• Title/Summary/Keyword: Plasma intensity

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Oxygen Plasma Characterization Analysis for Plasma Etch Process

  • Park, Jin-Su;Hong, Sang-Jeen
    • Journal of the Speleological Society of Korea
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    • no.78
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    • pp.29-31
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    • 2007
  • This paper is devoted to a study of the characterization of the plasma state. For the purpose of monitoring plasma condition, we experiment on reactive ion etching (RIE) process. Without actual etch process, generated oxygen plasma, measurement of plasma emission intensity. Changing plasma process parameters, oxygen flow, RF power and chamber pressure have controlled. Using the optical emission spectroscopy (OES), we conform to the unique oxygen wavelength (777nm), the most powerful intensity region of the designated range. Increase of RF power and chamber pressure, emission intensity is increased. oxygen flow is not affect to emission intensity.

Study on the characteristics of the plasma induced by lap-joint $CO_2$ laser welding of automotive steel sheets (자동차용 강판의 겹치기 $CO_2$ 레이저 용접에서 발생되는 플라즈마 특성에 관한 연구)

  • 남기중;박기영;이경돈
    • Laser Solutions
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    • v.5 no.1
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    • pp.33-42
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    • 2002
  • In order to investigate the characteristics of the plasma induced by lap-joint CO$_2$ laser welding of automotive steel sheets, the effects of welding speed, shield gas flow rate, gap size, and laser beam defocus to plasma intensity emitted from keyhole have been investigated. The plasma light is measured by fiber and photodiode. Also, the plasma images were captured by the high speed digital camera in 1000frames/sec in order to correlate the plasma light signal with plasma pattern. From the results, it is observed that the difference of the plasma intensity for between the deep penetration and partial penetration exists from 1.2 to 2 times. The plasma light intensity decreased in case of the deep penetration Is observed due to the exhausting of the plasma gas under the sheet. On the other hand, under the conditions of the deep penetration, the plasma intensity is significantly increased by controling the conditions decreasing the penetration depth. It was specially founded that the effect of 0.3mm gap size at partial penetration condition is approximately similar to deep penetration in 0mm gap. It is concluded that the plasma intensity is able to evaluate the penetration depth in lap-joint welding and appears to offer the most straightforward correlation to the welding process.

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A Study on the Influence of Coaxial Parallel Magnetic Field upon Plasma Jet (Plasma Jet의 동축평행 자계에 의한 영향에 관한 연구 ( 1 ))

  • 전춘생
    • 전기의세계
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    • v.22 no.2
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    • pp.57-69
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    • 1973
  • The aim of this study was to investigate the behaviors of plasma jet under coaxial magnetic field in paralled with it for controlling optical characteristics and input power of plasma jet without impurity and instability of arc plasma column. Because the discharge characteristics of plasma jet were so distinctively different according to the existence or non-existence of magnetic field, the input power, luminous intensity of plasma jet and thermal efficiency were comparatively studied in respect of such variables as arc current, gap of electrode, quantity of argon flow, magnetic flux density, diameter and length of nozzle, with the use of several materials which were different in diameter and length of nozzel. The results were as follows; 1) The voltage tends to show a drooping characteristic at law current and then rises gradually. The luminous intensity of plasma jet increases exponentially with arc current. 2) Arc voltage increases and luminous intensity tends to decrease gradually as gap of electrode increases. 3) Arc voltage and luminous intensity tends to decrease gradually as gap of electrode increases. 3) Arc voltage and luminous intensity increase in accordance with the quantity of argon flow. 4) At first step, arc voltage increases to maximum value with the growth of flux density and then tends to show a gradual decrease. Luminous intensity decreases with the growth flux density. 5) Arc voltage decreases as the constriction length of nozzle increases, maximum decrease is shown at the constriction length of 20(mm) and it increases beyond that value. The luminous intensity decreases as the constriction length grows. 6) Arc voltage and luminous in tensity increase with the growth of diameters of nozzle. 7) Thermal efficiency has values between 50% and 75%, being influenced by arc current, the quantity of argon flow, flux density, the length of electrode gap and the constriction length of nozzle.

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The Measurement and Analysis of Three-Dimensional Light Emitted from Plasma Disp1ay Panel by Optica1 Method (광학적인 방법에 의한 플라즈마 디스플레이 패널의 3차원 광 방출 측정과 분석)

  • Choe, Hun-Yeong;Lee, Seok-Hyeon;Lee, Seung-Geol
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.1
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    • pp.31-38
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    • 2002
  • We measured a 3-dimensional images of the light emitted from plasma display panel(PDP) by using newly proposed scanned point detecting system. In the panel without phosphor, as we scan from the rear glass to the front glass, the detected light intensity increases and the light intensity detected in the inside edge of the ITO electrodes shows the stronger intensity than others. The light intensity detected between the barrier ribs shows the largest value of brightness. Also, as the sustain voltage increases, the detected light intensity increases. In the panel with phosphor, the intensity of light detected at barrier rib shows the stronger light intensity than rear plate. Therefore, the phosphor of barrier rib is very important. From these results the 3-dimensional measurement is necessary to understand exactly the discharge phenomenon in the PDP cell.

