• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 제14회 정기총회 및 03년 동계학술발표회
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• pp.42-43
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• 2003

The nonlinear three-wave interaction is an interesting topic having various applications in nonlinear optics, hydrodynamics, acoustic waves, and plasma physics. The resonant interaction between two laser pulses and a plasma wave plays important roles in plasma heating, laser reflection in the inertial confinement fusion (ICF), plasma wakefield generation, and ultra-intense laser pulse amplification and pulse compression using stimulated Raman backscattering (RBS). (omitted)

• Journal of Information Display
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• 제3권2호
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• pp.13-18
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• 2002

Numerical simulation is one of the most useful tools to study gas discharge phenomena that occur in alternating current plasma display panel (AC-PDP) cell. Most PDP cell simulations have been performed for two-dimensional cell, is cross-section along the address electrode. We developed a three-dimensional PDP simulator and applied it to a T-shaped electrode cell in order to show the effects of sustain electrode shape that cannot be included in two-dimensional simulation. The dependence of power consumption on electrode shape and area in the simulation showed the same trend as experiment.

• The Korean Journal of Ceramics
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• 제2권4호
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• pp.231-237
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• 1996

Mullite ceramics can be sintered by rf plasma sintering to densities as high as 97% compared to the theoretical density of the mullite, while SiC whisker-reinforced mullite matrix ceramic composites were not sintered by plasma sintering. Decomposition of mullite occurs in a superficial regins at the outside surface of the specimen by volatilization of SiO at elevated temperature by plasma. SiC whiskers were destroyed, and the matrix was converted to alumina from SiC-whisker reinforced mullite matrix ceramic composites during the plasma sintering. Accelerated volatilization from the SiC whisker in the mullite prevents sintering. The volatile species are mainly SiC and CO gas species. The effects of plasma on mullite and SiC-whisker reinforced mullite matrix composites are interpreted by thermodynamic simulation of the volatile species in the plasma environment. The thermodynamic results show that the decomposition will not occur during hot pressing.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2002년도 전력전자학술대회 논문집
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• pp.245-248
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• 2002

In this paper, the development of the RF power supply for Remote Plasma System is discussed. 7kW, 400kHz Remote Plasma Generator is designed and tested. The main power stage is used for the HB PWM inverter with an LC filter in the secondary circuit. The operation characteristics of Remote Plasma Generator are verified by simulation and experimental results.

• Applied Science and Convergence Technology
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• 제23권4호
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• pp.179-186
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• 2014

Fluid model based numerical simulation was carried out for an inductively coupled plasma assisted sputter deposition system. Power absorption, electron temperature and density distribution was modeled with drift diffusion approximation. Effect of an electrically conducting substrate was analyzed and showed confined plasma below the substrate. Part of the plasma was leaked around the substrate edge. Comparison between the quasi-neutrality based compact model and Poisson equation resolved model showed more broadened profile in inductively coupled plasma power absorption than quasi-neutrality case, but very similar Ar ion number density profile. Electric potential was calculated to be in the range of 50 V between a Cr rod source and a conductive substrate. A new model including Cr sputtering by Ar+was developed and used in simulating Cr deposition process. Cr was modeled to be ionized by direct electron impact and showed narrower distribution than Ar ions.

• 전기학회논문지
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• 제58권11호
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• pp.2236-2241
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• 2009

In this study, the electron behavior was investigated numerically in order to obtain guidelines for design and operation of a new plasma source by a magnetic neutral loop discharge (NLD). The optimum plasma production was investigated by using a 3-dimensional simulation model which enables the electron behavior calculation from source region to downstream region. The results showed that the high-density plasma produced around the magnetic neutral loop (NL) is transferred from the NL region to the downstream region along magnetic force lines. Also the avaraged electron energy is increased with the normalized RF electric field (F), which can be used to characterize the plasma production efficiency of NLD system. Considering the relation between F and plasma production, in-depth plasma control can be achieved at a given specific process condition.

• Applied Science and Convergence Technology
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• 제26권6호
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• pp.184-188
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• 2017

Polymer deposition pattern on the ceramic lid surface is analyzed by numerical modeling. Assumption was made that is affected by gas flow pattern from the horizontal and vertical nozzles, temperature profile from the finger-like branches made of graphite and electrostatic potential effect. Calculated results showed gas flow dynamics is less relevant than two others. Temperature and electrostatic effects are likely determining the polymer deposition pattern based on our numerical simulation results.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 1995년도 춘계학술발표회논문집(2)
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• pp.1027-1032
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• 1995

To develop operation scenarios of KT-2 tokamak, 3 operation modes(OH, high ${\beta}$ and high bootstrap) deduced from zero dimensional steady-state power balance are examined with TSC(Tokamak Simulation Code) time-dependent transport .ode. Plasma profiles are evaluated self consistently during simulations and plasma shapes are maintained by feedback control on PF coil currents. Simulations show operation modes which are typical of KT-2 expected discharges are compatible with the KT-2 PF system design specifications[1].

• Journal of Information Display
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• 제2권1호
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• pp.24-33
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• 2001

The characteristics of the reset and the address discharges of an alternating current Plasma Display Panel (ac PDP) were studied using 2-dimensional numerical discharge cell simulation. We investigated the wall charge variations during the reset discharge adopting ramping reset pulse and the subsequent addressing discharge. The roles of the ramping reset scheme can be divided into two stages, each electrode gathers wall charges during ramping-up of the initial stage and the built-up wall charges are lost during ramping-down of the later stage. Address discharge does not only change the wall charge distributions on the address and the scan electrodes but also on the sustain electrode. The increase in the wall charges on the sustain electrode was observed with the variation of the applied voltage to the sustain electrode during the address period. The increase of the applied voltage to the sustain electrode during the address period is expected to induce the decrease of the sustain voltage during the display period.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2003년도 춘계전력전자학술대회 논문집(2)
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• pp.611-615
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• 2003

In this paper, a operation characteristics and analysis of the HB(half bridge) inverter for remote plasma system are studied. the remote plasma system is cleaning system for the chemical vapor deposition (CVD) chamber in semiconductor processing. The remote plasma system is powered by the RF generator The main power stage of the RF generator is used for the HB PWM inverter with an low pass filter in the secondary circuit of the transformer. The detailed mode analysis of HB invertor was described. The operation characteristics of Remote Plasma Source are verified by simulation and experimental results.