• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.109-110
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• 2000

Sputtering yield of MgO film in the AC-PDPs has been calculated by Monte Carlo simulation of ion scattering. In the ion energy range less than 50 eV, the sputtering yield is 4 ${\times}$ $10^{-4}$ for Xe ions and it is between 0.1 and 0.01 for He, Ne, and Ar ions. The erosion rate is estimated about $25{\AA}$ per hour for Xe ions in an actual PDP plasma for sustain and full white mode.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1609-1611
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• 1994

In ECR and helicon reactors for plasma processing, a high density plasma is generated in a source region which is connected to a diffusion region where the processing takes place. Large density and potential gradients can develop at the orifice of the source which drive ion currents into the diffusion region. The average ion velocity may become the order of the sound velocity. Measurements of the ion saturation current to a Langmuir probe are used as a standard method of determining the plasma density in laboratory discharges. However, the analysis becomes difficult in a steaming plasma. We have used the HAMLET plasma simulator to simulate the ion flow to a large langmuir probe in an ECR plasma. The collection surface was aligned with the Held upstream, normal to the field, and downstream. ion trajectories through the electric and magnetic fields were calculated including ion-neutral collisions. We examines the ratio of ion current density to plasma density as a function of magnetic field and pressure.

• Journal of Korea Multimedia Society
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• v.18 no.1
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• pp.65-70
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• 2015

Particle accelerator has mainly used in nuclear field only because of the large scale of the facility. However, since laser-plasma particle accelerator which has smaller size and spends less cost developed, the availability of this accelerator is expended to various research fields such as industrial and medical. This paper suggests a visualization system to control the laser-plasma particle accelerator efficiently. This system offers real-time 3D images via convert HDF file comes from plasma data obtained from PIC simulation into OpenGL texture type to analyse and modify plasma data. After that, it stores high-resolution rendering images of the data with external renderer hereafter.

• Plant Journal
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• v.4 no.4
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• pp.62-70
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• 2008

PGV(Plasma Gasification & Vitrification) system has been developed based on a pyrolysis melting gasification technology that provides the possibilities of acquiring renewable energy. As volume of wastes increases with the rapid industrialization and population growth, eco friendly disposal is drawing more social attention. Pyrolysis plasma technology is regarded as the best environmentally friendly process for the waste disposal among numerous waste disposal processes. Introduced in this paper is the behavior of the plasma torch and a computational fluid simulation dynamics is discussed for designing the melting furnace. Some PGV applications have also been discussed.

• Journal of the Korean Society of Propulsion Engineers
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• v.26 no.6
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• pp.1-9
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• 2022

This study introduces the calculation model of ionization composition and electrical conductivity for metallic plasma for practical application to modeling and simulation of modern electrical detonators. The present model includes the correction for non-ideality of dense plasma conditions which are expected in electrical explosion of bridge in detonators. The computational results for copper plasma show favorable agreement with experimental data for a wide range of plasma temperature and high density conditions and the model is proper for detonator modeling with good prediction accuracy.

• Journal of the Korean Vacuum Society
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• v.22 no.2
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• pp.66-78
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• 2013

In order to develop of 80 kW RF plasma torch system, we achieved three-dimensional simulations for the extraction of more information as temperature in torch and fluid behavior analysis, etc. The position of powder injection tube, the plasma discharge characteristics with various input current and various length of ceramic tube, and the plasma temperature characteristics with process gas flow rate such those was simulated. RF thermal plasma torch designed by simulation was manufactured that was measured to the maximum of 89.3 kW power. The mass production using developed 80 kW RF thermal plasma torch system were investigated by characteristics manufactured of Si nano powder. The mass-production level of Si nano-powder was average of 539 g/hr and high yield rate of 71.6%, respectively. The particle size distribution $D_{99}/D_{50}$ of manufacturing nano-powder was investigated to 1.98 as a good uniform.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1999.11a
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• pp.58-63
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• 1999

In order to analyze the discharge-pumped KrF excimer laser, computer simulation code is developed. On the other hand, the electron velocity distribution in a discharge plasma, measured by the Thomson scattering method, showed the Maxwellian, while the code predicted non-Maxwellian. This disagreement was solved by introducing the electron-electron collision into the simulation code. We also developed a simulation code on the CO2 laser-heated plasma in high-pressure Ar gas, and estimated the formation process of Ar2 excimer. The code predicted the possibility of the Ar2 laser action at 126 nm.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.271-271
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• 2012

Many studies have been investigated on high density plasma source (Electron Cyclotron Resonance, Inductively Coupled Plasma, Helicon plasma) for large area source after It is announced that productivity of plasma process depends on plasma density. In this presentation, we will propose the new concept of the multiple source, which consists of a parallel connection of ICP sources and helicon plasma sources. For plasma uniformity, equivalent power (especially, equivalent current in ICP & Helicon) should distribute on each source. We design power feeding line as coaxial transmission line with same length of ground line in each source for equivalent power distribution. And we confirm the equivalent power distribution with simulation and experimental result. Based on basic study, we develop the plasma source for oxidation in semiconductor process. we will discuss the relationship between the processing parameters (With or WithOut magnet, operating pressure, input power ). In ICP, plasma density uniformity is uniform. In ICP with magnet (or Helicon) plasma density is not uniform. As a result, new design (magnet arrangement and gas distributor and etc..) are needed for uniform plasma density in ICP with magnet and Helicon.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.06a
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• pp.135-136
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• 1998

• Journal of the Korean Vacuum Society
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• v.16 no.6
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• pp.489-495
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• 2007

The assembly of the main system of the KSTAR tokamak has been recently completed, and the preparation for the 1st plasma and test operations is progressed. The fueling system established for these purposes uses only one port placed at the opposite side of the pumping duct, and has a difficulty of attaining a uniform and fast supply of fuel particles to the plasma. At the base operation stage after finishing the test operation, the fueling system must be improved to provide a uniform fueling and a feed-back control in accordance with a high-density tokamak plasma maintained for a long period. As a part for understanding the points to be improved in the fueling system, a Monte Carlo simulation on the gas fueling into the tokamak plasma has been executed. After modeling the vacuum vessel and the plasma of quasi-D shapes as tori of rectangular cross-sections, the influences of the position and the number of the fueling inputs on the particle density distribution for a given pumping probability and mean free path were investigated.