• 전기학회논문지
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• 제57권4호
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• pp.648-652
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• 2008

Corona discharge and ozone generation characteristics of a wire-plate plasma reactor, with a biased third electrode, have been investigated with an emphasis on the role of the bias voltage and frequency applied on the third electrode. It was found that the wire-plate plasma reactor, with the biased third electrode, had a switching characteristic on its I-V characteristics for negative and positive discharges, which is very different from that of a conventional wire-plate plasma reactor without the third electrode. As a result, the corona discharge and ozone generation characteristics of the proposed plasma reactor could be controlled by adjusting the bias voltage and frequency of the third electrode. The corona onset and breakdown voltages, and ozone generation and yield, were increased compared with those of without the third electrode. These, however, reveal the effectiveness of the biased third electrode.

• 한국입자에어로졸학회지
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• 제5권3호
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• pp.95-109
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• 2009

A low temperature plasma process has been widely used for semiconductor fabrication and can also be applied for the preparation of solar cell, MEMS or NEMS, but they are notorious in the point of particle contamination. The nano-sized particles can be generated in the low temperature plasma process and they can induce several serious defects on the performance and quality of microelectronic devices and also on the cost of final products. For the preparation of high quality thin films of high efficiency by the low temperature plasma process, it is desirable to increase the deposition rate of thin films with reducing the particle contamination in the plasmas. In this paper, we introduced the studies on the generation and growth of nanoparticles in the low temperature plasmas and tried to introduce the recent interesting studies on nanoparticle generation in the plasma reactors.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.74-74
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• 2010

The aqua-plasma is the non-thermal plasma in electrical conductive electrolyte by generates the vapor film layer on the immersed metal electrode surface. This plasma can generate the hydroxyl radical by dissociate the water molecule with the plasma electron. To develop the plasma discharge device for high efficiency in the hydroxyl radical generation, proper model for estimation of plasma power is necessary. In this work, the 1-D spherical model was developed, considering temperature dependence material constants. The relation between the plasma power and hydroxyl generation was also studied by the comparison between the optical emission intensity from the hydroxyl radical using monochromator and estimated plasma power. First, the thickness of vapor layer thickness was estimated using the Navier-Stokes fluid equation in order to calculate the discharge E-field inside vapor layer. Using the E-field magnitude and power balance on the plasma generation, it was possible to estimate the plasma power. The plasma power was assumed to uniformly fill the vapor layer and the temperature of vapor layer was fixed in the boiling temperature of electrolyte, 375K. In the experiment, the aqua-plasma was discharged in the saline by applied the voltage on the bipolar electrode. The range of applied voltage was 234 to 280V-rms in the frequency of 380 kHz. Two type electrodes were produced with two ${\Phi}0.2$ tungsten. The plasma power was estimated from the V-I signal from the two high voltage probes and current probe. The estimated plasma power agreed with the profile of emission intensity when the plasma discharged between the metal electrode and vapor layer surface. However, when the plasma discharged between the metal electrodes, the increasing rate of emission intensity was lower than the increase of plasma power. It implies that the surface reaction is more sufficient rather than the volume reaction in the radical generation, due to the high density of water molecule in the liquid.

• 전기학회논문지
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• 제57권7호
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• pp.1218-1222
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• 2008

We investigate the effect of rise time of a pulse bias voltage on atmospheric plasma generation. With the faster rise time of the pulse bias, the glow discharge appears to be more uniformly generated along the electrodes. I-V measurement confirms that higher loading power can be obtained using the faster rise time. A new understanding for atmospheric plasma generation at a micro-gap electrode is suggested.

• 조명전기설비학회논문지
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• 제18권5호
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• pp.146-150
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• 2004

고주파 고전압 펄스전원을 제작하고 발생되는 펄스고전압의 시비율과 주파수가 비열플라즈마 발생에 미치는 영향을 실험적으로 조사하였다. 실험에 사용된 비열플라즈마 발생장치는 그물형의 방전전극을 사용한 새로운 형태로써 연면방전과 유전체 장벽방전을 동시에 이용할 수 있는 구조로 제작하였다. 비열플라즈마의 발생에 영향을 주는 주요인자는 방전에 의해 발생된 전자로써 이들의 움직임을 효과적으로 제어하기 위한 주요변수로써 시비율과 주파수를 선택하였으며 이 두 가지 변수는 전원의 효율에 관계된 전력소비량과도 직접적인 연관이 있다. 비열플라즈마 발생특성은 전류-전압특성과 방전에 의해 발생된 오존발생량을 측정함으로써 간접적으로 조사되었다. 실험결과 제작된 고주파 고전압 펄스발생장치에 의해 가장 효과적인 비열플라즈마를 발생시키는 시비율과 주파수조건을 확인할 수 있었다.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2006년도 전력전자학술대회 논문집
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• pp.470-474
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• 2006

