• Journal of the Korean Society of Safety
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• v.15 no.2
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• pp.70-77
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• 2000

For hazardous air pollutants(HAP) such as NO, $NO_2$ and $SO_2$ decomposition efficiency, power consumption, and applied voltage were investigated by SPCP(Surface induced discharge Plasma Chemical Processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of HAP with various electric frequencies(5~50 kHz), flow rates(100~1,000 mL/min), initial concentrations(100~1,000 ppm) and additive($CH_4$) were measured and the products were analyzed with FT-IR. Experimental results showed that for the frequency of 10 kHz, the highest decomposition efficiency of 94.3 % for NO, 84.7 % for $NO_2$ and 99 % far $SO_2$ were observed at the power consumptions of 19.8, 20 and 19W, respectively, and that decomposition efficiency decreased with increasing frequency above 20 kHz. And decomposition efficiency per unit power were 5.21 %/W for $SO_2$, 4.76 %/W for NO and 4.24 %/W for $NO_2$ and the highest decomposition efficiency was observed with $SO_2$. Decomposition efficiency was increased with increasing residence times and with decreasing initial concentration of pollutants. When the additive of $CH_4$ was used, decomposition efficiency was increased with increasing $CH_4$ content, and NO, $NO_2$ and $SO_2$ were almost completely decomposed with the efficiency of 99 %, 98 % and 99 %, respectively and therefore $CH_4$ was a good additive material. The optimum power for the maximum decomposition efficiency were 7.5 W for $SO_2$, 9.5 W for NO and 15.5 W for $NO_2$, respectively. Optimum power with the maximum decomposition efficiency were 9.5 W at 1,000 ppm of NO, 7~8 W at 100~500 ppm of NO and 15.5 W at all concentration range of $NO_2$ and 11.5 W at 1,000 ppm, 4.9 W at 500 ppm, 3.7 W at 100~300 ppm of $SO_2$ and power efficiency was best in these case.

• Applied Chemistry for Engineering
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• v.20 no.4
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• pp.402-406
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• 2009

$TiO_2$ thin films were surface-modified with atmospheric plasma and their photocatalytic activities were evaluated. The films were deposited on glass plates by dip-coating in a $TiO_2$ sol-gel solution and sintered at various temperatures for various times. Nitrogen plasma was used for the modification and the experiments were carried out varying operational parameters such as discharge power and treatment time. Photocatalytic activity was evaluated based on the degradation efficiency of methylene blue (MB) under irradiation of UV-A and fluorescent light. According to XPS analysis, a little amount of nitrogen was found to be doped in the film surface after the modification. As a result, photocatalytic activity increased under irradiation of UV-A and fluorescent light, especially fluorescent light.

• Journal of the Korea Organic Resources Recycling Association
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• v.14 no.3
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• pp.85-90
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• 2006

The purpose of this research is to design an imitation boiler similar to the waste heat boiler installed on a plasma melting furnace in order to acquire a capability of a thermal design as to the circulation of heat and the discharge of noxious gas inside a boiler and to improve the efficiency of a waste heat boiler using the CFD (Computation Fluid Dynamics) program. The position of corrosion and the generation of a clinker inside a boiler due to temperature changes, combustion gas flows, and corrosive gases inside a boiler are examined to design the structure of an efficient boiler and recycle energy. As a result of this research, the boiler installed on a plasma melting furnace met the conditions of design by cooling the combustion gases discharged after the second combustion from an exhaust port, originally at 1,200 degrees Celsius, down to around 450 degrees Celsius. On the other hand, the circulation of corrosive gases (SOx and HCL) may lead to the generation of corrosion or a clinker in the upper and lower parts of an exhaust port more easily than any other parts of a boiler. Accordingly, the corrosion on the inside and outside walls of a boiler may result in a shortened lifespan of a boiler and an inability to recycle waste heat in an efficient manner. A prevention against corrosion at high and low temperatures needs to be considered in detail.

