• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.4
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• pp.648-652
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• 2008

Corona discharge and ozone generation characteristics of a wire-plate plasma reactor, with a biased third electrode, have been investigated with an emphasis on the role of the bias voltage and frequency applied on the third electrode. It was found that the wire-plate plasma reactor, with the biased third electrode, had a switching characteristic on its I-V characteristics for negative and positive discharges, which is very different from that of a conventional wire-plate plasma reactor without the third electrode. As a result, the corona discharge and ozone generation characteristics of the proposed plasma reactor could be controlled by adjusting the bias voltage and frequency of the third electrode. The corona onset and breakdown voltages, and ozone generation and yield, were increased compared with those of without the third electrode. These, however, reveal the effectiveness of the biased third electrode.

• Particle and aerosol research
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• v.5 no.3
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• pp.95-109
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• 2009

A low temperature plasma process has been widely used for semiconductor fabrication and can also be applied for the preparation of solar cell, MEMS or NEMS, but they are notorious in the point of particle contamination. The nano-sized particles can be generated in the low temperature plasma process and they can induce several serious defects on the performance and quality of microelectronic devices and also on the cost of final products. For the preparation of high quality thin films of high efficiency by the low temperature plasma process, it is desirable to increase the deposition rate of thin films with reducing the particle contamination in the plasmas. In this paper, we introduced the studies on the generation and growth of nanoparticles in the low temperature plasmas and tried to introduce the recent interesting studies on nanoparticle generation in the plasma reactors.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.74-74
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• 2010

The aqua-plasma is the non-thermal plasma in electrical conductive electrolyte by generates the vapor film layer on the immersed metal electrode surface. This plasma can generate the hydroxyl radical by dissociate the water molecule with the plasma electron. To develop the plasma discharge device for high efficiency in the hydroxyl radical generation, proper model for estimation of plasma power is necessary. In this work, the 1-D spherical model was developed, considering temperature dependence material constants. The relation between the plasma power and hydroxyl generation was also studied by the comparison between the optical emission intensity from the hydroxyl radical using monochromator and estimated plasma power. First, the thickness of vapor layer thickness was estimated using the Navier-Stokes fluid equation in order to calculate the discharge E-field inside vapor layer. Using the E-field magnitude and power balance on the plasma generation, it was possible to estimate the plasma power. The plasma power was assumed to uniformly fill the vapor layer and the temperature of vapor layer was fixed in the boiling temperature of electrolyte, 375K. In the experiment, the aqua-plasma was discharged in the saline by applied the voltage on the bipolar electrode. The range of applied voltage was 234 to 280V-rms in the frequency of 380 kHz. Two type electrodes were produced with two ${\Phi}0.2$ tungsten. The plasma power was estimated from the V-I signal from the two high voltage probes and current probe. The estimated plasma power agreed with the profile of emission intensity when the plasma discharged between the metal electrode and vapor layer surface. However, when the plasma discharged between the metal electrodes, the increasing rate of emission intensity was lower than the increase of plasma power. It implies that the surface reaction is more sufficient rather than the volume reaction in the radical generation, due to the high density of water molecule in the liquid.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.7
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• pp.1218-1222
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• 2008

We investigate the effect of rise time of a pulse bias voltage on atmospheric plasma generation. With the faster rise time of the pulse bias, the glow discharge appears to be more uniformly generated along the electrodes. I-V measurement confirms that higher loading power can be obtained using the faster rise time. A new understanding for atmospheric plasma generation at a micro-gap electrode is suggested.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.18 no.5
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• pp.146-150
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• 2004

The effects on non-thermal plasma generation by duty Ratio and frequency of pulse voltage were investigated experimentally. For these, a new type of non-thermal plasma generator with mesh electrode was manufactured and it was possible to generate the surface and silent discharge simultaneously by new type of non-thermal plasma generator. Duty ratio and frequency were selected as main parameters to control the movement of electron which is mainly related to the non-thermal plasma generation. The characteristics of non-thermal plasma generation were investigated indirectly by measuring the I-V curve and quantity of ozone generation. The most effective condition of duty ratio and frequency to generate the non-thermal plasma was identified by experiments with manufactured non-thermal plasma generator.

