• Title/Summary/Keyword: Plasma Source Ion Implantation(PSII)

Search Result 32, Processing Time 0.04 seconds

A Study on the Friction and Wear Characteristics of Nitrogen Ions Coated SCM415 Steel (질소이온 코팅 SCM415강의 마찰.마모특성에 관한 연구)

  • Lyu, Sung-Ki;He, Hei-bo;Son, Yu-Sun
    • Tribology and Lubricants
    • /
    • v.23 no.1
    • /
    • pp.14-18
    • /
    • 2007
  • SCM415 alloy was implanted with nitrogen ions using plasma source ion implantation (PSII), at a dose range of $1{\times}10^{17}\;to\;6{\times}10^{17}N^{+}cm^{-2}$. Auger electron spectrometry (AES) was used to investigate the depth profile of the implanted layer. Friction and wear tests were carried out on a block-on-ring wear tester. Scanning electron microscopy (SEM) was used to observe the micro-morphology of the worn surface. The results revealed that after being implanted with nitrogen ions, the frictional coefficient of the surface layer decreased, and the wear resistance increased with the nitrogen dose. The tribological mechanism was mainly adhesive, and the adhesive wear tended to become weaker oxidative wear with the increase in the nitrogen dose. The effects were mainly attributed to the formation of a hard nitride precipitate and a supersaturated solid solution of nitrogen in the surface layer.

Investigation of Adhesion Mechanism at the Metal-Organic Interface Modified by Plasma - Part I

  • Sun, Yong-Bin
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
    • /
    • 2002.11a
    • /
    • pp.123-126
    • /
    • 2002
  • For the mold die sticking mechanism, the major explanation is that EMC filler of silica wears die surface roughened, which results in increase of adhesion strength. As big differences in experimental results from semiconductor manufacturers are dependent on EMC models, however, chemisorptions or acid-base interaction is apt to be also functioning as major mechanisms. In this investigation, the plasma source ion implantation (PSII) using $O_2$, $N_2$, and $CF_4$ modifies sample surface to form a new dense layer and improve surface hardness, and change metal surface condition from hydrophilic to hydrophobic and vice versa. Through surface energy quantification by measuring contact angle and surface ion coupling state analysis by Auger, major governing mechanism for sticking issue was figured out to be a complex of mechanical and chemical factors.

  • PDF

Study of PSII-treated PMMA, PHEMA, and PHPMA ; Investigation of Their Surface Stabilities

  • Hyuneui Lim;Lee, Yeonhee;Seunghee Han;Jeonghee Cho;Moojin suh;Kem, Kang-Jin
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1999.07a
    • /
    • pp.204-204
    • /
    • 1999
  • The plasma source ion implantation(PSII) technique which is a method using high negative voltage pulse in plasma system has the potential to change the surface properties of polymer. PSII technique increase the surface free energy by introducing polar functional groups on the surface so that it improves reactivity, hydrophilicity, adhension, biocompatability, etc. However, the mobility of polymer chains enables the modified surface layers to adapt their composition to interfacial force. This hydrophobic recovery interrupts the stability of modified surfaces to keep for the long time. In this study, poly(methyl methacrylate)(PMMA), poly(2-hydroxyethyl methacrylate)(PHEMA), and polu(2-hydroxypropyl methacylate)(PHPMA) for contact lens application, were modified to improve the wettability with PSII technique and were investigated the surface stabilities. Polymer film was prepared with solution casting(3 wt.% solution) and was annealed at 11$0^{\circ}C$ under vacuum oven to remove solvent completely and to eliminate physical ageing. The thickness of the film measured by scanning electron microscopy (SEM) and surface profilometer was about 10${\mu}{\textrm}{m}$. Polymers were treated with different kinds of gases, pulse frequency, pulse with, pulse voltage, and treatment time. Even though PMMA, PHEMA, and PHPMA have similar repeat unit structure, the optimal treatment conditions and the tendency to hydrophobic recovery were different. PHPMA, more hydrophilic polymer than PMMA and PHEMA showd better wettability and stability after mild treatment. Surface tensions were obtained by water and diiodomethane contact angle measurements to monitor the relation between hydrophobic recovery and polymer structure. Different ion species in plasma change the polar component and dispersion component of polymer surface. For better wettability surface, the increase of polar component was a dominant factor. We also characterized modified polymer surfaces using x-ray photoelectron spectroscopy(XPS), secondary ion mass spectrometry(SIMS), Fourier Transform infrared spectroscopy(FT-IR), and SEM.

