• 암석학회지
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• 제10권3호
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• pp.148-156
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• 2001

경북 경주시 인근의 제4기 추정단층 중 입실단층과 장항리단층의 파쇄대를 충진하고 있는 탄산염암맥을 대상으로 다검출기 유도결합 플라즈마 질량분석기를 이용한 $^{230}$ $Th^{234}$ U 비평형 연대를 측정하였다. 완전히 녹인 시료로부터 공침과 이온교환화학을 통해 간편하게 U, Th을 단체분리하였는데 회수율은 Th 80%, U 70% 정도였다. 이 부분으로부터 기기 조건이 최적화된 다검출기 유도결합 플라즈마 질량분석기를 이용하여 $^{234}$ $U^{238}$ $U^{230}$ $Th^{232}$ Th비를 분석하였고 U/Th비는 처리하지 않은 시료로부터 직접 분석하였다. 분석 결과 입실 단층의 탄산염암 맥은 $^{234}$ U-$^{230}$ Th 시차평형에 도달하여 기존의 ESR 연대측정 결과를 지지하였으며 쇄설성 부분이 보정된 장항리단층 탄산염암 맥의 $^{230}$$Th^{234}$ /U 비평형 연대는$ 48\pm$41 ka로서 파쇄대의 최소 형성시기를 지시한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.413-413
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• 2010

In semiconductor manufacturing field, all equipments have various sensors to diagnosis the situations of processes. For increasing the accuracy of diagnosis, hundreds of sensors are emplyed. As sensors provide millions of data, the process diagnosis from them are unrealistic. Besides, in some cases, the results from some data which have same conditions are different. We want to find some information, such as data and knowledge, from the data. Nowadays, fault detection and classification (FDC) has been concerned to increasing the yield. Certain faults and no-faults can be classified by various FDC tools. The uncertainty in semiconductor manufacturing, no-faulty in faulty and faulty in no-faulty, has been caused the productivity to decreased. From the uncertainty, the rough set theory is a viable approach for extraction of meaningful knowledge and making predictions. Reduction of data sets, finding hidden data patterns, and generation of decision rules contrasts other approaches such as regression analysis and neural networks. In this research, a RGB sensor was used for diagnosis plasma instead of optical emission spectroscopy (OES). RGB data has just three variables (red, green and blue), while OES data has thousands of variables. RGB data, however, is difficult to analyze by human's eyes. Same outputs in a variable show different outcomes. In other words, RGB data includes the uncertainty. In this research, by rough set theory, decision rules were generated. In decision rules, we could find the hidden data patterns from the uncertainty. RGB sensor can diagnosis the change of plasma condition as over 90% accuracy by the rough set theory. Although we only present a preliminary research result, in this paper, we will continuously develop uncertainty problem solving data mining algorithm for the application of semiconductor process diagnosis.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1772-1774
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• 2004

Because the physics occurring during an interruption process is not well known, it is not easy to analyze the characteristics of a self-blast circuit breaker neither theoretically nor experimentally. Fortunately the available computational power and the numerical method improved recently make it possible to predict an interruption process as precisely and fast as possible. Therefore many researches using computational methods have been done for the interruption process of interrupters and applied to extend the information such as thermal and dielectric reignition. In this paper, we have simulated the interruption process of SF6 self-blast circuit breakers with the arc plasma during the fault interruption of a 10 kA current. The CFD program used here is coupled with the electromagnetic field analysis, the radiation model and the effects of turbulence. Through this work, we have get further information about the thermal performance as well as the behavior of the arc. The results have been compared with the measured arc voltage.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1205-1209
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• 1997

When the short fault current is flowed into a fuse, the notch of element is melted, and burnbacked by arc plasma, which caused by the voltage of fuse at both ends. The cutoff ability of fuse is heavily influenced by the degree of burnback. In this paper, we investigated the amount of burnback to the applied voltage di/dt variation, As a result, we confirmed that the amount of burnback is proportional to the variation of the applied voltage.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.16-21
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• 2020

How accurately reproducible energy is delivered to the wafer in the process of making thin films using PE-CVD (Plasma enhanced chemical vapor deposition) during the semiconductor process. This is the most important technique, and most of the reaction on the wafer surface is made by thermal energy. In this study, we studied the method of monitoring the change of thermal energy transferred to the wafer surface by monitoring the temperature change according to the change of the thin film formed on the showerhead facing the wafer. Through this research, we could confirm the monitoring of wafer thin-film which is changed due to abnormal operation and accumulation of equipment, and we can expect improvement of semiconductor quality and yield through process reproducibility and equipment status by real-time monitoring of problem of deposition process equipment performance.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.131-135
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• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• 전력전자학회논문지
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• 제21권5호
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• pp.373-380
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• 2016

In this paper, a 50-kW high-efficiency modular fast charger for both electric vehicle (EV) and neighborhood electric vehicle (NEV) is proposed. The proposed fast charger consists of five 10-kW modules to achieve fault tolerance, ease of thermal management, and reduce component stress. Three-level topologies for both AC-DC and DC-DC converters are employed to use 600V MOSFET, resulting in ease of component selection and increase in switching frequency. The proposed three-level DC-DC converter with coupled inductor and its hybrid switching method can reduce the circulating current under wide output voltage range. A 50-kW prototype of the proposed fast charger was developed and tested to verify the validity of the proposed concept. Experimental results show that the proposed fast charger achieves a rated efficiency of 95.2% and a THD of less than 3%.

• 자원환경지질
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• 제28권6호
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• pp.571-577
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• 1995

한국 남서부에 위치한 해남지역에는 산성마그마 활동에 수반된 acid-sulfate 점토광상들이 산출되고 있다. 연구지역의 지질은 응회암, 화강암질암, 석영반암, 유문암, 안산암 및 퇴적암으로 구성되어 있으며 화강암질암과 석영반암은 응회암과 퇴적암을 관입하며 광산주변의 유문암과 응회암은 열수변질을 받았다. 채취된 시료중 67개의 시료를 GFAAS와 ICP로 주성분 원소함량과 금을 비롯한 미량원소함량을 분석한 결과 금은 성산광산에서 산출되는 명반석맥과 규화작용을 심하게 받은 변질대에서 부화된 반면 dickite와 dickite가 함유된 암석이나 광석이 열수변질을 받은 경우에는 결핍된 경향을 보여주며, 특히 단층주변과 단층들이 교차하는 지점에서 금함량이 높은 경향을 나타낸다. 명반석-석영-황철석이 공생하는 명반석이나 명반석맥에서는 금함량이 높으나 황철석을 포함하는 응회암과 dickite에서는 일반적으로 금함량이 낮은 경향을 보여준다. 규화작용을 받은 응회앙에서 금함량은 As, Hg 및 Hg와 정의 상관관계를 보여 주며 대부분의 시료에서 Cd, Hg 및 Sb함량변화는 금함량변화와 유사한 경향을 나타낸다. 따라서 이 연구지역에서 지질학적 및 지구화학적으로 금광상을 탐사하기 위해서는 단층이 교차하는 지점의 silicified zone 또는 황철석을 함유하는 명반석맥을 찾아서 As, Hg 및 Sb 등과 같은 지시원소를 분석하는 것이 중요할 것으로 판단된다.