Applied Science and Convergence Technology

한국진공학회 (The Korean Vacuum Society)
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Numerical Simulation: Effects of Gas Flow and Heat Transfer on Polymer Deposition in a Plasma Dry Etcher

  • Joo, Junghoon (Department of Materials Science and Engineering, Kunsan National University)
  • 투고 : 2017.10.12
  • 심사 : 2017.12.14
  • 발행 : 2017.11.30
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초록

Polymer deposition pattern on the ceramic lid surface is analyzed by numerical modeling. Assumption was made that is affected by gas flow pattern from the horizontal and vertical nozzles, temperature profile from the finger-like branches made of graphite and electrostatic potential effect. Calculated results showed gas flow dynamics is less relevant than two others. Temperature and electrostatic effects are likely determining the polymer deposition pattern based on our numerical simulation results.

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참고문헌

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