This dissertation discuses about a ferrite core plasma source using low operating frequency without sputtering problem by the stored electric field. Compared with the conventional RF power system with 13.56MHz switching frequency, the proposed plasma power system is only separated at 400kHz, so that it makes possible to use of low cost switching elements, PWM control and soft switching. Moreover, it could improve the coupling efficiency for plasma and antenna by using the ferrite core in order to transfer the energy of the load This dissertation tried to analyze new plasma generation method for the plasma generation system by modeling the plasma load and grafting the concept of impedance matching in order to interpret it with the formula This dissertation verified the ferrite core inductive coupling plasma source authorized for 400kHz of low frequency power by applying to the semi-conductor ash process thru the measurement of ash capacity and uniformed plasma distribution on the actual wafer.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.501-501
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• 2012

A 2.45 GHz electron cyclotron resonance (ECR) plasma source with a belt magnet assembly configuration (BMC) was developed for hyperthermal neutral beam (HNB) generation. A plasma source for high flux HNB generation should be satisfied with the requirements: low pressure operation, high density, and thin plasma. The ECR plasma source with BMC achieved high density at low operation pressure due to electron confinement enhancement caused by high mirror ratio and drifts in toroidal direction. The 2.45 GHz microwave launcher had a circularly bended WR340 waveguide with slits. The microwave E-field profile induced by the microwave launcher was studied in this paper. The E-field profile was a cups field perpendicular to B-filed at ECR zone. The optimized E-field profile and B-field were found for effective ECR heating.

• 한국항해항만학회지
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• 제34권3호
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• pp.205-211
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• 2010

밸러스트수 처리를 위한 Plasma Gun의 전기적 특성과 오존 생성에 미치는 주요 운전변수들의 영향에 관해 실험실 규모 연구를 수행하였다. 방전개시전압보다 높은 전압이 인가되면 방전이 시작되고 오존이 생성되었으며 전압이 증가함에 따라 기체로 전달되는 에너지 및 오존 농도가 거의 선형적으로 증가하였다. 오존 생성 측면에서 최적의 에너지 효율성을 얻을 수 있는 전극간 거리가 존재하였으며 실험된 장치에서는 1.95 mm의 전극간 거리에서 최적 효율이 얻어졌다. 전기에너지 특성에 미치는 내부전극 재질의 영향은 무시할만한 수준이었으나 내부전극의 전기전도도와 열전도도 차이가 오존 생성에 큰 영향을 미치는 것으로 나타났다. 일정한 Plasma Gun 구조에서 오존 생성은 기체로 전달되는 에너지밀도에 의해 중요한 영향을 받는 것으로 나타났으며 유입되는 기체의 산소함량이 증가할수록 오존 생성이 증가하는 것으로 나타났다.

• Journal of the Optical Society of Korea
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• 제13권1호
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• pp.15-21
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• 2009

High-order harmonic generation from a solid surface affected by the contrast of a laser pulse was studied using an oscillating mirror model. High-order harmonics generated from solid surfaces have unusual properties such as spectral redshift, and an intensity difference between even- and odd-order harmonics which is not reported for high-order harmonics generated by a gas medium. We confirmed that high-order harmonics from solid surfaces have selectivity of polarization as well as cut-off extension and the enhancement of conversion efficiency proportional to laser intensity. And the principle of operation and the characteristics of a plasma mirror system developed for achieving high contrast laser pulses to pursue the experimental realization of high-harmonic generation from solid surfaces are reported. Energy fluence on the plasma mirrors is tunable between $10\;J/cm^2$ and $1000\;J/cm^2$ and around 1000 shots are available before the plasma mirrors require replacement.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권7호
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• pp.377-381
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• 2004

A discharge plasma reactor using a ferroelectric pellet packed bed is now used as a removal means of pollutant gases, such as NOx, SOx and VOCs. When an ac voltage is applied to this plasma reactor, then the pellets are polarized, and great electric fields are formed at each top and bottom contact points of the ferroelectric pellets. Thus the points of each pellet become covered with intense corona discharges, where an electrophysicochemical reaction is taking place strongly However these strong discharges also elevate the temperature of the pellets greatly and concurrently decrease the output ozone generation, as a result, the overall removal efficiency of gas becomes decreased greatly A new configuration of discharge plasma reactor using a ferroelectric pellet layer and a wire-to-wire electrode has been proposed and investigated experimentally. It is found that an intensive microdischarge is taking place on the surface of ac corona-charged ferroelectric pellet layer of the proposed reactor, which concurrently enhances the efficiency of plasma generation greatly And, this type of configuration of plasma reactor utilizing a wire-to-wire electrode and a ferroelectric pellet layer could be used as one of effective plasma reactors to remove pollutant gas.