  • PDF

keV and MeV Ion Beam Modification of Polyimide Films

  • Lee, Yeonhee;Seunghee Han;Song, Jong-Han;Hyuneui Lim;Moojin Suh
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2000.02a
    • /
    • pp.170-170
    • /
    • 2000
  • Synthetic polymers such as polyimide, polycarbonate, and poly(methyl methacrylate) are long chain molecules which consist of carbon, hydrogen, and heteroatom linked together chemically. Recently, polymer surface can be modified by using a high energy ion beam process. High energy ions are introduced into polymer structure with high velocity and provide a high degree of chemical bonding between molecular chains. In high energy beam process the modified polymers have the highly crosslinked three-dimensionally connected rigid network structure and they showed significant improvements in electrical conductivity, in hardness and in resistance to wear and chemicals. Polyimide films (Kapton, types HN) with thickness of 50~100${\mu}{\textrm}{m}$ were used for investigations. They were treated with two different surface modification techniques: Plasma Source Ion Implantation (PSII) and conventional Ion Implantation. Polyimide films were implanted with different ion species such as Ar+, N+, C+, He+, and O+ with dose from 1 x 1015 to 1 x 1017 ions/cm2. Ion energy was varied from 10keV to 60keV for PSII experiment. Polyimide samples were also implanted with 1 MeV hydrogen, oxygen, nitrogen ions with a dose of 1x1015ions/cm2. This work provides the possibility for inducing conductivity in polyimide films by ion beam bombardment in the keloelectronvolt to megaelectronvolt energy range. The electrical properties of implanted polyimide were determined by four-point probe measurement. Depending on ion energy, doses, and ion type, the surface resistivity of the film is reduced by several orders of magnitude. Ion bombarded layers were characterized by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS), XPS, and SEM.

  • PDF

A Study on the friction and Wear Characteristics of C-N Coated SCM415 Steel (C-N코팅 SCM415강의 마찰$\cdot$마모 특성에 관한 연구)

  • Lyu Sung-ki;Lu Long;Jin Tai-yu;Lian Zhe-Man;Cao Xing-Jin;Cho Sung-Min
    • Journal of the Korean Society of Safety
    • /
    • v.20 no.1 s.69
    • /
    • pp.18-23
    • /
    • 2005
  • This study deals with the friction and wear characteristics of C-N coated SCM415 steel. The PSII(plasma source ion implantation) apparatus was built and a SCM415 test piece with steel substrate was treated with carbon nitrogen by this apparatus. The composition and structure of the surface layer were analyzed and compared with that of PVD(physical vapor decomposition) coated TiN layer. It was found that both of friction coefficient of C-N coating and TiN coating decreased with increasing load, however, C-N coating showed relatively lower faction coefficient than that of TiN coating. The micro-vickers hardness of C-N film is 3200 Hv, which is $32\~43\%$ higher than that of TiN film. The critical load of C-N film is 52N, which is $25\%$ higher than that of TiN film. The hardness of C-N film fabricated by Plasma ion implantation is $61\~70\%$ higher than that of base material, and faction coefficient is $14\~50\%$ lower than that of base material. It is also interesting to note that the friction was changed from adhesive wear mode to light oxidizing wear mode.

Removal Torque of Mg-ion Implanted Clinical Implants with Plasma Source Ion Implantation Method (마그네슘 이온주입 임플란트의 뒤틀림 제거력에 관한 연구)

  • Kim, Bo-Hyoun;Kim, Dae-Gon;Park, Chan-Jin;Cho, Lee-Ra
    • Journal of Dental Rehabilitation and Applied Science
    • /
    • v.25 no.1
    • /
    • pp.41-52
    • /
    • 2009
  • The surface treatment of titanium implant could bring out the biochemical bonding between bone and implant. The purpose of this study was to evaluate the biomechanical bone response of Mg-ion implanted implants with plasma source ion implantation method. Twelve New Zealand white rabbits were included in this study. Each rabbit received one control fixture (blasted with resorbable blasting media, RBM) and three types of Mg ion implanted fixtures in tibiae. The implants were left in place for 6 weeks before the rabbits were sacrificed. Removal torque value and resonance frequency analysis (ISQ) were compared. The repeated measured analysis of variance was used with $P{\leq}0.05$ as level of statistical significance. ISQ was not different among all groups. However, the ISQ was increased after 6 weeks healing. The group had lowest ISQ value showed the greatest increment. Mg-1 implants with 9.4% retained ion dose showed significantly higher removal torque value than that of the other implants. From this results, it is concluded that the Mg-1 implants has stronger bone response than control RBM surface implant.