• Proceedings of the KIPE Conference
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• 2006.06a
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• pp.470-474
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• 2006

This dissertation discuses about a ferrite core plasma source using low operating frequency without sputtering problem by the stored electric field. Compared with the conventional RF power system with 13.56MHz switching frequency, the proposed plasma power system is only separated at 400kHz, so that it makes possible to use of low cost switching elements, PWM control and soft switching. Moreover, it could improve the coupling efficiency for plasma and antenna by using the ferrite core in order to transfer the energy of the load This dissertation tried to analyze new plasma generation method for the plasma generation system by modeling the plasma load and grafting the concept of impedance matching in order to interpret it with the formula This dissertation verified the ferrite core inductive coupling plasma source authorized for 400kHz of low frequency power by applying to the semi-conductor ash process thru the measurement of ash capacity and uniformed plasma distribution on the actual wafer.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.501-501
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• 2012

A 2.45 GHz electron cyclotron resonance (ECR) plasma source with a belt magnet assembly configuration (BMC) was developed for hyperthermal neutral beam (HNB) generation. A plasma source for high flux HNB generation should be satisfied with the requirements: low pressure operation, high density, and thin plasma. The ECR plasma source with BMC achieved high density at low operation pressure due to electron confinement enhancement caused by high mirror ratio and drifts in toroidal direction. The 2.45 GHz microwave launcher had a circularly bended WR340 waveguide with slits. The microwave E-field profile induced by the microwave launcher was studied in this paper. The E-field profile was a cups field perpendicular to B-filed at ECR zone. The optimized E-field profile and B-field were found for effective ECR heating.

• Journal of Navigation and Port Research
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• v.34 no.3
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• pp.205-211
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• 2010

Effects of operating parameters on electrical properties and ozone generation of Plasma Gun for ballast water treatment were investigated in a laboratory scale experiment. Electrical discharges and ozone generation initiated with applying voltages higher than discharge onset value. Ozone concentration was almost linearly increased with the increase of applied voltage. The optimum electrode gap distance which gave the optimum energy efficiency of ozone generation was 1.95 mm in the experimented apparatus. The effect of inner electrode material on the electrical energy transfer was negligible, however, the difference of electrical and thermal conductivities between electrode materials significantly influenced the ozone generation. In a constant geometrical structure, the electrical energy density played an important role in the ozone generation. The increase of oxygen content in the feeding gas enhanced the ozone generation by lowering ionization potential and promoting ozone source.

• Journal of the Optical Society of Korea
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• v.13 no.1
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• pp.15-21
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• 2009

High-order harmonic generation from a solid surface affected by the contrast of a laser pulse was studied using an oscillating mirror model. High-order harmonics generated from solid surfaces have unusual properties such as spectral redshift, and an intensity difference between even- and odd-order harmonics which is not reported for high-order harmonics generated by a gas medium. We confirmed that high-order harmonics from solid surfaces have selectivity of polarization as well as cut-off extension and the enhancement of conversion efficiency proportional to laser intensity. And the principle of operation and the characteristics of a plasma mirror system developed for achieving high contrast laser pulses to pursue the experimental realization of high-harmonic generation from solid surfaces are reported. Energy fluence on the plasma mirrors is tunable between $10\;J/cm^2$ and $1000\;J/cm^2$ and around 1000 shots are available before the plasma mirrors require replacement.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.7
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• pp.377-381
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• 2004

A discharge plasma reactor using a ferroelectric pellet packed bed is now used as a removal means of pollutant gases, such as NOx, SOx and VOCs. When an ac voltage is applied to this plasma reactor, then the pellets are polarized, and great electric fields are formed at each top and bottom contact points of the ferroelectric pellets. Thus the points of each pellet become covered with intense corona discharges, where an electrophysicochemical reaction is taking place strongly However these strong discharges also elevate the temperature of the pellets greatly and concurrently decrease the output ozone generation, as a result, the overall removal efficiency of gas becomes decreased greatly A new configuration of discharge plasma reactor using a ferroelectric pellet layer and a wire-to-wire electrode has been proposed and investigated experimentally. It is found that an intensive microdischarge is taking place on the surface of ac corona-charged ferroelectric pellet layer of the proposed reactor, which concurrently enhances the efficiency of plasma generation greatly And, this type of configuration of plasma reactor utilizing a wire-to-wire electrode and a ferroelectric pellet layer could be used as one of effective plasma reactors to remove pollutant gas.