• Journal of Korean Society of Environmental Engineers
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• v.30 no.12
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• pp.1268-1272
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• 2008

Low temperature plasma applied with partial oxidation is a technique to produce synthesis gas from methane. Low temperature plasma reformer has superior miniaturization and start-up characteristics to reformers using steam reforming or CO$_2$ reforming. In this research, a low temperature plasma reformer using GlidArc discharge was proposed. Reforming characteristics for each of the following variables were studied: gas components ratio (O$_2$/CH$_4$), the amount of steam, comparison of reaction on nickle and iron catalysts and the amount of CO$_2$. The optimum conditions for hydrogen production from methane was found. The maximum Hydrogen concentration of 41.1% was obtained under the following in this condition: O$_2$/C ratio of 0.64, total gas flow of 14.2 L/min, catalyst reactor temperature of 672$^{\circ}C$, the amount of steam was 0.8, reformer energy density of 1.1 kJ/L with Ni catalyst in the catalyst reactor. At this point, the methane conversion rate, hydrogen selectivity and reformer thermal efficiency were 66%, 93% and 35.2%, respectively.

• Korean Journal of Food Science and Technology
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• v.50 no.2
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• pp.165-171
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• 2018

Atmospheric-pressure plasma (APP) was applied to determine quality characteristics of brown rice (BR) and white rice (WR) of Samkwang and Palbangmi. APP (250 W, 15 kHz, ambient air) was generated and dielectric barrier discharge was applied for 0, 10, and 20 min for 2 weeks at 4 and $25^{\circ}C$. The growth of total aerobic bacteria and mold increased depending on the storage. Water content of BR and WR decreased by storage temperature and periods. No viable counts were detected for molds by APP-treated 20 min at $4^{\circ}C$. Changes in protein and damaged starch contents in plasma were not observed. Amylose contents were not changed, but WR (Palbangmi) showed a tendency to increase. The results show that APP improved the microbial quality of BR and WR of Samkwang and Palbangmi, although further studies should be conducted to determine change in quality by APP.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.146-147
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• 2011

Processing a large area substrate for liquid crystal display (LCD) or solar panel applications in a capacitively coupled plasma (CCP) reactor is becoming increasingly challenging because of the size of the substrate size is no longer negligible compared to the wavelength of the applied radio frequency (RF) power. The situation is even worse when the driving frequency is increased to the Very High Frequency (VHF) range. When the substrate size is still smaller than 1/8 of the wavelength, one can obtain reasonably uniform process results by utilizing with methods such as tailoring the precursor gas distribution by adjustingthrough shower head hole distribution or hole size modification, locally adjusting the distance between the substrate and the electrode, and shaping shower head holes to modulate the hollow cathode effect modifying theand plasma density distribution by shaping shower head holes to adjust the follow cathode effect. At higher frequencies, such as 40 MHz for Gen 8.5 (2.2 m${\times}$2.6 m substrate), these methods are not effective, because the substrate is large enough that first node of the standing wave appears within the substrate. In such a case, the plasma discharge cannot be sustained at the node and results in an extremely non-uniform process. At Applied Materials, we have studied several methods of modifying the standing wave pattern to adjusting improve process non-uniformity for a Gen 8.5 size CCP reactor operating in the VHF range. First, we used magnetic materials (ferrite) to modify wave propagation. We placed ferrite blocks along two opposing edges of the powered electrode. This changes the boundary condition for electro-magnetic waves, and as a result, the standing wave pattern is significantly stretched towards the ferrite lined edges. In conjunction with a phase modulation technique, we have seen improvement in process uniformity. Another method involves feeding 40 MHz from four feed points near the four corners of the electrode. The phase between each feed points are dynamically adjusted to modify the resulting interference pattern, which in turn modulate the plasma distribution in time and affect the process uniformity. We achieved process uniformity of <20% with this method. A third method involves using two frequencies. In this case 40 MHz is used in a supplementary manner to improve the performance of 13 MHz process. Even at 13 MHz, the RF electric field falls off around the corners and edges on a Gen 8.5 substrate. Although, the conventional methods mentioned above improve the uniformity, they have limitations, and they cannot compensate especially as the applied power is increased, which causes the wavelength becomes shorter. 40 MHz is used to overcome such limitations. 13 MHz is applied at the center, and 40 MHz at the four corners. By modulating the interference between the signals from the four feed points, we found that 40 MHz power is preferentially channeled towards the edges and corners. We will discuss an innovative method of controlling 40 MHz to achieve this effect.