Wettability and Aging Effect of Polystyrene Film Treated by PSII according to the Molecular Weight (플라즈마 이온주입 방법으로 처리된 폴리스티렌의 분자량에 따른 표면 친수성 및 에이징 현상)

  • Kim, Youngsoo;Lim, Hyuneui;Han, Seunghee;Lee, Yeonhee;Kim, Youngsang
    • Analytical Science and Technology
    • /
    • v.15 no.3
    • /
    • pp.229-235
    • /
    • 2002
  • Plasma source ion implantation (PSII) technique was utilized to improve the wettability of polystyrene surfaces. It is well known that treated surfaces undergo aging, leading to hydrophobic recovery with time. We investigated the aging effect of polystyrene thin film on the various molecular weights. Polystyrenes with several molecular weights ($M_w$ = 760, 2430, 31600, 115700, 280000, 903600) were treated in different experimental conditions including gas species and pulse energy, and their hydrophilicity was measured by contact angle goniometer. To study wettability decay as a function of the molecular weight, PSII-treated samples were aged at different temperatures. Hydrophobic recovery of high molecular weight polystyrene was much slower than that of low molecular weight, even at high temperatures. The methods used to characterize treated surfaces were water contact angle measurement, TOF-SIMS, XPS, SEM and AFM.

High-voltage Pulse Power Generator Using Semiconductor switches (반도체 스위치를 이용한 고압 펄스 파워 발생기)

  • Kim J. H.;Ryu M. Y.;Shenderey S.;Kim J. S.;Rim G. H.
    • Proceedings of the KIPE Conference
    • /
    • 2004.07b
    • /
    • pp.682-685
    • /
    • 2004
  • 본 논문은 반도체 스위치를 이용한 고압 펄스 발생기에 관한 연구이다. PSII (Plasma Source Ion Implantation)의 전원 장치로 사용되었으며, 기존의 hard switch나 싸이로트론 등을 이용한 고압 펄스 파워 발생기에 비해 다음과 같은 장점을 가진다. 장수명, 고효율과 펄스 크기, 반복률, 펄스폭 등의 조정이 자유로운 높은 유연성 등의 장점이다. 또한 제안된 펄스 발생기에서 사용된 반도체 스위치는 12개의 IGBT가 직렬로 연결되어 있으며, 그 중 하나의 스위치만 능동 구동기 두개가 존재하고 나머지 스위치는 수동 구동기만으로 구성되어 있어, 구동기가 매우 간단한 장점을 가지고 있다.

  • PDF

Cell study on the Magnesium ion implanted surface with PSII (PSII를 이용한 마그네슘 이온 주입 임플란트에 대한 MC3T3-E1 골모양 세포 반응 연구)

  • Shin, Hyeong-Joo;Kim, Dae-Gon;Park, Chan-Jin;Cho, Lee-Ra;Lee, Hee-Su;Cha, Min-Sang
    • Journal of Dental Rehabilitation and Applied Science
    • /
    • v.25 no.4
    • /
    • pp.361-374
    • /
    • 2009
  • For successful osteogenesis around the implants, interaction between implant surface and surrounding tissue is important. Biomechanical bonding and biochemical bonding are considered to influence the response of adherent cells. But the focus has shifted surface chemistry. The purpose of this study is to evaluate the MC3T3-E1 osteoblast like cell responses of magnesium (Mg) ion implanted titanium surface produced using a plasma source ion implantation method. Commercially pure titanium disc was used as substrates. The discs were prepared to produce four different surface, A: Machine turned surface, B: Mg implanted surface, C: sandblasted surface, D: sandblasted and Mg implanted surface. MC3T3 El osteoblastic like cells were cultured on the disc specimens. Cell adhesion, proliferation, differentiation, and synthesis of extracellular matrix were evaluated. The cell adhesion morphology was evaluated by SEM. RT PCR assay was used for assessment of cell adhesion, proliferation and differentiation. ALP activity was measured for cell differentiation. The results of this study were as follows: 1. SEM showed that cell on Mg ion groups was more proliferative than that of non Mg ion groups. On the machine turned surface, cell showed some degree of contact guidance in aligning with the machining grooves. 2. In RT PCR analysis, osteonectin and c-fos mRNA were more expressed on sandblasted and Mg ion implanted group. 3. ALP activity was not significantly different among all groups. Within the limitations of this study, the following conclusions were drawn: It might indicate Mg ion implanted titanium surface induce better bone response than non Mg ion groups.