluster calculation was employed to calculate the electronic states of ${\gamma}'- Fe_4N$ which was one of iron nitride phases synthesized from plasma ion nitriding to improve surface hardness and wear resistance. The result of calculated electron density of states for Fe was similar to the result of band calculation. The cluster used for calculation of electronic states of ${\gamma}'-Fe_4N$ was based on $Fe_{14}N$ cluster which comprises 15 atoms. Finally the electronic states of ${\gamma}'- Fe_4N$ such as net-charge, band order, energy level, electron wave-function, and contour map for electron density were derived by the calculation.

• Korean Journal of Materials Research
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• 제12권6호
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• pp.427-430
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• 2002

Plasma nitrocarburizing treatment was performed for SCM 435 steel by using a plasma ion nitriding system. The effects of the variation of nitrogen and methan contents upon the hardened layer was investigated. Both the thickness of the compound layer and the amount of $\varepsilon$ phase in the compound layer increased with increasing nitrogen content. However, the thickness of the compound layer decreased due to unstable plasma for an atmosphere containing 90% $N_2$ gas content in the gas mixture. The amount of $\varepsilon$phase in the compound layer increased with increasing $CH_4$ gas content. For $CH_4$ gas content more than 2% in the gas mixture, the thickness of the compound layer decreased due to the formation of $\theta$ phase.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 한국표면공학회 2012년도 추계총회 및 학술대회 논문집
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• pp.175-177
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• 2012

A corrosion resistance and hard nitrocarburized layer was distinctly formed on 310 austenitic stainless steel substrate by DC plasma nitrocarburizing. Basically, 310L austenitic stainless steel has high chromium and nickel content which is applicable for high temperature applications. In this experiment, plasma nitrocarburizing was performed in a D.C. pulsed plasma ion nitriding system at different temperatures in $H_2-N_2-CH_4$ gas mixtures. After the experiment structural phases, micro-hardness and corrosion resistance were investigated by the optical microscopy, X-ray diffraction, scanning electron microscopy, micro-hardness testing and Potentiodynamic polarization tests. The hardness of the samples was measured by using a Vickers micro hardness tester with the load of 100 g. XRD indicated a single expanded austenite phase was formed at all treatment temperatures. Such a nitrogen and carbon supersaturated layer is precipitation free and possesses a high hardness and good corrosion resistance.

• Korean Journal of Materials Research
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• 제14권4호
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• pp.265-269
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• 2004

Plasma nitrocarburising and post oxidation were performed on SCM435 steel by a pulsed plasma ion nitriding system. Plasma oxidation resulted in the formation of a very thin ferritic oxide layer 1-2 $\mu\textrm{m}$ thick on top of a 15～25 $\mu\textrm{m}$ $\varepsilon$-F $e_{2-3}$(N,C) nitrocarburized compound layer. The growth rate of oxide layer increased with the treatment temperature and time. However, the oxide layer was easily spalled from the compound layer either for both oxidation temperatures above $450^{\circ}C$, or for oxidation time more than 2 hrs at oxidation temperature $400^{\circ}C$. It was confirmed that the relative amount of $Fe_2$$O_3$, compared with $e_3$$O_4$, increased rapidly with the oxidation temperature. The amounts of ${\gamma}$'-$Fe_4$(N,C) and $\theta$-$Fe_3$C, generated from dissociation from $\varepsilon$-$Fe_{2-3}$ /(N,C) phase during $O_2$ plasma sputtering, were also increased with the oxidation temperature.e.

• Korean Journal of Materials Research
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• 제12권7호
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• pp.568-572
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• 2002

Plasma sulfnitriding technology was employed to harden the surface of SKD61 steel. The plasma sulfnitriding was performed with 3 torr gas pressure at $580^{\circ}C$ for 20 hours. Plasma sulfnitriding resulted in the formation of very thin $2-3\mu\textrm{m}$ FeS sulfide layer on top of $15-20\mu\textrm{m}$ compound layer, which consisted of predominantly $\varepsilon$- $Fe{2-3}$ N and a second phase of $\Upsilon'-Fe_4$N. In comparision with plasma nitriding treatment, plasma sulfnitriding treatment showed better surface roughness and corrosion resistance due to the presence of the thin FeS layer. which coated microvoids and microcracks on top of the nitrided layer. It was also found that plasma sulfnitrided sample showed better wear resistance due to the presence of the thin FeS layer which acted as a solid lubricant.

• Journal of Surface Science and Engineering
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• 제29권5호
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• pp.443-448
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• 1996

In order to plasma-sulfnitride by combining ion-nitriding of a steel and sputtering of MoS$_2$, chromium-molybdenum steel was plasma-sulfritrided using hollow cathode discharge with parallel electrodes which are a main of the steel and a subsidiary cathode of $MoS_2$. The treatment was carried out at 823K for 10.8ks under 665Pa in a 30% $N_2$-70% $H_2$ gas atmosphere. Plasma-sulfnitriding layers formed of the steel were characterized with EDX, XRD, micrographic structure observation and hardness measurement. A compound layer of 8-15$\mu\textrm{m}$ and nitrogen diffusion layer of about 400$\mu\textrm{m}$ were formed on the surface of plasma-sulfnitrided steel. The compound layer consisted of FeS containing Mo and iron nitrides. The nitrides of $\varepsilon$-$Fe_2_3N$ and $\gamma$'-$Fe_4N$ formed under the FeS. The thickness of compound layer and surface hardness were different with the gaps between main and subsidiary cathodes even in the same sulfnitriding temperature. The surface hardnesses after plasma-sulfnitriding were distributed from 640 to 830Hv. The surface hardness was higher in the plasma-sulfnitriding than the usual sulfnitriding in molten salt. This may be due to Mo in sulfnitriding layer.