A Study of Non-thermal Plasma Generation on a Photocatalytic Reactor Using a Ceramic Honeycomb Monolith Substrate (세라믹 벌집형 담체를 사용한 광촉매 반응기의 플라즈마 생성에 관한 연구)

  • 손건석;윤승원;고성혁;김대중;송재원;이귀영
    • Transactions of the Korean Society of Automotive Engineers
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    • v.10 no.2
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    • pp.48-54
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    • 2002
  • Since photocatalysts are activated by lights of UV wavelengths, plasma is alternatively used as a light source for a photocatalytic reactor. Light intensity generated by plasma is proportional to the surface area of catalytic material, and this, in many practical applications, is prescribed by the geometry of a plasma generator. Thus, it is crucial to increase the surface area far sufficient light intensity for photocatalytic reaction. For example, in a pack-bed type reactor, multitudes of beads are used as a substrate in order to increase the surface area. Honeycomb monolith type substrate, which has very good surface area to volume ratio, has been difficult to apply plasma as a light source due to the fact that light penetration depth through the honeycomb monolith was too short to cover sufficient area, thus resulting in poor intensity for photocatalytic reaction. In this study, nonthermal plasma generation through a photocatalytic reactor of honeycomb monolith substrate is investigated to lengthen this short penetration depth. The ceramic honeycomb monolith substrate used in this study has the same length as a three way catalyst used fur automotive applications, and it is shown that sufficient light intensity for photocatalytic reaction can also be obtained with honeycomb monolith type reactor.

GROUND LEVEL ENHANCEMENTS IN RELATION WITH ENERGETIC SOLAR FEATURES AND DISTURBANCES IN SOLAR WIND PLASMA PARAMETERS

  • VERMA, PYARE LAL
    • Publications of The Korean Astronomical Society
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    • v.30 no.2
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    • pp.47-51
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    • 2015
  • Ground Level Enhancements (GLEs) in cosmic ray intensity observed during the period of 1997-2012 have been studied with energetic solar features and disturbances in solar wind plasma parameters and it is seen that all the GLEs have been found to be associated with coronal mass ejections, hard X-ray solar flares and solar radio bursts. All the GLEs have also been found to be associated with sudden jumps in solar proton flux of energy of ${\geq}60Mev$. A positive correlation with correlation coefficient of 0.48 has been found between the maximum percentage intensity (Imax%) of Ground Level Enhancements and the peak value of solar proton flux of energy (${\geq}60Mev$). All the Ground Level Enhancements have been found to be associated with jumps in solar wind plasma velocity (JSWV) events. A positive correlation with correlation coefficient of 0.43 has been found between the maximum percentage intensity (Imax %) of Ground Level Enhancements and the peak value of solar wind plasma velocity of associated (JSWV) events. All the Ground Level Enhancements have been found to be associated with jumps in solar wind plasma pressure (JSWP) events. A positive correlation with correlation coefficient of 0.67 has been found between the maximum percentage intensity (Imax %) of Ground Level Enhancements and the peak value of solar wind plasma pressure of associated (JSWP) events and of 0.68 between the maximum percentage intensity (Imax %) of Ground Level Enhancements and the magnitude of the jump in solar wind plasma pressure of associated (JSWP) events.

Effects of Neon Plasma Emission on Optical Properties of Phosphor Layers in Surface-Type Alternate Current Plasma Display Panel

  • Jang, Sang-Hun;Cho, Ki-Duck;Tae, Heung-Sik;Park, Lee-Soon
    • 한국정보디스플레이학회:학술대회논문집
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    • 2000.01a
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    • pp.171-174
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    • 2000
  • This study uses neon and xenon gas mixture discharges to determine the effects of the neon plasma emission on the characteristics of visible emission from the stimulation of the red, green, blue(RGB) phosphor layers in a surface-type alternate current plasma display panel(AC PDP). With a mixture of less than 2% xenon to neon, it is found that the luminance changes in the visible emission of the phosphor layers are similar to those of the neon plasma emission. In the range of xenon mix ratio from 2 to 5%, the luminance of the red, green, blue(RGB) phosphor layers decreases with a decrease in the neon plasma emission intensity. However, with a mixture of above 5% xenon to neon, the luminance of the red, green, blue(RGB) phosphor layers increases regardless of a decrease in the neon plasma emission intensity. Furthermore, the color purity of the red, green, blue(RGB) phosphor layers improve as the neon plasma emission intensity decreases. Accordingly, it is concluded that the optical properties of the phosphor layers, including color purity and luminance, depend on the neon plasma discharge emission as well as the visible emission from the stimulation of the phosphor layers.