• Bulletin of the Korean Space Science Society
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• 2007.10a
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• pp.139-143
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• 2007

Electric propulsion has become a cost effective and sound engineering solution for many space applications. The success of SMART-1 and MUSES-C developed by European Space Agency (ESA) and Japan Aerospace Exploration Agency (JAXA) each proved that even small spacecraft could accomplish planetary mission with electric propulsion systems. A small electric propulsion system which is Hall effect thruster like SMART-1 is under development by SaTReC and GDPL (Glow Discharge Plasma Lab.) in KAIST for the next microsatellite, STSAT-3. To achieve optimized propulsion system, it is very necessary to understand plasma motions of Hall effect thruster. In this paper, we try to approach comprehensive plasma model with the particle simulation complementary to Particle In Cell (PIC) simulation. We think these two different approaches will help experimenters to optimize Hall effect thruster performances.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.10 no.1
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• pp.23-30
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• 2017

Currently, road lightings are installed with less than 400W of existing metal halide lamps. These road lightings are being replaced by energy-saving lightings. Induction lamps are expected to be more actively replaced with targets for tunnel lighting and high ceiling lighting. Therefore, it is necessary to develop high efficiency, high power induction lamps system. In this study, the gas type & pressure, amalgam type were designed for the high power of the induction lamps. And induction lamp system was optimized through electrical, optical characteristics analysis. It is optimized to the gas pressure 300~350 [mmHg] for the discharge tube of high power induction lamp and ferrite core. The driving circuit matching was completed with a induction lamp using indium amalgam. The rated power consumption of the induction lamp was optimized with 250 W (rated ${\pm}10%$)

• Journal of the Korean Society for Heat Treatment
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• v.22 no.5
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• pp.307-311
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• 2009

In this study, TiCrN films were deposited on STS 316 Land Si (100) wafer by inductively coupled plasma (ICP) assisted D.C. magnetron sputtering. The effect R.F. power for ICP discharge on the mechanical properties of TiCrN films was investigated. XRD, XPS and FE-SEM were used for the structure analysis. Also the Micro-Knoop hardness tester and profilometer were used for measuring hardness of coatings and film stress respectively. As increasing the R.F. power for ICP discharge, thickness of coating was decreased from 1633 nm to 1288 nm but hardness was increased about $Hk_{5g}$ 4200 at 400 W. All of the XRD patterns showed (111), (200) and (220) peaks of TiCrN films. Surface morphology was studied using the profilometer. FE-SEM was used to know morphology and cross-section of the films. Structure of the films was changed dense as increased ICP power.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.7
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• pp.39-44
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• 2005

A great part of flint fuel is Hydrogen and carbon's combination, they should be generated steam and carbon gas when combine with oxygen for perfect combustion in the inside of engine but, the pollutive material are discharged, even though perfect combustion condition especially $NO_x$ and Smoke. they are really harmful for health. In this paper was shown the result of discharging gas' reduction quality. which used combination of corona discharge using the high voltage source of common frequency with EGR. $NO_x$ is increased in entire load erea in proportion to increasing of EGR rate and impression voltage. Smoke is increased slowly under 75[%] in load rate but it is increased rapidly in entire load erea and the reduction rate of Smoke is increased in proportion to increasing of impression voltage.