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High Intensity Exercise Induced a Redistribution of Pyridoxal 5-Phosphate Levels with Different Vitamin $B_6$ Status in Rats

  • Cho, Youn-Ok
    • Nutritional Sciences
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    • v.3 no.1
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    • pp.31-35
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    • 2000
  • The purpose of this study was to compare the changes in PLP concentrations induced by regular, moderate, and abrupt, high-intensity exercise in the plasma and tissues of vitamin B6 deficient and normal rats. Forty-eight rats were fed either a vitamin B6 deficient (-B6) diet or a normal (+B6) diet for 5 weeks and were subdivided into 4 groups:non-exercise(NE) group: regular, moderate-intensity exercise (RME) group; abrupt, high-intensity exercise (AIE) group; abrupt, high-intensity exercise and recuperation(IRE) group. The RME group was exercised on treadmill ($10^{\circ}$, 0.5-0.8km/h) for 2 hours just before sacrifice at the end of 5th week on the diet and the IER group was recuperated for three days on the diet after being exercised like the AIE group. Pyridoxal 5 -phosphate(PLP) levels were compared in the plasma, liver and skeletal muscle of the rats. Plasma PLP concentration tended to decrease in -B6 rats and tended to increase in +B6 rats with AIE. Plasma PLP concentration in both +B6 rats with AIE and no change in both -B6 and +B6 rats with RME. Muscle PLP concentration decreased in +B6 rats, showed no change in -B6 rats with AIE. Muscle PLP concentrations in both +B6 and -B6 rats did not change with RME. Plasma PLP, liver PLP and muscle PLP concentration of IER returned to those of NE in both +B6 and -B6 rats. These results suggest that changes in PLP concentration in plasma, liver and muscle occur with exercise and are affected by exercise intensity and vitamin B6 status. These changes may be due to interorgan redistribution of PLP.

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Visible Light Spectrum of H2 Plasma Generated a Commercial Electric Power in the Parallel Plate Reactor (상용전원 평행판전극 방전장치에서 수소플라스마의 가시광선스펙트럼)

  • Choi, Woon Sang;Ji, Taek Sang;Kang, Sung Soo
    • Journal of Korean Ophthalmic Optics Society
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    • v.4 no.1
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    • pp.15-20
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    • 1999
  • Visible light spectrum emitted from $H_2$ plasma in the parallel plate reactor using a commercial electric power are investigated by optical emission spectroscopy. Intensity of visible light is measured as a function of $H_2$ pressure and discharging power, and the intensity is compared with plasma density measured with the probe. As a result, the intensity is affected by plasma density and the plasma density is controlled the $H_2$ pressure and the discharging power.

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Study on Validity of 1-D Spherical Model on Aqua-plasma Power Estimation With Electrode Structure

  • Yun, Seong-Yeong;Jang, Yun-Chang;Kim, Gon-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.74-74
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    • 2010
  • The aqua-plasma is the non-thermal plasma in electrical conductive electrolyte by generates the vapor film layer on the immersed metal electrode surface. This plasma can generate the hydroxyl radical by dissociate the water molecule with the plasma electron. To develop the plasma discharge device for high efficiency in the hydroxyl radical generation, proper model for estimation of plasma power is necessary. In this work, the 1-D spherical model was developed, considering temperature dependence material constants. The relation between the plasma power and hydroxyl generation was also studied by the comparison between the optical emission intensity from the hydroxyl radical using monochromator and estimated plasma power. First, the thickness of vapor layer thickness was estimated using the Navier-Stokes fluid equation in order to calculate the discharge E-field inside vapor layer. Using the E-field magnitude and power balance on the plasma generation, it was possible to estimate the plasma power. The plasma power was assumed to uniformly fill the vapor layer and the temperature of vapor layer was fixed in the boiling temperature of electrolyte, 375K. In the experiment, the aqua-plasma was discharged in the saline by applied the voltage on the bipolar electrode. The range of applied voltage was 234 to 280V-rms in the frequency of 380 kHz. Two type electrodes were produced with two ${\Phi}0.2$ tungsten. The plasma power was estimated from the V-I signal from the two high voltage probes and current probe. The estimated plasma power agreed with the profile of emission intensity when the plasma discharged between the metal electrode and vapor layer surface. However, when the plasma discharged between the metal electrodes, the increasing rate of emission intensity was lower than the increase of plasma power. It implies that the surface reaction is more sufficient rather than the volume reaction in the radical generation, due to the high density of water molecule in the liquid.

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